Metal oxide and transistor including metal oxide
View Patent ↗A novel metal oxide is provided. One embodiment of the present invention is a crystalline metal oxide. The metal oxide includes a first layer and a second layer; the first layer has a wider bandgap than the second layer; the first layer and the second layer form a crystal lattice; and in the case where a carrier is excited in the metal oxide, the carrier is transferred through the second layer. Furthermore, the first layer contains an element M (M is one or more selected from Al, Ga, Y, and Sn) and Zn, and the second layer contains In.
1. A crystalline metal oxide comprising a first layer and a second layer,
wherein the first layer has a wider bandgap than the second layer,
wherein the first layer and the second layer form a crystal lattice, and
wherein in the case where a temperature increases, the crystalline metal oxide is configured such that a thickness of the second layer in a c-axis direction is decreased.
2. The crystalline metal oxide according to claim 1 ,
wherein the first layer and the second layer are each placed parallel or substantially parallel to a formation surface of the crystalline metal oxide.
3. The crystalline metal oxide according to claim 1 ,
wherein the first layer comprises an element M (M is one or more selected from Al, Ga, Y, and Sn) and Zn,
wherein the second layer comprises In, and
wherein the first layer and the second layer are each placed parallel or substantially parallel to a formation surface of the crystalline metal oxide.
4. The crystalline metal oxide according to claim 1 ,
wherein the first layer and the second layer are each placed perpendicularly or substantially perpendicularly to a formation surface of the crystalline metal oxide.
5. The crystalline metal oxide according to claim 1 ,
wherein the first layer comprises an element M (M is one or more selected from Al, Ga, Y, and Sn) and Zn,
wherein the second layer comprises In, and
wherein the first layer and the second layer are each placed perpendicularly or substantially perpendicularly to a formation surface of the crystalline metal oxide.
6. The crystalline metal oxide according to claim 1 ,
wherein a distance between the first layer and the second layer is less than or equal to 1 nm.
7. The crystalline metal oxide according to claim 1 ,
wherein the crystalline metal oxide comprises a hexagonal lattice point when the crystalline metal oxide is observed with TEM from the c-axis direction.
8. A transistor comprising the crystalline metal oxide according to claim 1 ,
wherein the first layer and the second layer are each placed parallel or substantially parallel to a channel length direction of the transistor.
9. A semiconductor device comprising a capacitor and the transistor according to claim 8 ,
wherein the transistor comprises a source and a drain,
wherein the capacitor comprises a first electrode and a second electrode, and
wherein one of the source and the drain is electrically connected to one of the first electrode and the second electrode.
10. A crystalline metal oxide comprising a crystal structure,
wherein the crystal structure has a first layer and a second layer,
wherein the first layer and the second layer are alternately stacked,
wherein the first layer has a wider bandgap than the second layer, and
wherein in the case where a temperature increases, the crystalline metal oxide is configured such that a thickness of the second layer in a stacking direction is decreased.
11. The crystalline metal oxide according to claim 10 ,
wherein the first layer and the second layer are each placed parallel or substantially parallel to a formation surface of the crystalline metal oxide.
12. The crystalline metal oxide according to claim 10 ,
wherein the first layer comprises an element M (M is one or more selected from Al, Ga, Y, and Sn) and Zn,
wherein the second layer comprises In, and
wherein the first layer and the second layer are each placed parallel or substantially parallel to a formation surface of the crystalline metal oxide.
13. The crystalline metal oxide according to claim 10 ,
wherein the first layer and the second layer are each placed perpendicularly or substantially perpendicularly to a formation surface of the crystalline metal oxide.
14. The crystalline metal oxide according to claim 10 ,
wherein the first layer comprises an element M (M is one or more selected from Al, Ga, Y, and Sn) and Zn,
wherein the second layer comprises In, and
wherein the first layer and the second layer are each placed perpendicularly or substantially perpendicularly to a formation surface of the crystalline metal oxide.
15. The crystalline metal oxide according to claim 10 ,
wherein a distance between the first layer and the second layer is less than or equal to 1 nm.
16. The crystalline metal oxide according to claim 10 ,
wherein the crystalline metal oxide comprises a hexagonal lattice point when the crystalline metal oxide is observed with TEM from a c-axis direction.
17. A transistor comprising the crystalline metal oxide according to claim 10 ,
wherein the first layer and the second layer are each placed parallel or substantially parallel to a channel length direction of the transistor.
18. A semiconductor device comprising a capacitor and the transistor according to claim 17 ,
wherein the transistor comprises a source and a drain,
wherein the capacitor comprises a first electrode and a second electrode, and
wherein one of the source and the drain is electrically connected to one of the first electrode and the second electrode.