Semiconductor power device and method of manufacturing the same
A semiconductor power device includes a substrate, a drift layer disposed on the substrate, buried doped regions, gates, a gate insulation layer, well regions, source regions, and well contact regions. The buried doped regions are in the drift layer and parallel to each other, and each of the buried doped regions is a predetermined distance from an upper surface of the drift layer. The gates are on the drift layer and directly above the buried doped regions. The gate insulation layer is between the drift layer and the gates. The well regions are in the drift layer between the gates and separated from the buried doped regions, wherein the well regions and the buried doped regions are electrically connected. The source regions are within the well regions between the gates, and each of the well contact regions passes through the source region and contacts with the well.
1. A semiconductor power device, comprising:
a substrate;
a drift layer disposed on the substrate;
a plurality of buried doped regions disposed in the drift layer and parallel to each other, and each of the buried doped regions is a predetermined distance from an upper surface of the drift layer;
a plurality of gates disposed on the upper surface of the drift layer, and each of the gates is directly above each of the buried doped regions;
a gate insulation layer disposed between the drift layer and each of the gates;
a plurality of well regions disposed in the upper surface of the drift layer, and each of the well regions is between the gates and separated from the buried doped regions, wherein the well regions and the buried doped regions are electrically connected;
a plurality of source regions disposed within the plurality of well regions between the gates;
a plurality of well contact regions disposed in the upper surface of the drift layer, and each of the well contact regions passes through the source region and contacts with the well region; and
a strip of doped region disposed in the drift layer to connect the plurality of well regions and the plurality of buried doped regions, wherein the strip of doped region has an extension direction perpendicular to an extension direction of the plurality of gates, and the strip of doped region is in direct contact with the plurality of well contact regions.
2. The semiconductor power device of claim 1 , wherein the gates are symmetrically disposed on both sides of the strip of doped region.
3. The semiconductor power device of claim 1 , wherein a conductive type of the plurality of well regions is the same as a conductive type of the plurality of buried doped regions and different from a conductive type of the plurality of source regions.
4. The semiconductor power device of claim 1 , wherein a doping concentration of the plurality of well regions is ranged from 5E16/cm 3 to 1E18/cm 3 .
5. The semiconductor power device of claim 1 , wherein a doping concentration of the plurality of buried doped regions is more than 2E18/cm 3 .
6. The semiconductor power device of claim 1 , wherein the plurality of well regions partially overlaps with the plurality of buried doped regions in a vertical projection direction.
7. The semiconductor power device of claim 1 , wherein two sides of each of the buried doped regions partially overlap with two sides of each of the well regions in a vertical projection direction.
8. The semiconductor power device of claim 1 , further comprising:
a plurality of source electrodes disposed on the upper surface of the drift layer to be in direct contact with the plurality of well contact regions and the plurality of source regions;
a plurality of gate electrodes disposed on the plurality of gates; and
a drain electrode disposed on a bottom surface of the substrate.