Pressure-sensitive adhesive sheet for semiconductor wafer processing
Provided is a pressure-sensitive adhesive sheet for semiconductor wafer processing that is excellent in adhesiveness with a semiconductor wafer, and that has light peelability and suppresses adhesive residue. The pressure-sensitive adhesive sheet for semiconductor wafer processing includes in this order: a base material; an intermediate layer; and a UV-curable pressure-sensitive adhesive layer. The intermediate layer has a storage modulus of elasticity at room temperature, G′1 RT , of from 300 kPa to 2,000 kPa, and a storage modulus of elasticity at 80° C., G′1 80 , of from 10 kPa to 500 kPa. The UV-curable pressure-sensitive adhesive layer has a storage modulus of elasticity at room temperature, G′2 RT , of from 100 kPa to 1,000 kPa, and a storage modulus of elasticity at 80° C., G′2 80 , of from 10 kPa to 1,000 kPa. G′1 RT /G′2 RT is 1 or more.
1. A pressure-sensitive adhesive sheet for semiconductor wafer processing, comprising in this order:
a base material composed of a resin;
an intermediate layer including a polymer obtained by polymerizing a monomer composition containing (meth)acrylic acid C1-C20 alkyl esters and an acrylic monomer having a glass transition temperature of 40° C. or more; and
a UV-curable pressure-sensitive adhesive layer including a polymer having a polymerizable carbon-carbon double bond introduced into a side chain thereof,
wherein the intermediate layer has a storage modulus of elasticity at room temperature, G′1 RT , of from 300 kPa to 2,000 kPa, and a storage modulus of elasticity at 80° C., G′1 80 , of from 10 kPa to 500 kPa,
wherein the UV-curable pressure-sensitive adhesive layer has a storage modulus of elasticity at room temperature, G′2 RT , of from 100 kPa to 1,000 kPa, and a storage modulus of elasticity at 80° C., G′2 80 , of from 10 kPa to 1,000 kPa,
wherein G′1 RT /G′2 RT is 1 or more, and
wherein the intermediate layer contains a photopolymerization initiator and is free of any UV-curable component.
2. The pressure-sensitive adhesive sheet for semiconductor wafer processing according to claim 1 , wherein the intermediate layer and the UV-curable pressure-sensitive adhesive layer each contain an acrylic resin.
3. The pressure-sensitive adhesive sheet for semiconductor wafer processing according to claim 2 , wherein the acrylic resin contained in the intermediate layer is a polymer obtained by one of emulsion polymerization or solution polymerization.
4. The pressure-sensitive adhesive sheet for semiconductor wafer processing according to claim 1 , wherein the pressure-sensitive adhesive sheet for semiconductor wafer processing is a backgrinding tape.
5. The pressure-sensitive adhesive sheet for semiconductor wafer processing according to claim 1 , wherein the pressure-sensitive adhesive sheet for semiconductor wafer processing is configured to be bonded to a semiconductor wafer having unevenness.