Silicon-containing oxide-coated aluminum nitride particle and method of manufacturing the same
A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle. The content of carbon atoms is less than 1000 ppm by mass, and an Si/Al atom ratio of the surface as measured by AES analysis is 0.29 or more and 5.0 or less. In another aspect, the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less.
1. A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle, wherein
the content of carbon atoms is less than 1000 ppm by mass,
the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less, and
the silicon-containing oxide-coated aluminum nitride particle satisfies the following formula (4) wherein x represents the specific surface area (m 2 /g) of a silicon-containing oxide-coated aluminum nitride particle as determined by a BET method, and y represents the content of silicon atoms (ppm by mass) in a silicon-containing oxide-coated aluminum nitride particle,
y≤ 1000 x+ 500 (4).
2. The silicon-containing oxide-coated aluminum nitride particle according to claim 1 , wherein the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as determined by LEIS analysis is 15% or more and 40% or less.
3. The silicon-containing oxide-coated aluminum nitride particle according to claim 1 , wherein the content of carbon atoms is 50 ppm by mass or more.
4. The silicon-containing oxide-coated aluminum nitride particle according to claim 1 ,
wherein the concentration of ammonia eluted into aqueous hydrochloric acid is 10 mg/L or less when 3 g of the silicon-containing oxide-coated aluminum nitride particle is immersed in 17 g of aqueous hydrochloric acid adjusted to pH 4 at 85° C. for 2 hours.