Substrate holder and method of manufacturing a substrate holder

1. A substrate holder for use in a lithographic apparatus, the substrate holder comprising:

a main body;

a plurality of first burls provided on a first side of the main body and having end surfaces to support a substrate, wherein the first burls each comprise a lower body portion protruding from the main body and an upper body portion above the lower body portion, wherein the lower body portions are a different material than the upper body portions, and the upper body portions comprise CrN; and

a plurality of second burls provided on a second side of the main body.

2. The substrate holder of claim 1 , wherein the main body has thickness in a range of about 1 mm to about 50 mm.

3. The substrate holder of claim 1 , wherein the plurality of first burls project from the main body by a distance selected from the range of from 1 to 250 μm.

4. The substrate holder of claim 1 , wherein the number of the first burls distributed across the substrate holder is more than 10,000.

5. The substrate holder of claim 1 , wherein the main body comprises at least one material selected from: Zerodur ceramic, cordierite, SiSiC, SiC, AIN, SiSiC, ceramic or glass-ceramic.

6. The substrate holder of claim 1 , wherein the main body is formed of a different material from the first and/or second burls.

7. A lithographic apparatus comprising the substrate holder of claim 1 .

8. A substrate holder for use in a lithographic apparatus, the substrate holder comprising:

a main body;

a plurality of first burls provided on a first side of the main body and having end surfaces to support a substrate, wherein the first burls each comprise CrN; and

a plurality of second burls provided on a second side of the main body,

wherein the main body has thickness in a range of about 1 mm to about 50 mm.

9. The substrate holder of claim 8 , wherein the main body is formed of a different material from the first and/or second burls.

10. The substrate holder of claim 8 , wherein the main body comprises at least one material selected from: Zerodur ceramic, cordierite, SiSiC, SiC, AIN, SiSiC, ceramic or glass-ceramic.

11. The substrate holder of claim 8 , wherein the plurality of first burls project from the main body by a distance selected from the range of from 1 to 250 μm.

12. The substrate holder of claim 8 , wherein the first burls each have a cylindrical or tapered shape.

13. The substrate holder of claim 8 , wherein the number of the first burls distributed across the substrate holder is more than 10,000.

14. The substrate holder of claim 8 , wherein the upper body portions of the first burls comprise diamond or diamond-like carbon.

15. A lithographic apparatus comprising the substrate holder of claim 8 .

16. A substrate holder for use in a lithographic apparatus, the substrate holder comprising:

a main body;

a plurality of first burls provided on a first side of the main body and having end surfaces to support a substrate, wherein the first burls each comprise CrN; and

a plurality of second burls provided on a second side of the main body, wherein the first and/or second burls each have a horizontal cross-sectional dimension in a range of about 200 μm to about 500 μm and/or wherein a spacing between first burls and/or between second burls is in a range of about 1.5 mm to about 3 mm.

17. The substrate holder of claim 16 , wherein the first and/or second burls each have a horizontal cross-sectional dimension in a range of about 200 μm to about 500 μm.

18. The substrate holder of claim 16 , wherein a spacing between first burls and/or between second burls is in a range of about 1.5 mm to about 3 mm.

19. The substrate holder of claim 16 , wherein upper body portions of the first burls comprise diamond or diamond-like carbon.

20. A lithographic apparatus comprising the substrate holder of claim 16 .