Metal oxide layered structure and methods of forming the same
Some embodiment structures and methods are described. A structure includes an integrated circuit die at least laterally encapsulated by an encapsulant, and a redistribution structure on the integrated circuit die and encapsulant. The redistribution structure is electrically coupled to the integrated circuit die. The redistribution structure includes a first dielectric layer on at least the encapsulant, a metallization pattern on the first dielectric layer, a metal oxide layered structure on the metallization pattern, and a second dielectric layer on the first dielectric layer and the metallization pattern. The metal oxide layered structure includes a metal oxide layer having a ratio of metal atoms to oxygen atoms that is substantially 1:1, and a thickness of the metal oxide layered structure is at least 50 Å. The second dielectric layer is a photo-sensitive material. The metal oxide layered structure is disposed between the metallization pattern and the second dielectric layer.
1. A method comprising:
forming a through via over a dielectric layer;
placing a semiconductor die onto the dielectric layer;
encapsulating the through via and the semiconductor die;
forming a metallization pattern over the semiconductor die;
generating an oxygen-containing plasma; and
using the oxygen-containing plasma to create a metal oxide from the metallization pattern, the metal oxide having a ratio of atoms of a metal from the metallization pattern to atoms of oxygen of substantially 1:1, the metal oxide being at least 50 Å thick.
2. The method of claim 1 , wherein the generating the oxygen-containing plasma utilizes diatomic oxygen.
3. The method of claim 1 , wherein the generating the oxygen-containing plasma utilizes ozone.
4. The method of claim 1 , wherein the generating the oxygen-containing plasma utilizes water.
5. The method of claim 1 , further comprising forming a native oxide on the metallization pattern prior to the generating the oxygen-containing plasma.
6. The method of claim 5 , further comprising removing the native oxide.
7. The method of claim 5 , wherein the using the oxygen-containing plasma is performed with the native oxide still in place.
8. A method comprising:
encapsulating though vias and a semiconductor die with an encapsulant;
forming a metallization pattern over the encapsulant; and
exposing the metallization pattern to an oxygen-containing plasma to form a metal-oxide layer, the metal-oxide layer having a ratio of atoms of oxygen to atoms of a metal of substantially 1:1, the metal-oxide layer being at least 50 Å thick.
9. The method of claim 8 , further comprising removing a native oxide from the metallization pattern prior to the exposing the metallization pattern.
10. The method of claim 8 , wherein the oxygen-containing plasma comprises an ozone plasma.
11. The method of claim 10 , wherein the oxygen-containing plasma further comprises nitrogen.
12. The method of claim 8 , further comprising forming a native oxide after the exposing the metallization pattern.
13. The method of claim 12 , further comprising exposing the native oxide to a second oxygen-containing plasma to form a second metal-oxide layer, the second metal-oxide layer having a second ratio of atoms of oxygen to atoms of a metal of substantially 1:1.
14. The method of claim 12 , further comprising forming a dielectric layer in physical contact with the native oxide.
15. The method of claim 8 , further comprising forming a native oxide prior to the exposing the metallization pattern.
16. A method comprising:
encapsulating an integrated circuit die with an encapsulant;
forming a dielectric layer over the encapsulant and the integrated circuit die;
forming a metallization pattern over the dielectric layer;
treating the metallization pattern with an oxygen-containing plasma, the treating forming a metal oxide layer having a ratio of metal atoms to oxygen atoms that is substantially 1:1 over the metallization pattern, a thickness of the metal oxide layer being at least 50 Å; and
forming a photo-sensitive material over the metal oxide layer.
17. The method of claim 16 , further comprising removing a native oxide from the metallization pattern before the treating the metallization pattern.
18. The method of claim 16 , wherein the treating the metallization pattern forms the metal oxide layer on a native oxide, the native oxide being disposed between the metallization pattern and the metal oxide layer.
19. The method of claim 16 , wherein the thickness is not more than 200 Å.
20. The method of claim 16 , wherein the thickness is not more than 100 Å.