Process kits and related methods for processing chambers to facilitate deposition process adjustability
The present disclosure relates to flow guides, process kits, and related methods for processing chambers to facilitate deposition process adjustability. In one implementation, a flow guide includes a middle plate having a first side and a second side opposing the first side along a first direction. The first side and the second side are arcuate. The flow guide includes a first flange extending outwardly relative to a third side of the middle plate and outwardly relative to an outer face of the middle plate, and a second flange extending outwardly relative to a fourth side of the middle plate and outwardly relative to the outer face of the middle plate. The fourth side opposes the third side along a second direction that intersects the first direction. The flow guide includes a rectangular flow opening defined between the first flange and the second flange.
1. A process kit for disposition in a processing chamber applicable for use in substrate manufacturing, the process kit comprising:
a flow guide comprising:
a middle plate having a first side and a second side opposing the first side along a first direction, the first side and the second side being arcuate,
a first flange extending outwardly relative to a third side of the middle plate and outwardly relative to an outer face of the middle plate,
a second flange extending outwardly relative to a fourth side of the middle plate and outwardly relative to the outer face of the middle plate, the fourth side opposing the third side along a second direction that intersects the first direction, and
a rectangular flow opening defined between a first planar inner face of the first flange and a second planar inner face of the second flange,
one or more first openings formed in the middle plate adjacent to the first side, and
one or more second openings formed in the middle plate adjacent to the second side.
2. The process kit of claim 1 , wherein each of the first flange and the second flange is semi-circular in shape.
3. The process kit of claim 1 , wherein an inner face of the middle plate comprises one or more fins each having a planar edge, an arcuate edge, or a patterned edge, wherein each of the one or more fins has a length that is less than a diameter extending between the first side and the second side.
4. The process kit of claim 1 , wherein the flow guide further comprises:
a first edge section extending between the third side of the middle plate and the first flange; and
a second edge section extending between the fourth side of the middle plate and the second flange.
5. The process kit of claim 4 , wherein each of the first edge section and the second edge section is rectangular in shape.
6. The process kit of claim 5 , wherein the flow guide further comprises:
at least one of the one or more first openings formed between the first flange and the first edge section, and
at least one of the one or more second openings formed between the second flange and the second edge section.
7. The process kit of claim 6 , further comprising a cover, the cover comprising:
a ring;
a first protrusion extending from the ring and configured to extend into the first opening; and
a second protrusion extending from the ring and configured to extend into the second opening.
8. The process kit of claim 7 , wherein the first protrusion and the second protrusion are slidable respectively in the one or more first openings and the one or more second openings, wherein each of the one or more first openings, the one or more second openings, the first protrusion, and the second protrusion are semi-circular in shape.
9. The process kit of claim 1 , further comprising a cover configured to cover the one or more first openings and the one or more second openings, the cover comprising a ring having a width that is larger than a major diameter of each of the one or more first openings and the one or more second openings.
10. The process kit of claim 9 , wherein the cover is movable to slide one or more protrusions of the cover relative to the middle plate.
11. A processing chamber applicable for use in substrate manufacturing, comprising:
a window at least partially defining an internal volume;
a plurality of lamps;
a substrate support disposed in the internal volume, the substrate support comprising a support face; and
a process kit disposed in the internal volume, the process kit comprising a flow guide, the flow guide comprising:
a middle plate disposed between the support face and the plurality of lamps, the middle plate having a first side and a second side, the first side and the second side being arcuate,
a first flange extending outwardly relative to a third side of the middle plate and outwardly relative to an outer face of the middle plate,
a second flange extending outwardly relative to a fourth side of the middle plate and outwardly relative to the outer face of the middle plate,
a rectangular flow opening defined between a first planar inner face of the first flange and a second planar inner face of the second flange, and
one or more first openings formed in the middle plate adjacent to the first side, and
one or more second openings formed in the middle plate adjacent to the second side.
12. The processing chamber of claim 11 , wherein the first flange and the second flange are supported on a pre-heat ring disposed outwardly of the substrate support.
13. The processing chamber of claim 11 , wherein the middle plate is supported on a liner.
14. A process kit for disposition in a processing chamber applicable for use in substrate manufacturing, the process kit comprising:
a flow guide comprising:
a middle plate having a first side and a second side opposing the first side along a first direction, the first side and the second side being arcuate,
a first flange extending outwardly relative to a third side of the middle plate and outwardly relative to an outer face of the middle plate,
a second flange extending outwardly relative to a fourth side of the middle plate and outwardly relative to the outer face of the middle plate, the fourth side opposing the third side along a second direction that intersects the first direction,
a rectangular flow opening defined between a first planar inner face of the first flange and a second planar inner face of the second flange
a first edge section extending between the third side of the middle plate and the first flange,
a second edge section extending between the fourth side of the middle plate and the second flange,
a first opening formed between the first flange and the first edge section, and
a second opening formed between the second flange and the second edge section.
15. The process kit of claim 14 , wherein each of the first edge section and the second edge section is rectangular in shape.
16. The process kit of claim 14 , further comprising a cover, the cover comprising:
a ring;
a first protrusion extending from the ring and configured to extend into the first opening; and
a second protrusion extending from the ring and configured to extend into the second opening.
17. The process kit of claim 16 , wherein the first protrusion and the second protrusion are slidable respectively in the first opening and the second opening, wherein each of the first opening, the second opening, the first protrusion, and the second protrusion is semi-circular in shape.
18. The process kit of claim 14 , wherein an inner face of the middle plate comprises one or more fins each having a planar edge, an arcuate edge, or a patterned edge, wherein each of the one or more fins has a length that is less than a diameter extending between the first side and the second side.
19. The process kit of claim 18 , wherein the middle plate is rectangular in shape, and the diameter is a second length extending between the first side and the second side.
20. The process kit of claim 14 , wherein each of the first flange and the second flange is semi-circular in shape.