Memory device
A memory device includes a bottom electrode, a selector, a memory layer, and a top electrode. The selector is over the bottom electrode. A sidewall of the bottom electrode and a sidewall of the selector are coterminous. The memory layer is formed over the selector and has a width greater than a width of the selector. A top electrode is formed over the memory layer.
1 . A memory device comprising:
a bottom electrode, wherein an entirety of a bottom surface of the bottom electrode is a continuous convex surface;
a selector over the bottom electrode, wherein a sidewall of the bottom electrode and a sidewall of the selector are coterminous;
a capping layer over the selector and having a topmost surface and a concave sidewall that extends to the topmost surface of the capping layer;
a dielectric layer surrounding the bottom electrode and the selector, wherein a topmost surface of the selector is lower than a topmost surface of the dielectric layer by a distance of about 1 nm to about 94 nm, the concave sidewall of the capping layer forming an arc-shaped interface with the dielectric layer;
a memory layer over the selector and having a width greater than a width of the selector; and
a top electrode over the memory layer.
2 . The memory device of claim 1 , wherein the selector is not in contact with the memory layer.
3 . The memory device of claim 1 , wherein the width of the memory layer is greater than a width of the capping layer.
4 . The memory device of claim 1 , wherein the concave sidewall of the capping layer and the sidewall of the bottom electrode are coterminous.
5 . The memory device of claim 1 , wherein the dielectric layer further surrounds the capping layer.
6 . The memory device of claim 1 , wherein the selector is an ovonic threshold switch (OTS).
7 . A memory device comprising:
a bottom conductive line;
a selector above and electrically connected to the bottom conductive line;
a capping layer above and electrically connected to the selector, wherein the capping layer has a concave sidewall;
a dielectric layer surrounding the capping layer and the selector and covering the bottom conductive line, the concave sidewall of the capping layer forming an arc-shaped interface with the dielectric layer;
a memory layer above the selector and the dielectric layer, wherein a bottom surface of the memory layer is in direct contact with the dielectric layer, and the concave sidewall of the capping layer extends to the bottom surface of the memory layer, wherein an entirety of the concave sidewall of the capping layer is in contact with the dielectric layer; and
a top conductive line above and electrically connected to the memory layer.
8 . The memory device of claim 7 , wherein the selector is an ovonic threshold switch (OTS).
9 . The memory device of claim 7 , further comprising a bottom electrode between the selector and the bottom conductive line.
10 . The memory device of claim 9 , wherein a width of the selector is substantially the same as a width of the bottom electrode.
11 . A memory device comprising:
a bottom electrode, wherein an entirety of a top surface of the bottom electrode is a continuous concave surface, and an entirety of a bottom surface of the bottom electrode is a continuous convex surface;
a selector over the bottom electrode, wherein the selector is thicker at a central axis of the selector than at a sidewall of the selector;
a capping layer over the selector and having a topmost surface and a concave sidewall that extends to the topmost surface of the capping layer;
a dielectric layer around the capping layer, the concave sidewall of the capping layer forming an arc-shaped interface with the dielectric layer;
a memory layer over the selector; and
a top electrode over the memory layer, wherein a width of the top electrode is substantially the same as a width of the memory layer and greater than a width of the selector.
12 . The memory device of claim 11 , wherein the width of the selector is substantially the same as a width of the bottom electrode.
13 . The memory device of claim 11 , wherein a width of the capping layer is less than a width of the top electrode.
14 . The memory device of claim 11 , wherein the capping layer is a metal nitride material.
15 . The memory device of claim 1 , wherein the dielectric layer has a round corner defined by the topmost surface of the dielectric layer and an inner sidewall of the dielectric layer.
16 . The memory device of claim 1 , wherein a vertical thickness of the selector is greater than a vertical thickness of the bottom electrode.
17 . The memory device of claim 7 , wherein the capping layer further has a convex bottom surface connected to the concave sidewall of the capping layer.
18 . The memory device of claim 11 , wherein an acute angle is defined by the concave sidewall of the capping layer and the topmost surface of the capping layer.
19 . The memory device of claim 9 , wherein an entirety of a bottom surface of the bottom electrode is a continuous convex surface, and an entirety of a bottom surface of the selector is a continuous convex surface having a different curvature than the continuous convex surface of the bottom electrode.
20 . The memory device of claim 7 , wherein, in a cross-sectional view, the arc-shaped interface formed by the concave sidewall of the capping layer and the dielectric layer has a topmost point in contact with the memory layer.