PCRAM structure with selector device

1. A memory device comprising:

a substrate;

a bottom electrode disposed over the substrate;

an insulating layer disposed over the bottom electrode, the insulating layer having a through hole defined in the insulating layer;

a heater disposed in the through hole;

a phase change material layer disposed over the heater;

a selector layer consisting of at least one selected from the group consisting of SiO x , TiO x , AlO x , WO x , Ti x N y O z , HfO x , TaO x , and NbO x , where x, y and z are non-stoichiometric values, AsGeSe doped with one or more elements of N, P, S, Si or Te, and AsGeSeSi doped with one or more elements of N, P, S, Si or Te, and disposed on and in direct contact with the phase change material layer; and

a metal layer disposed over the selector layer.

2. The memory device of claim 1 , wherein the metal layer is wider than the phase change material layer.

3. The memory device of claim 1 , wherein the phase change material layer is disposed in the through hole.

4. The memory device of claim 3 , wherein the selector layer is disposed in the through hole.

5. The memory device of claim 1 , wherein the metal layer functions as an upper electrode.

6. A memory device comprising:

a substrate;

a bottom electrode disposed over the substrate;

a first heater disposed over the bottom electrode;

a first phase change material layer disposed over the first heater;

a first selector layer consisting of at least one selected from the group consisting of SiO x , TiO x , AlO x , WO x , HfO x , TaO x , and NbO x , where x, y and z are non-stoichiometric values, AsGeSe doped with one or more elements of N, P, S, Si or Te, and AsGeSeSi doped with one or more elements of N, P, S, Si or Te, and disposed on and in direct contact with the first phase change material layer;

a metal layer disposed over the first selector layer;

a second selector layer disposed over the metal layer;

a second heater and a second phase change material layer disposed over the second selector layer;

an upper electrode disposed over the second heater and the second phase change material layer; and

an insulating layer between the bottom electrode and the upper electrode, enclosing, with the bottom and upper electrodes, the first and second heaters, the first and second selector layers, the first and second phase change material layers, and the metal layer.

7. The memory device of claim 6 , wherein the metal layer is wider than the first phase change material layer.

8. The memory device of claim 6 , wherein the second heater is disposed over the second phase change material layer.

9. The memory device of claim 6 , wherein the second phase change material layer is disposed over the second heater.

10. The memory device of claim 6 , wherein the second selector layer is wider than the first selector layer.

11. The memory device of claim 6 , wherein the second selector layer consists of at least one selected from the group consisting of SiO x , TiO x , AlO x , WO x , TiO x N y O z , HfO x , TaO x and NbO x , where x, y and z are non-stoichiometric values, AsGeSe doped with one or more elements of N, P, S, Si or Te, and AsGeSeSi doped with one or more elements of N, P, S, Si or Te, and is in direct contact with the second phase change material layer.

12. A memory device comprising:

a lower wiring disposed over a. substrate;

an upper wiring;

a first interlayer dielectric (ILD) layer disposed between the lower wiring and the upper wiring; and

a memory cell disposed between the lower wiring and the upper wiring, wherein:

the memory cell includes:

a heater disposed over a the lower wiring;

a phase change material layer disposed over the heater;

a selector layer disposed over the phase change material layer;

a metal layer disposed over the selector layer; and

an intermediate layer between the phase change material layer and the selector layer,

the heater, the phase change material layer and the intermediate layer are disposed in a hole formed in in the first ILD layer and the metal layer is disposed on an upper surface of the first ILD layer and laterally extending beyond the hole on the upper surface,

a second ILD layer is disposed on the upper surface of the first ILD layer, and the metal layer is embedded in the second ILD layer,

the intermediate layer consists of tungsten, and

the selector layer consists of at least one selected from the group consisting of SiO x , TiO x , AlO x , WO x , Ti x N y O z , HfO x , TaO x , and NbO x , where x, y and z are non-stoichiometric values, AsGeSe doped with one or more elements of N, R S, Si or Te, and AsGeSeSi doped with one or more elements of N, P, S, Si or Te, and disposed on and in direct contact with the first phase change material layer.

13. The memory device of claim 12 , wherein the selector layer is disposed on the upper surface of the first HD layer and laterally extending beyond the hole on the upper surface.

14. The memory device of claim 12 , wherein the selector layer is disposed in the hole.

15. The memory device of claim 12 , wherein the selector layer consists of at least one selected from the group consisting of SiO x , TiO x , AlO x , WO x , TiO x N y O z , HfO x , TaO x and NbO x , where x, y and z are non-stoichiometric values.

16. The memory device of claim 12 , wherein the selector layer consists of at least one of AsGeSe doped with one or more elements of N, P, S, Si and Te and AsGeSeSi doped with one or more elements of N, P, S, Si and Te.

17. The memory device of claim 12 , wherein the selector layer consists of at least one selected from the group consisting of AsGeSe doped with one or more elements of N, P, S, Si or Te.

18. The memory device of claim 12 , wherein a thickness of the intermediate layer is 1 nm to 50 nm.