MRAM stacks and memory devices
Memory stacks, memory devices and method of forming the same are provided. A memory stack includes a spin-orbit torque layer, a magnetic bias layer and a free layer. The magnetic bias layer is in physical contact with the spin-orbit torque layer and has a first magnetic anisotropy. The free layer is disposed adjacent to the spin-orbit torque layer and has a second magnetic anisotropy perpendicular to the first magnetic anisotropy.
1. A memory stack, comprising:
a spin-orbit torque layer;
a magnetic bias layer disposed below the spin-orbit torque layer and having a first magnetic anisotropy; and
a free layer disposed above the spin-orbit torque layer and having a second magnetic anisotropy perpendicular to the first magnetic anisotropy,
wherein a width of the magnetic bias layer is different from a width of the free layer.
2. The memory stack of claim 1 , wherein the spin-orbit torque layer comprises W, Pt, AuPt or a combination thereof.
3. The memory stack of claim 1 , wherein a width of the magnetic bias layer is greater than a width of the free layer.
4. The memory stack of claim 1 , wherein the free layer comprises FeCo, CoFeB, FeB or a combination thereof.
5. The memory stack of claim 1 , wherein the magnetic bias layer comprises Co, CoNi or a combination thereof.
6. The memory stack of claim 1 , further comprising a buffer layer disposed below the magnetic bias, wherein the buffer layer comprises Ta, Ru, TiN, TaN, W or a combination thereof.
7. The memory stack of claim 1 , further comprising a magnetic fixed layer disposed over the free layer.
8. A memory stack, comprising:
a spin-orbit torque layer; and
a synthetic free layer disposed over the spin-orbit torque layer and comprising:
a first free layer with a first magnetic anisotropy perpendicular to a upper surface of the spin-orbit torque layer; and
a second free layer with a second magnetic anisotropy parallel to the upper surface of the spin-orbit torque layer,
wherein the first free layer is in direct contact with the spin-orbit torque layer.
9. The memory stack of claim 8 , wherein the first free layer comprises Co, CoNi or a combination thereof.
10. The memory stack of claim 8 , wherein the synthetic free layer further comprises a non-magnetic metal spacer between the first free layer and the second free layer.
11. The memory stack of claim 8 , wherein the second free layer comprises Fe, Co, Ni, FeCo, CoNi, CoFeB, FeB, FePt, FePd or a combination thereof.
12. The memory stack of claim 8 , further comprising a tunneling barrier layer disposed over the synthetic free layer.
13. The memory stack of claim 12 , further comprising a reference layer disposed over the tunneling barrier layer.
14. The memory stack of claim 13 , wherein the reference layer comprises Fe, Co, Ni, FeCo, CoNi, CoFeB, FeB, FePt, FePd or a combination thereof.
15. The memory stack of claim 13 , further comprising a capping structure disposed over the reference layer, wherein the capping structure comprises Ta, Ru or a combination thereof.
16. A memory device, comprising:
a substrate;
a first transistor disposed over the substrate and having a first source/drain region; and
a MRAM cell disposed over the substrate and comprising:
a first bottom electrode electrically coupled to the first source/drain region;
a spin-orbit torque layer disposed over the first and second bottom electrodes;
a synthetic free layer disposed over the spin-orbit torque layer and comprising two layers configured to have magnetic anisotropies perpendicular to each other; and
a top electrode disposed over the synthetic free layer and electrically coupled to a bit line.
17. The memory device of claim 16 , wherein the layer of the synthetic free layer that is in physical contact with the spin-orbit torque layer forms a perpendicular magnetic anisotropy with the spin-orbit torque layer.
18. The memory device of claim 16 , further comprising:
a second transistor disposed over the substrate and having a second source/drain region; and
a second bottom electrode disposed laterally aside the first bottom electrode and electrically coupled to the first source/drain region.
19. The memory device of claim 16 , further comprising:
a tunneling barrier layer disposed over the synthetic free layer; and
a reference layer disposed over the tunneling barrier layer,
wherein the top electrode is disposed over the reference layer.