Nonvolatile memory device and apparatus comprising the same
A non-volatile memory device is provided. The nonvolatile memory device includes a metal pillar, a channel layer separated from the metal pillar and surrounding a side surface of the metal pillar, a source arranged on one end of the channel layer, a drain arranged on the other end of the channel layer, a gate insulating layer surrounding a side surface of the channel layer, and a plurality of insulating elements and a plurality of gate electrodes alternately arranged along a surface of the gate insulating layer and surrounding a side surface of the gate insulating layer.
1 . A nonvolatile memory device comprising:
a metal pillar;
a channel layer separated from the metal pillar and surrounding a side surface of the metal pillar;
a source on one end of the channel layer;
a drain on another end of the channel layer and overlapping the metal pillar in a direction parallel to a side surface of the channel layer;
a gate insulating layer surrounding a side surface of the channel layer;
a plurality of insulating elements and a plurality of gate electrodes that alternate along a surface of the gate insulating layer and surrounding a side surface of the gate insulating layer; and
a conductive line in contact with the metal pillar and exposed to outside through the side surface of the channel layer, wherein
the metal pillar, as a body line, overlaps all of the plurality of gate electrodes in a direction perpendicular to the side surface of the channel layer, and the conductive line is disposed between the drain and the plurality of gate electrodes.
2 . The nonvolatile memory device of claim 1 ,
wherein at least one of the channel layer, the gate insulating layer, and the plurality of gate electrodes has a symmetrical structure with respect to the metal pillar.
3 . The nonvolatile memory device of claim 1 , further comprising:
an insulating material filling a space between the metal pillar and the channel layer.
4 . The nonvolatile memory device of claim 3 ,
wherein the insulating material includes at least one of silicon oxide and a thermally conductive ceramic.
5 . The nonvolatile memory device of claim 1 ,
wherein a reference voltage is configured to be applied to the metal pillar through the conductive line.
6 . The nonvolatile memory device of claim 5 ,
wherein the reference voltage is constant and independent of voltages applied to the plurality of gate electrodes.
7 . The nonvolatile memory device of claim 5 ,
wherein the reference voltage is within a voltage range of voltages applied to the plurality of gate electrodes.
8 . The nonvolatile memory device of claim 5 ,
wherein the metal pillar is configured to be grounded.
9 . The nonvolatile memory device of claim 1 ,
wherein the gate insulating layer includes at least one of SiO, AlO, SiON, and SiN.
10 . The nonvolatile memory device of claim 1 , further comprising:
a ferroelectric layer between the plurality of gate electrodes and surrounding the side surface of the gate insulating layer.
11 . The nonvolatile memory device of claim 10 ,
wherein the ferroelectric layer includes a material represented by MO 2 (where M is Hf, Zr, or a combination of Hf and Zr) as a base material.
12 . The nonvolatile memory device of claim 10 ,
wherein the ferroelectric layer further includes at least one dopant material selected from the group including C, Si, Ge, Sn, Pb, Al, Y, La, Gd, Mg, Ca, Sr Ba, Ti, Zr, Hf, and a combination two or more of C, Si, Ge, Sn, Pb, Al, Y, La, Gd, Mg, Ca, Sr, Ba, Ti, Zr, Hf.
13 . The nonvolatile memory device of claim 1 ,
wherein the gate insulating layer includes:
a charge tunneling layer through which charges are configured to be tunneled;
a charge trap layer configured to stored introduced charges; and
a charge blocking layer configured to block a charge transfer between the charge trap layer and at least one of the plurality of gate electrodes.
14 . The nonvolatile memory device of claim 1 , further comprising:
a variable resistance layer in contact with the channel layer between the metal pillar and the channel layer.
15 . The nonvolatile memory device of claim 1 , further comprising:
a bit line electrically connected to the drain and configured to apply a voltage to the nonvolatile memory device to perform at least one of program, read, and erase operations.
16 . An electronic device comprising:
the nonvolatile memory device according to claim 1 ; and
at least one active or passive circuit.
17 . A memory device comprising:
a metal pillar;
a channel layer separated from the metal pillar and surrounding a side surface of the metal pillar;
a source on one end of the channel layer, the source contacting the metal pillar;
a drain on another end of the channel layer, the drain overlapping the metal pillar in a direction parallel to a side surface of the channel layer;
a gate insulating layer surrounding a side surface of the channel layer; and
a plurality of insulating elements and a plurality of gate electrodes that alternate along a surface of the gate insulating layer and surrounding a side surface of the gate insulating layer, and
a conductive line in contact with the metal pillar and exposed to outside through the side surface of the channel layer,
wherein the metal pillar, as a body line, overlaps all of the plurality of gate electrodes in a direction perpendicular to the side surface of the channel layer, and the conductive line is disposed between the drain and the plurality of gate electrodes.
18 . The memory device of claim 17 , wherein the channel layer has a cylindrical shape.
19 . The memory device of claim 17 , further comprising:
a substrate, wherein the source is in contact with the substrate.