Device and method for the alignment of substrates
The invention relates to a device and a method for the alignment of substrates.
1. A device for the alignment of substrates, comprising:
a first substrate holder for accommodating a first substrate on a first substrate holder surface,
a second substrate holder for accommodating a second substrate on a second substrate holder surface,
wherein the first substrate holder surface is facing towards the second substrate holder surface,
wherein the first substrate holder comprises at least three inner distance sensors for measuring first distances, the first distances being between the at least three inner distance sensors and the first substrate, and
wherein the first substrate holder comprises at least three outer distance sensors for measuring second distances, the second distances being between the at least three outer distance sensors and the second substrate holder surface of the second substrate holder.
2. The device according to claim 1 , wherein in each case one of the at least three inner distance sensors and in each case one of the at least three outer distance sensors together form a distance sensor pair,
wherein preferably the respective inner distance sensor and the respective outer distance sensor of the distance sensor pair, proceeding from a reference point of the first substrate holder surface, are aligned in a radial direction.
3. The device according to claim 2 , wherein the first substrate holder comprises at least three of the distance sensor pairs,
wherein respective one of the inner distance sensors and respective ones of the outer distance sensors of the at least three distance sensor pairs are in each case aligned in the radial direction.
4. The device according to claim 1 , wherein the at least three outer distance sensors are arranged on a first circle about a reference point of the first substrate holder surface.
5. The device according to claim 4 , wherein the at least three inner distance sensors are arranged on a second circle about the reference point of the first substrate holder surface,
wherein the first circle and the second circle are concentric with respect to one another.
6. The device according to claim 1 , wherein the at least three inner distance sensors and/or the at least three outer distance sensors are arranged beneath the first substrate holder surface.
7. The device according to claim 1 , wherein the first substrate holder surface and the second substrate holder surface are able to be arranged at least partially above one another, so that the first substrate can be dropped onto the second substrate.
8. The device according to claim 1 , wherein the at least three inner distance sensors and/or the at least three outer distance sensors are movable in a radial direction with respect to a reference point of the first substrate holder surface.
9. The device according to claim 5 , wherein the at least three inner distance sensors are movable along the second circle and/or the at least three outer distance sensors along the first circle.
10. The device according to claim 1 , wherein the at least three inner distance sensors and/or the at least three outer distance sensors are movable perpendicularly to the first substrate holder surface.
11. The device according to claim 1 , wherein the first substrate holder and/or the second substrate holder are able to be aligned with one another so that a wedge error between the first substrate and the second substrate is able to be compensated.
12. The device according to claim 1 , wherein the first substrate holder and/or the second substrate holder comprises controllable fixing elements, so that the first substrate and/or the second substrate can be fixed and/or released.
13. A method for aligning substrates, comprising:
accommodating a first substrate on a first substrate holder surface of a first substrate holder,
accommodating a second substrate on a second substrate holder surface of a second substrate holder, the first substrate holder surface facing towards the second substrate holder surface,
measuring first distances between at least three inner distance sensors of the first substrate holder and the first substrate, and
measuring second distances between at least three outer distance sensors of the first substrate holder and the second substrate holder surface of the second substrate holder.
14. The method according to claim 13 , further comprising:
storing the first distances in an electronic data-processing device,
transferring the first substrate to the second substrate holder, such that the first substrate lies on the second substrate,
measuring further first distances between the at least three inner distance sensors and the first substrate, the first substrate lies on the second substrate,
aligning the first substrate holder and/or the second substrate holder, so that in each case a difference between the respective measured further first distances of the at least three inner distance sensors and the respective stored first distances of the at least three inner distance sensors is the same, as a result of which a wedge error between the first substrate and the first substrate holder is compensated,
storing the measured second distances in the electronic data-processing device,
wherein the storing of the measured second distances takes place after the aligning of the first substrate holder and/or the second substrate holder.
15. The method according to claim 14 , further comprising:
aligning a further first substrate and a further second substrate with one another, the aligning depending on the stored second distances, so that a wedge error between the further first substrate and the further second substrate is compensated.
16. The device according to claim 1 , wherein the first distances are between the at least three inner distance sensors and a substrate surface of the first substrate.
17. The device according to claim 2 , wherein the reference point is a centre point of the first substrate holder surface.
18. The device according to claim 4 , wherein the at least three outer distance sensors are arranged symmetrically offset on the first circle.
19. The device according to claim 5 , wherein the at least three inner distance sensors are arranged symmetrically offset on the second circle.
20. The device according to claim 1 , wherein alignment of the first substrate holder and/or the second substrate holder with one another is dependent on the first distances and/or the second distances.