Unit for storing liquid and apparatus for treating substrate
The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.
1 . A liquid storage unit comprising:
a tank housing defining a storing space therein;
a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and
a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and
wherein a first guide surface is provided between the outlet and the inlet,
wherein a part or all of the inlet at least partially overlaps the first guide surface when seen from above.
2 . The liquid storage unit of claim 1 , wherein the first guide surface is configured to be formed so a flow of a liquid introduced from the inlet is guided further away from the outlet.
3 . The liquid storage unit of claim 1 , wherein the first guide surface is provided to have a height which decreases in a direction toward a part at which the inlet is provided from a part at which the outlet is provided.
4 . The liquid storage unit of claim 1 , wherein the outlet is positioned outside of a region at which the first guide surface is projected in an up/down direction.
5 . The liquid storage unit of claim 1 , wherein the first guide surface is a portion among a bottom surface defining the storing space, and
the bottom surface has a center which upwardly protrudes and a height which decreases from the center toward an edge direction, and
wherein the first guide surface is defined as a surface having the height which decreases, and
the liquid outlet pipe is provided penetrating through the center which upwardly protrudes.
6 . The liquid storage unit of claim 1 , wherein the first guide surface is a rounded shape.
7 . The liquid storage unit of claim 2 , wherein a bottom surface includes a second guide surface having a height which increases from an end portion of the first guide surface toward an edge direction.
8 . The liquid storage unit of claim 7 , wherein the second guide surface is a rounded shape.
9 . The liquid storage unit of claim 1 , wherein the inlet of the liquid inlet pipe is positioned adjacent to a bottom surface of the storing space.
10 . The liquid storage unit of claim 9 , wherein the inlet is positioned at a position lower than a top end of the first guide surface or at a same level.
11 . The liquid storage unit of claim 1 , wherein the outlet is positioned at a position higher than a top portion of the first guide surface or at a same level.
12 . The liquid storage unit of claim 1 , wherein the inlet is positioned at a position lower than a top end of the first guide surface or at a same level, and
wherein the outlet is positioned at a position higher than a top portion of the first guide surface or at a same level.
13 . The liquid storage unit of claim 1 , wherein a level of the outlet is higher than a level at which the inlet is positioned.
14 . A liquid storage unit comprising:
a tank housing defining a storing space therein; and
a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon;
a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon; and
a first line connecting the liquid outlet pipe and the liquid inlet pipe, and
wherein the outlet is positioned at a position higher than a position of the inlet.
15 . The liquid storage unit of claim 14 further comprising a pump provided at the first line and configured to generate a flow of a liquid from the liquid outlet pipe to the liquid inlet pipe.
16 . The liquid storage unit of claim 14 further comprising a liquid charging line connected through a liquid supply source and a second line, and penetrating into the tank housing.
17 . A liquid storage unit comprising:
a tank housing defining a storing space therein;
a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and
a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and
wherein a first guide surface is provided between the outlet and the inlet, and
the first guide surface is defined as a bottom surface defining the storing space.
18 . The liquid storage unit of claim 17 , wherein the first guide surface is a rounded shape.
19 . The liquid storage unit of claim 18 , wherein the bottom surface includes a second guide surface having a height which increases from an end portion of the first guide surface toward an edge direction.
20 . The liquid storage unit of claim 17 , wherein the outlet is positioned outside of a region at which the first guide surface is projected in an up/down direction.