Fluid supply unit and substrate treating apparatus having the same
An apparatus for treating a substrate includes a process chamber having a treatment space for treating the substrate; a fluid supply unit for supplying fluid to the treatment space, wherein the fluid supply unit includes: a supply pipe connected to the treatment space to supply the fluid to the treatment space; a pump installed in the supply pipe to provide flow pressure to the fluid; a vent line installed between the pump and the process chamber to discharge pressure in the fluid to an outside; a relief valve installed in the vent line to open and close the vent line; and a reservoir installed between the pump and a branch point wherein the vent line branches from the supply pipe, wherein the reservoir has a cross-sectional area larger than a cross-sectional area of a portion of the supply pipe located between the pump and the branch point.
1. An apparatus for treating a substrate, the apparatus comprising:
a process chamber having a treatment space for treating the substrate;
a fluid supply unit configured to supply a fluid to the treatment space,
wherein the fluid supply unit includes:
a supply pipe connected to the treatment space, the supply pipe configured to supply the fluid to the treatment space;
a pump in the supply pipe, the pump configured to provide flow pressure to the fluid;
a vent line between the pump and the process chamber, the vent line configured to discharge pressure in the fluid to an outside of the apparatus;
a relief valve configured to open and close the vent line; and
a reservoir between the pump and a first branch point where the vent line branches from the supply pipe,
wherein the reservoir has a first cross-sectional area larger than a second cross-sectional area of a portion of the supply pipe located between the pump and the branch point.
2. The apparatus of claim 1 , wherein the reservoir has a pipe shape.
3. The apparatus of claim 1 , wherein the reservoir includes two ends, both ends of the reservoir having the second cross-sectional area.
4. The apparatus of claim 3 , wherein the first cross-sectional area of the reservoir increases from each end of the reservoir toward a middle point of the reservoir.
5. The apparatus of claim 3 , wherein the reservoir has an oblong shape.
6. The apparatus of claim 1 , wherein the fluid is supercritical state fluid.
7. The apparatus of claim 6 , wherein the fluid is Carbon Dioxide.
8. The apparatus of claim 1 , wherein the reservoir is configured to hold inertia fluid having inertia for suppressing pressure hunting of the fluid.
9. The apparatus of claim 8 , wherein the reservoir is configured to hold the inertia fluid such that the inertia fluid held in the reservoir remains in the reservoir during a flow of the fluid through the reservoir and after the fluid ceases to flow through the reservoir.
10. The apparatus of claim 1 , wherein the supply pipe includes an upper branched pipe configured to supply the fluid to a top portion of the process chamber and a lower branched pipe configured to supply the fluid to a bottom portion of the process chamber.
11. The apparatus of claim 10 , wherein the upper branched pipe and the lower branched pipe branch from the supply pipe at a second branch point between the first branch point and the process chamber.
12. The apparatus of claim 1 , wherein the pump is located upstream of the reservoir.
13. The apparatus of claim 1 , wherein the supply pipe is located between a fluid supply source and the process chamber.
14. A fluid supply unit comprising:
a supply pipe configured to convey a fluid;
a pump in the supply pipe configured to provide flow pressure to the fluid;
a vent line at a rear end of the pump configured to discharge pressure in the fluid to an outside of the fluid supply unit; and
a relief valve in the vent line, the relief valve configured to open and close the vent line,
wherein the supply pipe includes a flow-path enlarging pipe between the pump and a branch point where the vent line branches from the supply pipe, the flow-path enlarging pipe having a first cross-sectional area larger than a second cross-sectional area of the supply pipe configured to alleviate pressure variation in the supply pipe.
15. The fluid supply unit of claim 14 , wherein the fluid is supercritical state fluid.
16. The fluid supply unit of claim 15 , wherein the fluid is Carbon Dioxide.
17. The fluid supply unit of claim 14 , wherein the flow-path enlarging pipe is configured to hold an inertia fluid having inertia to suppress a pressure hunting phenomenon of the fluid.
18. The fluid supply unit of claim 14 , wherein the flow-path enlarging pipe includes two ends, both ends of the flow-path enlarging pipe having the second cross-sectional area.
19. The fluid supply unit of claim 18 , wherein the first cross-sectional area of the flow-path enlarging pipe increases from each end of the flow-path enlarging pipe toward a middle point of the flow-path enlarging pipe.
20. The fluid supply unit of claim 18 , wherein the flow-path enlarging pipe has an oblong shape.