COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, AND METHOD OF PRODUCING SEMICONDUCTOR SUBSTRATE
A composition for resist underlayer film formation, includes: a polysiloxane compound including a first structural unit represented by formula (1); and a solvent. X represents an organic group comprising at least one structure selected from the group consisting of a hydroxy group, a carbonyl group, and an ether bond; a is an integer of 1 to 3, wherein in a case in which a is no less than 2, a plurality of Xs are identical or different from each other; R 1 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms, wherein is a group other than X; and b is an integer of 0 to 2, wherein in a case in which b is 2, two R 1 s are identical or different from each other, and wherein a sum of a and b is no greater than 3.
1 . A composition for resist underlayer film formation, comprising:
a polysiloxane compound comprising a first structural unit represented by formula (1); and
a solvent,
wherein, in the formula (1), X represents an organic group comprising at least one structure selected from the group consisting of a hydroxy group, a carbonyl group, and an ether bond; a is an integer of 1 to 3, wherein in a case in which a is no R 1 ss than 2, a plurality of Xs are identical or different from each other; R 1 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms, wherein R 1 is a group other than X; and b is an integer of 0 to 2, wherein in a case in which b is 2, two R 1 s are identical or different from each other, and wherein a sum of a and b is no greater than 3.
2 . The composition according to claim 1 , wherein the polysiloxane compound further comprises a second structural unit represented by formula (2):
wherein, in the formula (2), R 5 represents a halogen atom, a hydroxy group, or a substituted or unsubstituted monovalent alkoxy group having 1 to 20 carbon atoms; and c is an integer of 0 to 3, wherein in a case in which c is no R 1 ss than 2, a plurality of R 5 s are identical or different.
3 . The composition according to claim 1 , wherein a proportion of the first structural unit with respect to total structural units constituting the polysiloxane compound is no R 1 ss than 1 mol % and no greater than 40 mol %.
4 . The composition according to claim 1 , wherein the composition is suitable for forming an underlayer film of a metal-containing resist film in lithography with an electron beam or an extreme ultraviolet ray.
5 . A method of producing a semiconductor substrate, the method comprising:
applying a composition for resist underlayer film formation directly or indirectly on a substrate to form a resist underlayer film;
applying a composition for metal-containing resist film formation on the resist underlayer film to forcrr a metal-containing resist film;
exposing the metal-containing resist film to an electron beam or an extreme ultraviolet ray; and
developing the metal-containing resist film exposed,
wherein the composition for resist underlayer film formation comprises:
a polysiloxane compound comprising a first structural unit represented by formula (1); and
a solvent,
wherein, in the formula (1), X represents an organic group comprising at least one structure selected from the group consisting of a hydroxy group, a carbonyl group, and an ether bond; a is an integer of 1 to 3, wherein in a case in which a is no R 1 ss than 2, a plurality of Xs are identical or different from each other; R 1 represents a halogen atom, a hydroxy group, or a monovalent organic group having 1 to 20 carbon atoms, wherein R 1 is a group other than X; and b is an integer of 0 to 2, wherein in a case in which b is 2, tA R 1 s are identical or different from each other, and wherein a sum of a and b is no greater
6 . The method according to claim 5 , further comprising, before the applying of the composition for resist underlayer film formation ;
forming an organic underlayer film directly or indirectlyon the substrate.
7 . The method according to claim 5 , wherein the polysiloxane compound further comprises a second structural unit represented by formula (2):
wherein, in the formula (2), R 5 represents a halogen atom, a hydroxy group, or a substituted or unsubstituted monovalent alkoxy group having 1 to 20 carbon atoms; and c is an integer of 0 to 3, wherein in a case in which c is no R 1 ss than 2, a plurality of R 5 s are identical or different.
8 . The method according to claim 5 , wherein a proportion of the first structural unit with respect to total structural units constituting the polysiloxane compound is no R 1 ss than 1 mol % and no greater than 40 mol %.
9 . The method according to claim 6 , wherein the polysiloxane compound further comprises a second structural unit represented by formula (2):
wherein, in the formula (2), R 5 represents a halogen atom, a hydroxy group, or a substituted or unsubstituted monovalent alkoxy group having 1 to 20 carbon atoms; and c is an integer of 0 to 3, wherein in a case in which c is no R 1 ss than 2, a plurality of R 5 s are identical or different.
10 . The method according to claim 6 , wherein a proportion of the first structural unit with respect to total structural units constituting the polysiloxane compound is no R 1 ss than 1 mol % and no greater than 40 mol %.