IP Library › Patent Application 18031801
Patent Application Utility PCT National Stage
App. No. 18/031,801 · Confirmation No. 9165

ETCHING GAS, METHOD FOR PRODUCING SAME, ETCHING METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

Inventor: Atsushi SUZUKI
Applicant: Resonac Corporation
Response to Non-Final Office Action Entered and Forwarded to Examiner View Publication ↗
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2026-06-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2026-06-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2026-06-26 CLM Claims 5 View
2026-06-26 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2026-06-26 XT/ Extension of Time 1 View
2026-06-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-06-26 N417.PYMT Electronic Fee Payment 2 View
2026-06-26 WFEE Fee Worksheet (SB06) 1 View
2025-12-30 CTNF Non-Final Rejection 12 View
2025-12-30 892 List of references cited by examiner 1 View
2025-12-30 SRFW Search information including classification, databases and other search related notes 1 View
2025-12-30 SRNT Examiner's search strategy and results 46 View
2025-12-30 SRNT Examiner's search strategy and results 4 View
2025-12-30 FOR Foreign Reference 39 View
2025-12-09 RCEX Request for Continued Examination (RCE) — View
2025-12-09 RCEX Request for Continued Examination (RCE) 1 View
2025-12-09 XT/ Extension of Time 1 View
2025-12-09 N417.PYMT Electronic Fee Payment 2 View
2025-12-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-11-13 CTAV Advisory Action (PTOL-303) 2 View
2025-11-13 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2025-11-07 A.NE Response After Final Action — View
2025-11-07 N417.PYMT Electronic Fee Payment 2 View
2025-11-07 A.NE Response After Final Action 1 View
2025-11-07 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2025-11-07 CLM Claims 5 View
2025-11-07 XT/ Extension of Time 1 View
2025-11-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-11-07 WFEE Fee Worksheet (SB06) 1 View
2025-07-09 CTFR Final Rejection 12 View
2025-07-09 SRFW Search information including classification, databases and other search related notes 1 View
2025-07-09 SRNT Examiner's search strategy and results 27 View
2025-04-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection — View
2025-04-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2025-04-25 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2025-04-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-03-11 CTNF Non-Final Rejection 9 View
2025-03-11 892 List of references cited by examiner 1 View
2025-03-11 SRFW Search information including classification, databases and other search related notes 1 View
2025-03-11 1449 List of References cited by applicant and considered by examiner 2 View
2025-03-11 1449 List of References cited by applicant and considered by examiner 2 View
2025-03-11 SRNT Examiner's search strategy and results 28 View
2025-03-11 SRNT Examiner's search strategy and results 24 View
2025-01-06 TRAN.LET Transmittal Letter — View
2025-01-06 TRAN.LET Transmittal Letter 2 View
2025-01-06 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2025-01-06 FOR Foreign Reference 18 View
2025-01-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2025-01-06 FOR Foreign Reference 19 View
2024-04-27 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2024-04-27 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2023-11-30 NTC.PUB Notice of Publication 1 View
2023-08-24 APP.FILE.REC Filing Receipt 3 View
2023-08-24 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2023-08-24 WCLM Claims Worksheet (PTO-2022) 1 View
2023-08-24 WFEE Fee Worksheet (SB06) 1 View
2023-04-13 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2023-04-13 371P Documents submitted with 371 (National Stage) Applications 1 View
2023-04-13 371P Documents submitted with 371 (National Stage) Applications 4 View
2023-04-13 371P Documents submitted with 371 (National Stage) Applications 5 View
2023-04-13 WFEE Fee Worksheet (SB06) 2 View
2023-04-13 N417 Electronic Filing System Acknowledgment Receipt 5 View
2023-04-13 PA.. Power of Attorney 2 View
2023-04-13 TRAN.LET Transmittal Letter 2 View
2023-04-13 FOR Foreign Reference 23 View
2023-04-13 FOR Foreign Reference 15 View
2023-04-13 FOR Foreign Reference 28 View
2023-04-13 FOR Foreign Reference 41 View
2023-04-13 FOR Foreign Reference 36 View
2023-04-13 FOR Foreign Reference 21 View
2023-04-13 FOR Foreign Reference 21 View
2023-04-13 TRNA Transmittal of New Application 3 View
2023-04-13 ADS Application Data Sheet 5 View
2023-04-13 SPEC Specification 49 View
2023-04-13 CLM Claims 3 View
2023-04-13 ABST Abstract 1 View
2023-04-13 DRW Drawings-only black and white line drawings 1 View
2023-04-13 DRW Drawings-only black and white line drawings 1 View
2023-04-13 OATH Oath or Declaration filed 3 View
2023-04-13 A.PE Preliminary Amendment 1 View
2023-04-13 CLM Claims 4 View
2023-04-13 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2023-04-13 SPEC Specification 4 View
2023-04-13 ABST Abstract 1 View
2023-04-13 P.N.101.CONV PCT/RO/101 - Request form for new International Application - Conventional 4 View
2023-04-13 FRPR Certified Copy of Foreign Priority Application 28 View
2023-04-13 P.PAMPHLET WIPO Publication - Non-English version 36 View
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Quick Facts
App. No.
18/031,801
Filed
2023-04-13
Pub. No.
US20230386853A1
Art Unit
1713