Semiconductor device and semiconductor memory device
In general, according to one embodiment, a semiconductor device includes first to third conductors, a semiconductor, a first insulator, and an insulation region. The semiconductor includes a metal oxide and extends in the first direction to be in contact with the first conductor and the third conductor. The insulation region is surrounded by the semiconductor and extends in the first direction to be in contact with the first conductor. The semiconductor includes a first portion and a second portion defined between the first portion and the insulation region. A concentration of a first element contained in the metal oxide of the semiconductor is higher in the second portion than in the first portion.
1 . A semiconductor memory device comprising:
a cell capacitor and a transistor,
wherein the cell capacitor includes a first electrode coupled to a plate line and a second electrode coupled to the transistor, the transistor includes a first conductor, a second conductor, and a third conductor, which are aligned in a first direction and separated from each other;
a semiconductor including a metal oxide and extending in the first direction to be in contact with the first conductor and the third conductor;
a first insulator arranged between the semiconductor and the second conductor; and
an insulation region surrounded by the semiconductor and extending in the first direction to be in contact with the first conductor,
wherein the semiconductor includes a first portion and a second portion defined between the first portion and the insulation region, and
a concentration of a first element contained in the metal oxide of the semiconductor is higher in the second portion than in the first portion.
2 . The semiconductor memory device according to claim 1 , wherein
the second conductor is arranged between the first conductor and the third conductor.
3 . The semiconductor memory device according to claim 1 , wherein
the second conductor surrounds the semiconductor.
4 . The semiconductor memory device according to claim 1 , wherein
the insulation region is in contact with the semiconductor.
5 . The semiconductor memory device according to claim 1 , wherein
the first element is a metallic element and has an oxygen-bonding energy that is largest among metallic elements included in the metal oxide.
6 . The semiconductor memory device according to claim 1 , wherein
the first element is gallium or aluminum.
7 . The semiconductor memory device according to claim 1 , wherein
the first element has an oxygen-bonding energy that is largest among elements included in the semiconductor.
8 . The semiconductor memory device according to claim 1 , wherein
the first element is carbon, hafnium, or silicon.
9 . The semiconductor memory device according to claim 1 , wherein
the insulation region includes a silicon oxide.
10 . The semiconductor memory device according to claim 1 , wherein
the insulation region is a void.
11 . The semiconductor memory device according to claim 1 , wherein
part of the semiconductor is arranged between the insulation region and the third conductor.
12 . The semiconductor memory device according to claim 1 , wherein
the insulation region is in contact with the third conductor.
13 . The semiconductor memory device according to claim 1 , wherein the second electrode of the cell capacitor is electrically coupled to the first conductor or the third conductor.
14 . The semiconductor memory device according to claim 1 , wherein
the first insulator is a gate insulating film of the transistor.