Three dimensional ReRAM device
A resistive random access memory (ReRAM) device and a method for forming the device are provided. The ReRAM device includes a first electrode, a resistive switching element layer in contact with the first electrode, and a plurality of second electrodes in contact with the resistive switching element layer. Protruding portions of the first electrode and the resistive switching element layer overlap with the plurality of second electrodes in a vertical direction of the ReRAM device to form a plurality of vertically stacked ReRAM cells.
1 . A resistive random access memory (ReRAM) device comprising:
a first electrode;
a resistive switching element layer in contact with the first electrode; and
a plurality of second electrodes in contact with the resistive switching element layer,
wherein protruding portions of the first electrode and the resistive switching element layer overlap with the plurality of second electrodes in a vertical direction on a first side of the ReRAM device to form a plurality of vertically stacked ReRAM cells,
wherein the plurality of ReRAM cells have a stepped configuration on a second side of the ReRAM device, and
wherein a first contact is formed in contact with the first electrode and second contacts are formed in contact with each of the second electrodes for each of the respective ReRAM cells.
2 . The ReRAM device of claim 1 , wherein for each ReRAM cell, a portion of the second electrode that is not overlapped with the first electrode in the vertical direction is sandwiched between dielectric layers.
3 . The ReRAM device of claim 2 , wherein the dielectric layers have a higher etching selectivity relative to the second electrodes.
4 . The ReRAM device of claim 2 , wherein the dielectric layers are recessed in a lateral direction relative to the second electrodes.
5 . The ReRAM device of claim 1 , wherein the resistive switching layer includes a high-material.
6 . The ReRAM device of claim 1 , the first contact is a shared bit line that is in contact with the first electrode.
7 . The ReRAM device of claim 1 , wherein the second contacts are a plurality of word lines, each word line connected to one of the plurality of second electrodes.
8 . The ReRAM device of claim 1 , further comprising an interlayer dielectric layer separating a first group of the ReRAM cells from a second group of the ReRAM cells and dividing the first electrode into a first ReRAM cell group electrode and a second ReRAM cell group electrode.
9 . The ReRAM device of claim 8 , further comprising a plurality of first contacts that include a first bit line connected to the first ReRAM cell group electrode and a second bit line connected to the second ReRAM cell group electrode.