Integrated bare die package, and related fabrication methods
Integrated bare die packages, and related fabrication methods are disclosed. To provide for the integration of a bare die filter into the bare die package while maintaining an acoustic cavity for the bare die filter and conserving package size, the bare die filter is vertically-integrated with a second component (e.g., another die, a second bare die filter, a passive electrical device(s)). In examples, the bare die filter is vertically-integrated with the second component in a second direction (e.g., vertical direction) orthogonal to the first direction on a first side of a package substrate of the bare die package. The bare die filter and the second component each intersect a common plane in the second direction. In this manner, the expansion in size of the bare die package through the integrated of bare die filter is minimized, while also maintaining the acoustic cavity of the bare die filter.
1 . A bare die package, comprising:
a package substrate comprising one or more metallization layers parallel to each other in a first direction;
a first bare die filter coupled to a first surface of the package substrate and adjacent to the first surface of the package; and
a second component coupled to the first surface of the package substrate;
wherein the first bare die filter and the second component each intersect a common first plane in a second direction orthogonal to the first direction;
wherein the first bare die filter is between the first surface of the package substrate and the second component in the second direction.
2 . The bare die package of claim 1 , wherein the first bare die filter comprises:
a first filter die comprising a second surface adjacent to the first surface of the package substrate, a third surface opposite the second surface; and
a plurality of first metal interconnects coupled to the first surface of the package substrate such that a first air cavity is formed between the second surface of the first filter die and the first surface of the package substrate.
3 . The bare die package of claim 1 , further comprising a plurality of extension metal interconnects coupled to the package substrate and extending in the second direction; and
the second component is coupled to the plurality of extension metal interconnects.
4 . The bare die package of claim 3 , wherein at least one first extension metal interconnect of the plurality of extension metal interconnects is adjacent to the first bare die filter in the first direction.
5 . The bare die package of claim 3 , wherein:
a second surface of the first bare die filter adjacent to the first surface of the package substrate is disposed a first height from the first surface of the package substrate; and
the plurality of extension metal interconnects extend in the second direction to a second height that is equal to or greater than the first height.
6 . The bare die package of claim 1 , further comprising a first redistribution layer (RDL) coupled to a first extension metal interconnect of the plurality of extension metal interconnects and the second component.
7 . The bare die package of claim 1 , wherein the second component comprises a second bare die filter.
8 . The bare die package of claim 7 , wherein the second bare die filter comprises a second filter die comprising:
a sixth surface adjacent to the first surface of the package substrate;
a seventh surface opposite the sixth surface; and
a plurality of second metal interconnects coupled to the sixth surface and the first surface of the package substrate such that a second cavity is formed between the sixth surface of the second filter die and the first surface of the package substrate.
9 . The bare die package of claim 1 , wherein the second component comprises a second die.
10 . The bare die package of claim 1 , wherein the second component comprises at least one second passive electrical device.
11 . The bare die package of claim 1 integrated into a device selected from the group consisting of: a set top box; an entertainment unit; a navigation device; a communications device; a fixed location data unit; a mobile location data unit; a global positioning system (GPS) device; a mobile phone; a cellular phone; a smart phone; a session initiation protocol (SIP) phone; a tablet; a phablet; a server; a computer; a portable computer; a mobile computing device; a wearable computing device; a desktop computer; a personal digital assistant (PDA); a monitor; a computer monitor; a television; a tuner; a radio; a satellite radio; a music player; a digital music player; a portable music player; a digital video player; a video player; a digital video disc (DVD) player; a portable digital video player; an automobile; a vehicle component; avionics systems; a drone; and a multicopter.
12 . A method of fabricating a bare die package, comprising:
providing a package substrate comprising one or more metallization layers parallel to each other in a first direction;
electrically coupling a second component to a first surface of the package substrate; and
electrically coupling a first bare die filter to a first surface of the package substrate and adjacent to the first surface of the package;
wherein the first bare die filter and the second component each intersect a common first plane in a second direction orthogonal to the first direction;
wherein the first bare die filter is between the first surface of the package substrate and the second component in the second direction.
13 . The method of claim 12 , further comprising:
placing a second surface of the first bare die filter adjacent to the first surface of the package substrate; and
placing the second component adjacent to a third surface of the first bare die filter opposite of the second surface.
14 . The method of claim 13 , further comprising forming a plurality of extension metal interconnects coupled to the package substrate and extending in the second direction;
wherein electrically coupling the second component to the first surface of the package substrate comprises coupling the second component to the plurality of extension metal interconnects.
15 . The method of claim 14 , further comprising a first redistribution layer (RDL) coupled to a first extension metal interconnect of the plurality of extension metal interconnects and the second component.
16 . The method of claim 15 , further comprising:
disposing a first overmold layer on the first bare die filter and the plurality of extension metal interconnects; and
grinding down the first overmold layer to the third surface of the first bare die filter;
wherein forming the RDL further comprises forming the RDL adjacent to the third surface of the first bare die filter.
17 . The method of claim 16 , further comprising forming a second overmold layer adjacent a fifth surface of the second component.
18 . The method of claim 13 , wherein electrically coupling the first bare die filter to the first surface of the package substrate comprises coupling a plurality of first metal interconnects of the first bare die filter to the first surface of the package substrate such that a first air cavity is formed between a first filter die of the first bare die filter and the first surface of the package substrate.