IP Library Granted Patent US 11,677,021
Granted Patent B2
US 11,677,021 · App. 18/092,727 · Granted Jun 13, 2023

3D semiconductor device and structure with memory

Inventor: Zvi Or-Bach (Haifa, IL)
Assignee: Monolithic 3D Inc.
H01L29/78G11C11/404G11C11/4097G11C16/02H01L29/7841H10B10/12H10B12/20H10B43/20H10B63/30H10B69/00G11C11/412G11C16/0483G11C2213/71
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Quick Facts
Patent No.
US 11,677,021
App. No.
18/092,727
Granted
Jun 13, 2023
Kind
B2
Abstract

A semiconductor device, the device comprising: a first silicon layer comprising first single crystal silicon; an isolation layer disposed over said first silicon layer; a first metal layer disposed over said isolation layer; a second metal layer disposed over said first metal layer; a first level comprising a plurality of transistors, said first level disposed over said second metal layer, wherein said isolation layer comprises an oxide to oxide bond surface, wherein said plurality of transistors comprise a second single crystal silicon region; and a plurality of capacitors, wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

Claims (78)

1. A semiconductor device, the device comprising:

a first silicon layer comprising first single crystal silicon;

an isolation layer disposed over said first silicon layer;

a first metal layer disposed over said isolation layer;

a second metal layer disposed over said first metal layer;

a first level comprising a plurality of transistors, said first level disposed over said second metal layer,

wherein said isolation layer comprises an oxide to oxide bond surface,

wherein said plurality of transistors comprise a second single crystal silicon region; and

a plurality of capacitors,

wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

2. The device according to claim 1 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprises tungsten.

3. The device according to claim 1 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprises a diameter of less than 450 nm.

4. The device according to claim 1 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprises a contact to at least one of said plurality of transistors.

5. The device according to claim 1 ,

wherein atypical thickness of said first level is less than two microns.

6. The device according to claim 1 ,

wherein at least one of said plurality of transistors comprises at least two sided gate.

7. The device according to claim 1 , further comprising:

a third metal layer disposed over said first level; and

a fourth metal layer disposed over said third metal layer,

wherein said fourth metal layer is aligned to said first metal layer with a less than 40 nm alignment error.

8. A semiconductor device, the device comprising:

a first level comprising a plurality of transistors,

wherein said plurality of transistors comprise first single crystal silicon;

a first metal layer disposed over said first level;

a second metal layer disposed over said first metal layer;

an isolation layer disposed over said second metal layer;

a first silicon layer comprising second single crystal silicon,

wherein said first silicon layer is disposed over said isolation layer, and

wherein said isolation layer comprises an oxide to oxide bonding surface; and

a plurality of capacitors,

wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

9. The device according to claim 8 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprise tungsten.

10. The device according to claim 8 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprise a diameter of less than 450 nm.

11. The device according to claim 8 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprise contact to at least one of said plurality of transistors.

12. The device according to claim 8 ,

wherein atypical thickness of said first level is less than two microns.

13. The device according to claim 8 ,

wherein at least one of said plurality of transistors comprises at least a two sided gate.

14. The device according to claim 8 , further comprising:

a third metal layer disposed under said first level;

a fourth metal layer disposed under said third metal layer,

wherein said fourth metal layer is aligned to said first metal layer with a less than 40 nm alignment error.

15. A semiconductor device, the device comprising:

a first level comprising a plurality of transistors,

wherein said plurality of transistors comprise first single crystal silicon;

a first metal layer disposed over said first level;

a second metal layer disposed over said first metal layer;

an isolation layer disposed over said second metal layer;

a first silicon layer comprising second single crystal silicon disposed over said isolation layer,

wherein said isolation layer comprises an oxide to oxide bonding surface; and

a plurality of vias disposed through said first level,

wherein at least one of said vias comprise contact to at least one of said transistor.

16. The device according to claim 15 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprises tungsten.

17. The device according to claim 15 , further comprising:

a plurality of vias disposed through said first level,

wherein at least one of said plurality of vias comprises a diameter of less than 450 nm.

18. The device according to claim 15 , further comprising:

a plurality of capacitors,

wherein said plurality of capacitors comprise functioning as a decoupling capacitor to mitigate power supply noise.

19. The device according to claim 15 ,

wherein atypical thickness of said first level is less than two microns.

20. The device according to claim 15 ,

wherein at least one of said plurality of transistors comprises at least a two sided gate.

Continuity (6)
Continuation In Part 17961565 · Oct 7, 2022
Continuation 17384992 · Jul 26, 2021
Continuation 17222784 · Apr 5, 2021
Continuation 17176146 · Feb 15, 2021
Continuation 16226628 · Dec 19, 2018
Related Publication 20230155018A1 · May 18, 2023
Cited By (1)
US 12,369,347