IP Library Granted Patent US 12,029,039
Granted Patent B2
US 12,029,039 · App. 18/096,341 · Granted Jul 2, 2024

Integrated structures comprising vertical channel material and having conductively-doped semiconductor material directly against lower sidewalls of the channel material

Inventors: Guangyu Huang (Boise, ID); Haitao Liu (Boise, ID); Chandra Mouli (Boise, ID); Justin B. Dorhout (Boise, ID); Sanh D. Tang (Kuna, ID); Akira Goda (Boise, ID)
H10B43/27H01L23/5226H01L28/00H10B43/35
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Quick Facts
Patent No.
US 12,029,039
App. No.
18/096,341
Granted
Jul 2, 2024
Kind
B2
Abstract

Some embodiments include an integrated structure having vertically-stacked conductive levels. Upper conductive levels are memory cell levels, and a lower conductive level is a select device level. Conductively-doped semiconductor material is under the select device level. Channel material extends along the memory cell levels and the select device level, and extends into the conductively-doped semiconductor material. A region of the channel material that extends into the conductively-doped semiconductor material is a lower region of the channel material and has a vertical sidewall. Tunneling material, charge-storage material and charge-blocking material extend along the channel material and are between the channel material and the conductive levels. The tunneling material, charge-storage material and charge-blocking material are not along at least a portion of the vertical sidewall of the lower region of the channel material, and the conductively-doped semiconductor material is directly against such portion. Some embodiments include methods of forming integrated structures.

Claims (28)

1. An integrated structure comprising:

a vertically extending opening extending through a stack comprising a plurality of alternating conductive levels and dielectric levels, as well as extending into a first material;

a metal-containing material under the first material;

a channel material extending along an entire vertical length of the opening and into the metal-containing material; and

a tunneling material, a charge-storage material, and a charge-blocking material within the opening and extending along an upper vertical portion of sidewalls of the channel material and along a lower vertical portion of the sidewalls of the channel material, and being absent from along an intermediate vertical portion of the sidewalls of the channel material, wherein:

a second material is in direct physical contact with the sidewalls of the channel material along the intermediate vertical portion of the sidewalls of the channel material; and

a dopant of the second material is out-diffused from the second material to the intermediate vertical portion of the sidewalls of the channel material forming a heavily-doped region of the channel material, wherein an interface between the heavily-doped region of the channel material and a lightly-doped region of the channel material overlaps a vertical face of a select device level above the second material.

2. The integrated structure of claim 1 , wherein the first and second materials are a same composition as one another.

3. The integrated structure of claim 1 , wherein the first and second materials are different compositions relative to one another.

4. The integrated structure of claim 1 , wherein the metal-containing material is in direct contact with the first material.

5. An integrated structure, comprising:

vertically-stacked conductive levels, wherein upper conductive levels of the vertically-stacked conductive levels are memory cell levels and a lower conductive level of the vertically-stacked conductive levels is a select device level;

a conductively-doped semiconductor material under the select device level, wherein the conductively-doped semiconductor material is spaced from the select device level by an insulative region;

a channel material extending vertically along the memory cell levels and the select device level, and extending into the conductively-doped semiconductor material, wherein a bottommost-surface of the channel material is in direct contact with the conductively-doped semiconductor material;

a charge-storage material extending vertically along the channel material between the channel material and the vertically-stacked conductive levels wherein the charge-storage material is absent along at least a portion of a vertical sidewall of the channel material; and

the conductively-doped semiconductor material is directly against the portion of the vertical sidewall of the channel material, wherein a dopant of the conductively-doped semiconductor material is out-diffused from the conductively-doped semiconductor material to the portion of the vertical sidewall of the channel material forming a heavily-doped region of the channel material, wherein an interface between the heavily-doped region of the channel material and a lightly-doped region of the channel material overlaps a vertical face of the select device level.

6. An integrated structure, comprising:

vertically-stacked conductive levels, wherein upper conductive levels of the vertically-stacked conductive levels are memory cell levels and a lower conductive level of the vertically-stacked conductive levels is a select device level;

a source line under the select device level and spaced from the select device level by an insulative region;

a channel material extending vertically along the memory cell levels and the select device level and extending downwardly into the source line, wherein a region of the channel material that extends into the source line is a lower region of the channel material; and

a charge-storage material extending vertically along sidewalls of the channel material between the sidewalls of the channel material and the vertically-stacked conductive levels; wherein:

the charge-storage material is absent from a portion of the sidewalls of the channel material;

the source line is in direct physical contact with the portion of the sidewalls of the channel material; and

a dopant of the source line is out-diffused from the source line to the portion of the sidewalls of the channel material forming a heavily-doped region of the channel material, wherein an interface between the heavily-doped region of the channel material and a lightly-doped region of the channel material overlaps a vertical face of the select device level.

7. The integrated structure of claim 6 , wherein the lower region of the channel material is above a lowest region of the channel material and the charge-storage material is along the lowest region of the channel region.

8. The integrated structure of claim 6 , wherein a bottom portion of the source line is a metal-containing material.

9. The integrated structure of claim 6 , wherein the source line comprises silicon.

10. The integrated structure of claim 6 , wherein the source line comprises germanium.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 14, 2023
From: MICRON TECHNOLOGY, INC.
To: LODESTAR LICENSING GROUP LLC
Reel/Frame 065868/0666 →
Continuity (6)
Continuation 17308766 · May 5, 2021
Division 16541029 · Aug 14, 2019
Division 15945215 · Apr 4, 2018
Continuation 15651916 · Jul 17, 2017
Division 15130803 · Apr 15, 2016
Related Publication 20230171962A1 · Jun 1, 2023
Cited By (1)
US 12,707,637