IP Library Granted Patent US 10,418,379
Granted Patent B2
US 10,418,379 · App. 15/945,215 · Granted Sep 17, 2019

Integrated structures comprising channel material extending into source material

Inventors: Guangyu Huang (Boise, ID); Haitao Liu (Boise, ID); Chandra Mouli (Boise, ID); Justin B. Dorhout (Boise, ID); Sanh D. Tang (Kuna, ID); Akira Goda (Boise, ID)
Assignee: Micron Technology, Inc.
H01L27/11582H01L23/5226H01L27/1157H01L28/00
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Quick Facts
Patent No.
US 10,418,379
App. No.
15/945,215
Granted
Sep 17, 2019
Kind
B2
Abstract

Some embodiments include an integrated structure having vertically-stacked conductive levels. Upper conductive levels are memory cell levels, and a lower conductive level is a select device level. Conductively-doped semiconductor material is under the select device level. Channel material extends along the memory cell levels and the select device level, and extends into the conductively-doped semiconductor material. A region of the channel material that extends into the conductively-doped semiconductor material is a lower region of the channel material and has a vertical sidewall. Tunneling material, charge-storage material and charge-blocking material extend along the channel material and are between the channel material and the conductive levels. The tunneling material, charge-storage material and charge-blocking material are not along at least a portion of the vertical sidewall of the lower region of the channel material, and the conductively-doped semiconductor material is directly against such portion. Some embodiments include methods of forming integrated structures.

Claims (43)

1. An integrated structure, comprising:

vertically-stacked conductive levels; upper conductive levels of the vertically-stacked conductive levels being memory cell levels, and a lower conductive level of the vertically-stacked conductive levels being a select device level;

a conductively-doped semiconductor material under the select device level, and spaced from the select device level by an insulative region;

a channel material extending vertically along the memory cell levels and the select device level, and extending downwardly into the conductively-doped semiconductor material; a region of the channel material that extends into the conductively-doped semiconductor material being a lower region of the channel material and having a vertical sidewall;

a charge-storage material extending vertically along the channel material and being between the channel material and the vertically-stacked conductive levels;

the charge-storage material not being along at least a portion of the vertical sidewall of said lower region of the channel material; the conductively-doped semiconductor material being directly against said portion of the vertical sidewall of the lower region of the channel material; and

wherein the conductively-doped semiconductor material is a second conductively-doped semiconductor material, and is over and directly against a first conductively-doped semiconductor material; wherein the channel material extends downwardly into the first and second conductively-doped semiconductor materials, and directly contacts both of the first and second conductively-doped semiconductor materials; and wherein the first and second conductively-doped semiconductor materials are compositionally different from one another.

2. The integrated structure of claim 1 including a region of the first conductively-doped semiconductor material between the second conductively-doped semiconductor material and the select device level.

3. An integrated structure, comprising:

vertically-stacked conductive levels; upper conductive levels of the vertically-stacked conductive levels being memory cell levels, and a lower conductive level of the vertically-stacked conductive levels being a select device level;

a conductively-doped semiconductor material under the select device level, and spaced from the select device level by an insulative region;

a channel material extending vertically along the memory cell levels and the select device level, and extending downwardly into the conductively-doped semiconductor material, an elevationally bottommost surface of the channel material being in direct contact with the conductively-doped semiconductor material; a region of the channel material that extends into the conductively-doped semiconductor material being a lower region of the channel material and having a vertical sidewall;

a charge-storage material extending vertically along the channel material and being between the channel material and the vertically-stacked conductive levels;

the charge-storage material not being along at least a portion of the vertical sidewall of said lower region of the channel material; the conductively-doped semiconductor material being directly against said portion of the vertical sidewall of the lower region of the channel material; and

wherein said portion of the vertical sidewall of the lower region of the channel material is above a lowest region of the channel material; and wherein the charge-storage material is along the lowest region.

4. An integrated structure, comprising:

vertically-stacked conductive levels; upper conductive levels of the vertically-stacked conductive levels being memory cell levels, and a lower conductive level of the vertically-stacked conductive levels being a select device level; the vertically-stacked conductive levels being configured as two laterally spaced sets along a cross-section; the sets being a first set and a second set; a conductive pillar being between the first and second sets;

a conductively-doped semiconductor material under the select device levels of the first and second sets; the conductive pillar extending to the conductively-doped semiconductor material and being in electrical contact with the conductively-doped semiconductor material;

a first channel material extending vertically along the memory cell levels and the select device level of the first set, and extending downwardly into the conductively-doped semiconductor material; a region of the first channel material that extends into the conductively-doped semiconductor material being a first lower region of the first channel material and having a first vertical sidewall;

a second channel material extending vertically along the memory cell levels and the select device level of the second set, and extending downwardly into the conductively-doped semiconductor material; a region of the second channel material that extends into the conductively-doped semiconductor material being a second lower region of the second channel material and having a second vertical sidewall;

the conductively-doped semiconductor material being directly against the first and second vertical sidewalls; and

wherein the first and second vertical sidewalls directly against the conductively-doped semiconductor material are above lowest regions of the first and second channel materials; wherein a charge-storage material and a tunneling material are along the lowest regions of the first and second channel materials; wherein the charge-storage material comprises silicon nitride, and wherein the tunneling material comprises one or more oxides.

5. An integrated structure, comprising:

vertically-stacked conductive levels; upper conductive levels of the vertically-stacked conductive levels being memory cell levels, and a lower conductive level of the vertically-stacked conductive levels being a select device level;

a source-structure-material under the select device level, and spaced from the select device level by an insulative region;

a channel material extending vertically along the memory cell levels and the select device level, and extending downwardly into the source-structure-material; a region of the channel material that extends into the source-structure-material being a lower region of the channel material and having a vertical sidewall, the channel material having an elevationally bottommost surface in direct contact with the source-structure material;

a charge-storage material extending vertically along the channel material and being between the channel material and the vertically-stacked conductive levels;

the charge-storage material not being along a portion of the vertical sidewall of said lower region of the channel material;

wherein said portion of the vertical sidewall of the lower region of the channel material is above a lowest region of the channel material; and wherein the charge-storage material is along the lowest region; and

wherein a doped region of the channel material extends along said portion, and only partially vertically overlaps the select device level.

6. The integrated structure of claim 5 further comprising metal-containing material under the source-structure-material and in direct contact with the source-structure-material.

7. The integrated structure of claim 6 wherein the source-structure-material comprises silicon.

8. The integrated structure of claim 6 wherein the source-structure-material comprises germanium.

9. An integrated structure, comprising:

memory cell levels over a select device level;

a source-structure-material under the select device level;

a channel material extending through the memory cell levels and the select device level, and extending downwardly into the source-structure-material; a region of the channel material that extends into the source-structure-material being a lower region of the channel material;

a charge-storage material extending along the channel material and being between the channel material and the memory cell levels; the charge-storage material not being along a segment of said lower region of the channel material;

wherein said segment of the lower region of the channel material is above a lowest portion of the channel material; and wherein the charge-storage material is along vertical sidewalls of the lowest portion, a bottom surface of the lowest portion of the channel material being directly against the source-structure-material; and

wherein a doped region of the channel material extends along said segment, and only partially vertically overlaps the select device level.

10. The integrated structure of claim 9 further comprising metal-containing material under the source-structure-material and in direct contact with the source-structure-material.

11. The integrated structure of claim 10 wherein the lowest portion of the channel material extends into the metal-containing material.

12. The integrated structure of claim 9 wherein the lowest portion of the channel material is within the source-structure-material.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 14, 2023
From: MICRON TECHNOLOGY, INC.
To: LODESTAR LICENSING GROUP LLC
Reel/Frame 065868/0666 →
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0965 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 8 TO PATENT SECURITY AGREEMENT Recorded May 7, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 046084/0955 →
Continuity (3)
Continuation 15651916 · Jul 17, 2017
Division 15130803 · Apr 15, 2016
Related Publication 20180226427A1 · Aug 9, 2018
Cited By (5)
US 12,356,617 US 12,356,619 US 12,396,172 US 12,471,283 US 12,563,787