IP Library Granted Patent US 12,740,328
Granted Patent B2
US 12,740,328 · App. 18/129,848 · Granted Sep 15, 2026

Method of inducing exchange bias by single step irradiation in a single FeRh thin film for use in magnetic tunnel junctions

Inventors: Cory D. Cress (Springfield, VA); Olaf M.J. van 't Erve (Falls Church, VA); Steven P. Bennett (Owings, MD)
Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
H10N50/85H10B61/00H10N50/01H10N50/10
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Quick Facts
Patent No.
US 12,740,328
App. No.
18/129,848
Granted
Sep 15, 2026
Kind
B2
Abstract

A single layer of metamagnetic material with exchange bias comprising a single layer of FeRh, wherein the single layer of FeRh comprises ion irradiation, wherein the single layer of FeRh comprising ion irradiation is an exchange bias surface layer, and wherein the single layer of FeRh comprises an interface between a ferromagnetic (FM) region and an antiferromagnetic (AFM) region. A method to create a FM/AFM junction in a single layer of FeRh, comprising the steps of providing a layer of FeRh film, wherein the layer of FeRh film is an antiferromagnetic (AFM) film, implanting ions into the top portion of the FeRh film, creating via the step of implanting ions a ferromagnetic (FM) region in the top region, maintaining the antiferromagnetic (AFM) region of the bottom portion, and creating a FM/AFM junction in the single layer of FeRh.

Claims (49)

1 . A method to create a FM/AFM interface in a single layer of FeRh, comprising the steps of:

providing a layer of FeRh film;

wherein the layer of FeRh film has a top portion and a bottom portion;

wherein the layer of FeRh film is an antiferromagnetic (AFM) film;

implanting ions into the top portion of the FeRh film;

creating via the step of implanting ions a ferromagnetic (FM) region in the top region;

controlling via ion mass the thickness of the top portion;

maintaining the antiferromagnetic (AFM) region of the bottom portion; and

creating a FM/AFM interface in the single layer of FeRh.

2 . The method to create a FM/AFM interface in a single layer of FeRh of claim 1 , further comprising the steps of:

controlling via ion energy the thickness of the top portion.

3 . A method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction, comprising the steps of:

providing a layer of MgO;

growing an Epitaxial film of FeRh on the layer of MgO;

implanting ions;

creating near-interfacial pinned uncompensated moments;

forming AFM regions near the interface with the FM region; and

coupling antiferromagnetically the pinned uncompensated moments forming AFM domains aligned with the FM layer.

4 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

implanting ions to a depth of about 100 Angstroms to about 350 Angstroms in the FeRh or implanting to about half the thickness of the FeRh.

5 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

providing a lattice match with 45° rotation oriented parallel to the 100 cubic plane;

annealing in-situ the epitaxial films of FeRh on the MgO;

wherein the FeRh is in an AFM state; and

forming a FeRh metamagnetic FCC—type L10 phase.

6 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

utilizing Fe ions as the ions in the step of implanting ions.

7 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

utilizing an ion gun with a FeCl 2 solid precursor as the source of Fe;

implanting the Fe ions at 5 keV using the ion gun; and

creating a Fe dose of 7.4×10 15 Fe/cm 2 .

8 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 4 , further comprising the steps of:

creating a reduction of thickness of approximately 4 nm;

transitioning a top ~60 Å of the FeRh layer to a FM state; and

maintaining a bottom 250 Å of the FeRh layer in the AFM state.

9 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 4 , further comprising the steps of:

utilizing He ions as the ions in the step of implanting ions.

10 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 5 , further comprising the steps of:

creating a He dose of 2×10 16 He/cm 2 ; and

transitioning a top ~200 Å of the FeRh layer to a FM state.

11 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

enhancing the Fe 57 isotope fraction via the step of implanting ions; and

controlling the Fe/Rh ratio in the ion implanted region of the film.

12 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

setting the direction of the exchange bias by heating only to the metamagnetic transition temperature which is below 450 K.

13 . The method of inducing exchange bias by single step irradiation in a single FeRh film for use in a magnetic tunnel junction of claim 3 , further comprising the steps of:

modifying the dose and the species of the step of implanting ions;

modifying the metamagnetic transition;

allowing the exchange bias to persist below room temperature for high doses or at elevated temperatures for low doses.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 5, 2023
From: CRESS, CORY D.; VAN'T ERVE, OLAF M.J.; BENNETT, STEVEN P.
To: THE GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY
Reel/Frame 063228/0531 →
Continuity (2)
Provisional Application 63327852 · Apr 6, 2022
Related Publication 20230329124A1 · Oct 12, 2023
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