Pixel structure with reflective metal layer in a metal layer to improve the photoelectric conversion efficiency and reducing stray light noises in the substrate
There is provided a pixel structure including a top electrode, multiple bottom electrodes, an optically sensitive material layer and a metal wire layer. The optically sensitive material layer is arranged between the top electrode and the multiple bottom electrodes. The bottom electrodes corresponding to different pixels are separated from one another and have a gap therebetween. The metal wire layer has a reflective metal layer arranged opposite to the gap. The reflective metal layer reflects residual stray light penetrating the optically sensitive material layer by the surface plasmon resonance effect.
1 . A pixel structure, comprising:
a substrate, arranged at a backside of the pixel structure and with a pixel circuit;
a first electrode, arranged at a front side of the pixel structure;
multiple second electrodes, having a gap from one another, and each second electrode being corresponding to one pixel region;
an optically sensitive material (OSM) layer, sandwiched between the first electrode and the multiple second electrodes, wherein the OSM layer is configured to receive light to generate signal charges; and
a metal layer, comprising:
a shielding metal layer, surrounding each pixel region and configured to provide a voltage to the pixel circuit;
a transfer metal layer, configured to transfer the signal charges; and
a reflective metal layer, arranged between the shielding metal layer and the transfer metal layer in a transverse direction, and aligned with the gap in a longitudinal direction.
2 . The pixel structure as claimed in claim 1 , wherein the reflective metal layer comprises multiple metal blocks distributed between the shielding metal layer and the transfer metal layer in the transverse direction.
3 . The pixel structure as claimed in claim 2 , wherein all of the multiple metal blocks have an identical cross-sectional area.
4 . The pixel structure as claimed in claim 2 , wherein at least a part of the multiple metal blocks have different cross-sectional areas.
5 . The pixel structure as claimed in claim 2 , wherein a gap between the multiple metal blocks is smaller than a width of the multiple metal blocks.
6 . The pixel structure as claimed in claim 2 , wherein at least a part of the multiple metal blocks are connected with the shielding metal layer.
7 . The pixel structure as claimed in claim 2 , wherein all of the multiple metal blocks are separated from the shielding metal layer.
8 . The pixel structure as claimed in claim 2 , wherein the multiple metal blocks are symmetrical in two perpendicular directions of the transverse direction.
9 . The pixel structure as claimed in claim 2 , wherein the multiple metal blocks are rotational symmetry in the transverse direction.
10 . The pixel structure as claimed in claim 1 , wherein the pixel structure comprises multiple metal layers stacked in the longitudinal direction, and the metal layer is one metal layer closest to the OSM layer among the multiple metal layers.
11 . A pixel structure, comprising:
a substrate, arranged with a pixel circuit;
a first electrode, arranged at a front side of the pixel structure;
multiple second electrodes, having a gap from one another, and each second electrode being corresponding to one pixel region;
an optically sensitive material (OSM) layer, sandwiched between the first electrode and the multiple second electrodes, wherein the OSM layer is configured to receive light to generate signal charges; and
a metal layer, arranged to be closer to a backside of the pixel structure than the substrate, and comprising:
a shielding metal layer, surrounding each pixel region and configured to provide a voltage to the pixel circuit;
a transfer metal layer, configured to transfer the signal charges; and
a reflective metal layer, arranged between the shielding metal layer and the transfer metal layer in a transverse direction, and aligned with the gap in a longitudinal direction.
12 . The pixel structure as claimed in claim 11 , wherein the reflective metal layer comprises multiple metal blocks distributed between the shielding metal layer and the transfer metal layer in the transverse direction.
13 . The pixel structure as claimed in claim 12 , wherein
all of the multiple metal blocks have an identical cross-sectional area, or
at least a part of the multiple metal blocks have different cross-sectional areas.
14 . The pixel structure as claimed in claim 12 , wherein
all of the multiple metal blocks are separated from the shielding metal layer, or
at least a part of the multiple metal blocks are connected with the shielding metal layer.
15 . The pixel structure as claimed in claim 12 , wherein a gap between the multiple metal blocks is smaller than a width of the multiple metal blocks.
16 . A pixel structure, comprising:
a substrate, arranged at a front side of the pixel structure and with a pixel circuit;
multiple optically sensitive material (OSM) layers, arranged in the substrate, and respectively configured to receive light to generate signal charges; and
a metal layer, arranged to be closer to a backside of the pixel structure than the substrate, and comprising:
a shielding metal layer, surrounding each pixel region and configured to provide a voltage to the pixel circuit;
a transfer metal layer, configured to transfer the signal charges; and
a reflective metal layer, arranged between the shielding metal layer and the transfer metal layer in a transverse direction, and aligned with the multiple OSM layers in a longitudinal direction.
17 . The pixel structure as claimed in claim 16 , wherein the reflective metal layer comprises multiple metal blocks distributed between the shielding metal layer and the transfer metal layer in the transverse direction.
18 . The pixel structure as claimed in claim 17 , wherein
all of the multiple metal blocks have an identical cross-sectional area, or
at least a part of the multiple metal blocks have different cross-sectional areas.
19 . The pixel structure as claimed in claim 17 , wherein
all of the multiple metal blocks are separated from the shielding metal layer, or
at least a part of the multiple metal blocks are connected with the shielding metal layer.
20 . The pixel structure as claimed in claim 17 , wherein a gap between the multiple metal blocks is smaller than a width of the multiple metal blocks.