Semiconductor device and method of manufacturing the same
A semiconductor device includes parallel active regions on a substrate and extending in a first horizontal direction; gate structures intersecting the active regions, extending in a second horizontal direction, and including first and second gate structures opposing each other in the second horizontal direction; source/drain regions including first and second source/drain regions, on at least one side of the gate structures and on the active regions; a gate separation pattern between the first and second gate structures; a vertical conductive structure in the gate separation pattern; contact plugs including a first contact plug electrically connected to the first source/drain region and the vertical conductive structure, and a second contact plug electrically connected to the second source/drain region and spaced apart from the vertical conductive structure; and a contact separation pattern separating the first and second contact plugs, having a portion contacting an upper surface of the vertical conductive structure.
1 . A semiconductor device comprising:
active regions, parallel to each other, on a substrate and respectively extending in a first horizontal direction;
gate structures intersecting the active regions on the substrate, extending in a second horizontal direction, the gate structures including a first gate structure and a second gate structure opposing each other in the second horizontal direction;
source/drain regions including a first source/drain region and a second source/drain region, on at least one side of the gate structures and on the active regions;
a gate separation pattern between the first and second gate structures;
a vertical conductive structure in the gate separation pattern;
contact plugs including a first contact plug electrically connected to the first source/drain region and connected to the vertical conductive structure, and a second contact plug electrically connected to the second source/drain region and spaced apart from the vertical conductive structure; and
a contact separation pattern separating the first and second contact plugs between the first and second contact plugs,
wherein the contact separation pattern has a portion contacting an upper surface of the vertical conductive structure on the vertical conductive structure.
2 . The semiconductor device of claim 1 , wherein the first contact plug is in contact with the contact separation pattern.
3 . The semiconductor device of claim 1 , wherein
a lower surface of the contact separation pattern is in contact with the vertical conductive structure and the gate separation pattern, and
the lower surface of the contact separation pattern includes a first surface contacting the vertical conductive structure, and a second surface contacting the gate separation pattern and coplanar with the first surface.
4 . The semiconductor device of claim 1 , wherein an upper surface of the contact separation pattern is coplanar with upper surfaces of the contact plugs.
5 . The semiconductor device of claim 1 , wherein a flat area of an upper portion of the contact separation pattern is smaller than a flat area of a lower portion of the contact separation pattern.
6 . The semiconductor device of claim 1 , wherein the gate separation pattern surrounds an outer side surface of the vertical conductive structure.
7 . The semiconductor device of claim 6 , wherein the gate separation pattern has a uniform thickness on the outer side surface of the vertical conductive structure.
8 . The semiconductor device of claim 6 , wherein the gate separation pattern has a non-uniform thickness on the outer side surface of the vertical conductive structure.
9 . The semiconductor device of claim 1 , wherein a height level of an uppermost surface of the gate separation pattern is higher than a height level of an uppermost surface of the vertical conductive structure.
10 . The semiconductor device of claim 9 , wherein the gate separation pattern comprises a portion protruding from a side surface of the vertical conductive structure in an upward direction.
11 . The semiconductor device of claim 1 , wherein a height level of a lower end of the contact separation pattern is higher than height levels of lower ends of the contact plugs.
12 . The semiconductor device of claim 1 , wherein the contact separation pattern passes through the contact plugs, and has a height level of a lower end, lower than height levels of lower ends of the contact plugs.
13 . The semiconductor device of claim 1 , wherein
the vertical conductive structure comprises a first plug layer and a first barrier layer surrounding an outer side surface and a bottom surface of the first plug layer, and
each of the contact plugs comprises a second plug layer and a second barrier layer surrounding an outer side surface and a bottom surface of the second plug layer.
14 . A semiconductor device comprising:
a substrate having a first surface and a second surface opposing the first surface;
active regions, parallel to each other, on the first surface of the substrate and respectively extending in a first horizontal direction;
a plurality of channel layers stacked to be spaced apart from each other in a vertical direction on the active regions;
gate structures intersecting the active regions and the plurality of channel layers on the first surface of the substrate, extending in a second horizontal direction, and including a first gate structure and a second gate structure opposing each other in the second horizontal direction;
a first source/drain region and a second source/drain region, on at least one side of the gate structures and on the active regions;
a gate separation pattern between the first and second gate structures;
lower interconnection lines below the second surface of the substrate;
a vertical conductive structure in the gate separation pattern and electrically connected to the lower interconnection lines;
a contact separation pattern on the vertical conductive structure to contact the vertical conductive structure; and
contact plugs including a first contact plug electrically connected to the first source/drain region and the vertical conductive structure, and a second contact plug electrically connected to the second source/drain region and spaced apart from the vertical conductive structure,
wherein the contact separation pattern separates the first and second contact plugs between the first and second contact plugs.
15 . The semiconductor device of claim 14 , wherein a height level of an upper surface of the vertical conductive structure is higher than a height level of an upper surface of an uppermost channel layer, among the plurality of channel layers, and is lower than height levels of upper surfaces of the gate structures.
16 . The semiconductor device of claim 14 , wherein the contact separation pattern includes at least one of silicon nitride, silicon carbonitride, or silicon oxynitride and the gate separation pattern includes at least one of silicon nitride, silicon carbonitride, or silicon oxynitride.
17 . The semiconductor device of claim 14 , wherein an upper surface of the vertical conductive structure is in contact with the contact separation pattern and the first contact plug.
18 . A semiconductor device comprising:
a substrate having a first surface and a second surface opposing the first surface;
active regions, parallel to each other, on the first surface of the substrate and respectively extending in a first horizontal direction;
gate structures intersecting the active regions on the first surface of the substrate and extending in a second horizontal direction;
a gate separation pattern between the gate structures;
source/drain regions including a first source/drain region and a second source/drain region, on at least one side of the gate structures and on the active regions;
lower interconnection lines on the second surface of the substrate;
a vertical conductive structure in the gate separation pattern and passing through the substrate and electrically connected to the lower interconnection lines;
a contact separation pattern on the vertical conductive structure to contact the vertical conductive structure; and
contact plugs including a first contact plug electrically connected to the first source/drain region and the vertical conductive structure, and a second contact plug electrically connected to the second source/drain region and spaced apart from the vertical conductive structure,
wherein the contact separation pattern separates the first and second contact plugs between the first and second contact plugs, and
a width of an upper portion of the contact separation pattern is narrower than a width of a lower portion of the contact separation pattern, in the second horizontal direction.
19 . The semiconductor device of claim 18 , wherein an upper surface of the contact separation pattern is coplanar with upper surfaces of the contact plugs.
20 . The semiconductor device of claim 18 , further comprising a plurality of channel layers spaced apart from each other on the active regions,
wherein each of the gate structures surrounds the plurality of channel layers.