Sensor die with a diaphragm
View Patent ↗A sensor die includes a diaphragm having a first membrane and a second membrane positioned within the first membrane. The first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side. The second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm.
1. A sensor die, comprising:
a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm, the diaphragm includes a first layer and a second layer disposed on the first layer, the first membrane is formed of the first layer and the second layer, and the second membrane is formed of the second layer, the first layer has a diaphragm cavity extending into the first layer, the first layer includes a silicon and an oxide disposed on the silicon, the diaphragm cavity is formed in the oxide of the first layer.
2. The sensor die of claim 1 , wherein the second membrane is formed by a portion of the second layer extending over the diaphragm cavity.
3. The sensor die of claim 2 , wherein the diaphragm cavity between the first layer and the second layer has a vacuum pressure.
4. The sensor die of claim 1 , wherein the first membrane has a recess extending into the first side of the diaphragm, the recess is separated from the second membrane.
5. The sensor die of claim 1 , further comprising a support on which the diaphragm is disposed, the support has a support cavity, the second side of the diaphragm faces the support cavity.
6. The sensor die of claim 5 , wherein the differential pressure is measured between a first pressure on the first side of the diaphragm and a second pressure in the support cavity on the second side of the diaphragm.
7. The sensor die of claim 1 , further comprising a plurality of piezoresistive elements including a first set forming a first Wheatstone bridge positioned on the first membrane, and a second set forming a second Wheatstone bridge positioned on the second membrane.
8. The sensor die of claim 5 , wherein a first set of piezoresistive elements disposed on the first membrane are aligned with a support cavity perimeter of the support cavity.
9. The sensor die of claim 2 , wherein a second set of piezoresistive elements disposed on the second membrane are aligned with a diaphragm perimeter of the diaphragm cavity.
10. A process of manufacturing a sensor die, comprising:
providing a first layer of a diaphragm;
etching a diaphragm cavity into the first layer; and
attaching a second layer of the diaphragm on the first layer, a portion of the first layer and the second layer outside of the diaphragm cavity forms a first membrane and a portion of the second layer extending over the diaphragm cavity forms a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm.
11. The process of claim 10 , wherein the first layer includes a silicon and an oxide disposed on the silicon, the diaphragm cavity is formed in the oxide of the first layer.
12. The process of claim 11 , further comprising bonding a support to the second side of the diaphragm and etching a support cavity into the support, the second side of the diaphragm faces the support cavity.
13. The process of claim 12 , further comprising implanting a plurality of piezoresistive elements in the second layer.
14. The process of claim 13 , wherein a first set of the piezoresistive elements is disposed on the first membrane and aligned with a perimeter of the support cavity, and a second set of the piezoresistive elements is disposed on the second membrane and aligned with a perimeter of the diaphragm cavity.
15. A sensor assembly, comprising:
a sensor die including a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm; and
a controller connected to the sensor die and receiving the differential pressure and the absolute pressure from the sensor die, the controller executes a compensation algorithm based on the differential pressure to correct an error in the absolute pressure.
16. The sensor assembly of claim 15 , wherein the sensor die includes a plurality of piezoresistive elements including a first set forming a first Wheatstone bridge positioned on the first membrane, and a second set forming a second Wheatstone bridge positioned on the second membrane.
17. The sensor assembly of claim 16 , further comprising a plurality of connections connected to the piezoresistive elements, the first set and the second set of the piezoresistive elements share at least one of a supply and a ground of the connections.
18. The sensor assembly of claim 17 , wherein the controller is connected to the first set of the piezoresistive elements by a plurality of first outputs and connected to the second set of the piezoresistive elements by a plurality of second outputs, the controller receives the differential pressure measured by the first set of the piezoresistive elements and the absolute pressure measured by the second set of the piezoresistive elements.
19. A sensor die, comprising:
a diaphragm having a first membrane and a second membrane positioned within the first membrane, the first membrane is deflectable in proportion with a differential pressure between a first side of the diaphragm and a second side of the diaphragm opposite the first side, the second membrane is deflectable simultaneously with the first membrane and in proportion with an absolute pressure on the first side of the diaphragm, the first membrane has a recess extending into the first side of the diaphragm, the recess is separated from the second membrane.