Dispensing nozzle design and dispensing method thereof
View Patent ↗A lithography apparatus includes a wafer chuck configured to hold a wafer, a fluid source configured to contain a fluid to be applied towards the wafer during a lithography process, a dispensing nozzle positioned above the wafer chuck and in fluid communication with the fluid source, the dispensing nozzle having an adjustable cross-section, and a mechanical mechanism operable to apply a force towards an outer surface of the dispensing nozzle to change the adjustable cross-section.
1. A lithography apparatus, comprising:
a wafer chuck configured to hold a wafer;
a fluid source configured to contain a fluid to be applied towards the wafer during a lithography process, wherein the wafer chuck is configured to rotate the wafer when the fluid is applied towards the wafer;
a dispensing nozzle positioned above the wafer chuck and in fluid communication with the fluid source, the dispensing nozzle having an adjustable cross-section; and
elongated pins operable to apply a force towards an outer surface of the dispensing nozzle to change the adjustable cross-section, wherein at least two of the elongated pins are operable to move along mutually perpendicular directions.
2. The lithography apparatus of claim 1 , wherein each of the elongated pins is movable to be in physical contact with the outer surface of the dispensing nozzle.
3. The lithography apparatus of claim 2 , wherein each of the elongated pins is movable in a direction perpendicular to a lengthwise direction of the dispensing nozzle.
4. The lithography apparatus of claim 2 , wherein the elongated pins are grouped in multiple layers stacked along a lengthwise direction of the dispensing nozzle.
5. The lithography apparatus of claim 1 , wherein the elongated pins are operable to change the adjustable cross-section on-the-fly during a dispensing operation of the lithography apparatus.
6. The lithography apparatus of claim 1 , wherein the fluid is a photoresist or a photoresist developer.
7. The lithography apparatus of claim 1 , wherein a shape of the adjustable cross-section is selected from a triangle, a rectangle, a square, a circle, an oval, or a polygon.
8. The lithography apparatus of claim 1 , further comprising:
a gas sprayer in a proximity region of an orifice of the dispensing nozzle, wherein the gas sprayer is operable to spray a gas to adjust an ambient pressure in the proximity region.
9. The lithography apparatus of claim 8 , wherein the gas is an inert gas.
10. The lithography apparatus of claim 1 , further comprising:
a moveable arm attached to the dispensing nozzle, the moveable arm being operable to move the dispensing nozzle horizontally and vertically with respect to the wafer chuck.
11. An apparatus for dispensing a fluid during a lithography process, comprising:
a wafer chuck;
a nozzle positioned above the wafer chuck, the nozzle being operable to dispense the fluid towards the wafer chuck, the wafer chuck operable to rotate when the fluid is dispensed, the nozzle including an inner layer and an outer layer, the inner layer defining a bore for the fluid to flow through the nozzle;
moveable pins operable to apply a force on the outer layer of the nozzle to change a cross-section of the bore, wherein the moveable pins are driven by applying a gaseous pressure, wherein the outer layer separates the moveable pins from the inner layer; and
a fluid source coupled to the nozzle, the fluid source containing the fluid.
12. The apparatus of claim 11 , wherein the inner and outer layers of the nozzle include elastic films made of different material compositions.
13. The apparatus of claim 12 , wherein the elastic film of the inner layer is more rigid than that of the outer layer.
14. The apparatus of claim 11 , wherein the fluid is a photoresist or a photoresist developer.
15. A lithography apparatus, comprising:
a wafer chuck;
a fluid source configured to contain a fluid to be dispensed during a lithography process, wherein the wafer chuck is operable to rotate when the fluid is dispensed;
a dispensing nozzle in fluid communication with the fluid source, the dispensing nozzle having an adjustable cross-section; and
movable pins operable to apply a force towards an outer surface of the dispensing nozzle to change the adjustable cross-section, wherein the movable pins include a first pin operable to move along a first direction and a second pin operable to move along a second direction, and wherein the first direction is tilted relative to the second direction when viewed along a lengthwise direction of the dispensing nozzle.
16. The lithography apparatus of claim 15 , wherein the movable pins are operable to be in direct contact with the outer surface of the dispensing nozzle or retreated away from the outer surface of the dispensing nozzle.
17. The lithography apparatus of claim 16 , wherein the movable pins are driven by applying a gaseous pressure.
18. The lithography apparatus of claim 15 , wherein the dispensing nozzle is made of one or more elastic materials.
19. The lithography apparatus of claim 15 , further comprising:
a gas sprayer in a proximity region of an orifice of the dispensing nozzle, wherein the gas sprayer is operable to spray a gas to adjust an ambient pressure in the proximity region.
20. The lithography apparatus of claim 15 , wherein the movable pins are operable to apply the force to change the adjustable cross-section when the fluid is dispensed.