Treatment method of workpiece
A treatment method of a workpiece includes a positional relation storing step of storing a positional relation between a reference point of the workpiece and an identification mark to identify the workpiece, holding the workpiece over a holding table, imaging the workpiece by an imaging unit and detecting the reference point. The treatment method includes also a reading step of detecting the identification mark on the basis of the positional relation recorded in the positional relation storing step and imaging the identification mark by the imaging unit to read the identification mark, a treatment step of treating the workpiece, and an information recording step of associating information regarding the workpiece indicated by the identification mark read in the reading step with treatment information relating to the treatment step and recording the information regarding the workpiece and the treatment information.
1. A treatment method of a workpiece in which the workpiece on which an identification mark to identify the workpiece is displayed is treated in a treatment apparatus including a holding table that holds the workpiece, an imaging unit that images the workpiece held by the holding table, and a treatment unit that treats the workpiece held by the holding table, the treatment method comprising:
a positional relation storing step of storing a position relation between a reference point of the workpiece and the identification mark;
a holding step of holding the workpiece on the holding table;
a reference point detection step of imaging the workpiece held by the holding table by the imaging unit and detecting the reference point;
a reading step of detecting the identification mark on a basis of the positional relation recorded in the positional relation storing step and imaging the identification mark by the imaging unit to read the identification mark;
a treatment step of treating the workpiece; and
an information recording step of associating information regarding the workpiece indicated by the identification mark read in the reading step with treatment information relating to the treatment step and recording the information regarding the workpiece and the treatment information.
2. The treatment method of a workpiece according to claim 1 , wherein
the reference point is a center of the workpiece.