Substrate measurement subsystem
A method for a substrate measurement subsystem is provided. An indication is received that a substrate being processed at a manufacturing system has been loaded into a substrate measurement subsystem. First positional data of the substrate within the substrate measurement subsystem is determined. One or more portions of the substrate to be measured by one or more sensing components of the substrate measurement subsystem are determined based on the first positional data of the substrate and a process recipe for the substrate. Measurements of each of the determined portions of the substrate are obtained by one or more sensing components of the substrate measurement subsystem. The obtained measurements of each of the determined portions of the substrate are transmitted to a system controller.
1. A method comprising:
receiving an indication that a substrate being processed at a manufacturing system has been loaded into a substrate measurement subsystem, the substrate measurement subsystem comprising a first removable sensing component;
determining to replace the first removable sensing component with a second removable sensing component, wherein the first removable sensing component is subsequently replaced with the second removable sensing component;
obtaining first positional data of the substrate within the substrate measurement subsystem, the obtained first positional data indicating a position and an orientation of the substrate within the substrate measurement subsystem;
determining, based on the first positional data of the substrate and a process recipe for the substrate, one or more portions of the substrate to be measured by the second removable sensing component of the substrate measurement subsystem;
obtaining measurements of each of the determined one or more portions of the substrate by the second removable sensing component of the substrate measurement subsystem; and
transmitting the obtained measurements of each of the determined one or more portions of the substrate to a system controller.
2. The method of claim 1 , wherein the first removable sensing component of the substrate measurement subsystem comprises a first spectra sensing component configured to generate first spectral data for each of the determined one or more portions of the substrate, and wherein the second removable sensing component of the substrate measurement subsystem comprises a second spectra sensing component configured to generate second spectral data for each of the determined one or more portions of the substrate.
3. The method of claim 2 , wherein the first spectral data and the second spectral data each comprises at least one of: reflectometry spectral data, ellipsometry spectral data, hyperspectral imaging data, or chemical imaging data.
4. The method of claim 2 , wherein the first spectra sensing component of the first removable sensing component comprises a first type of spectra sensing component configured to generate a first type of spectral data and wherein the second spectra sensing component of the second removable sensing component comprises a second type of spectra sensing component configured to generate a second type of spectral data, and wherein the method further comprises:
receiving an indication of one or more types of measurements to be obtained for each of the determined one or more portions of the substrate by the one or more sensing components of the substrate measurement subsystem; and
determining, based on the indication of the one or more types of measurements to be obtained for each of the determined one or more portions of the substrate, the first type of spectral data, and the second type of spectral data, whether to obtain measurements for each of the determined one or more portions of the substrate using the first type of spectra sensing component or the second type of spectra sensing component.
5. The method of claim 2 , wherein the first spectra sensing component of the first removable sensing component is configured to generate a first type of spectral data, and wherein the second spectra sensing component of the second removable sensing component is configured to generate a second type of spectra data, the method further comprising:
receiving an indication of one or more types of measurements to be obtained for each of the determined one or more portions of the substrate by the substrate measurement subsystem;
determining, based on the indication of the one or more types of measurements to be obtained for each of the determined one or more portions of the substrate and the first type of spectral data, that the second spectra sensing component of the second removable sensing component is an optimal sensing component for obtaining the one or more types of measurements for each of the determined one or more portions of the substrate; and
transmitting, based on the determination that the second type of spectra sensing component is the optimal sensing component for obtaining the one or more types of measurements, a notification to the system controller, the notification indicating that the first removable sensing component of the substrate measurement subsystem should be replaced with the second removable sensing component and the second removable sensing component should be used to obtain the one or more types of measurements for each of the determined one or more portions of the substrate.
6. The method of claim 1 , wherein determining positional data of the substrate within the substrate measurement subsystem comprises:
determining an identification feature included on the substrate that indicates a location of a portion of the substrate relative to a reference location of the substrate;
generating an instruction to generate one or more images of the substrate, wherein a generated image includes a depiction of the identification feature included on the substrate;
determining, based on the depiction of the identification feature included in the generated image, the orientation and the position of the substrate included in the substrate measurement subsystem; and
generating, based on the determined orientation and the determined position of the substrate, the first positional data of the substrate, wherein the first positional data comprises a first coordinate for the identification feature relative to the reference location of the substrate.
7. The method of claim 6 , further comprising:
determining second positional data corresponding to a determined portion of the substrate to be measured by the second removable sensing component, wherein the second positional data comprises a second coordinate for the corresponding determined portion of the substrate relative to the first coordinate for the identification feature;
responsive to obtaining measurements for the determined portions of the substrate, generating a mapping between the obtained measurement for the determined portion of the substrate and the corresponding second positional data; and
transmitting the mapping between the obtained measurement for the determined portion and the corresponding second positional data to the system controller.
8. The method of claim 1 , further comprising:
transmitting, with the obtained measurement of each of the determined one or more portions of the substrate, the obtained first positional data to the system controller.
9. The method of claim 6 , further comprising:
determining a type associated with the substrate,
wherein the identification feature included on the substrate is determined in view of the determined type associated with the substrate.
10. The method of claim 1 , wherein the process recipe for the substrate is associated with at least one of a process that was previously performed for the substrate or a process that is to be performed for the substrate.
11. A substrate measurement subsystem, comprising:
a first removable sensing component and a second removable sensing component, the first removable sensing component and the second removable sensing component configured to obtain measurements for one or more portions of a substrate within the substrate measurement subsystem; and
a controller coupled to the first removable sensing component, wherein the controller is to:
receive an indication that a substrate being processed at a manufacturing system has been loaded into the substrate measurement subsystem;
determine that the first removable sensing component is to be replaced with the second removable sensing component, wherein the first removable sensing component is subsequently replaced with the second removable sensing component;
obtain first positional data of the substrate within the substrate measurement subsystem, the obtained first positional data indicating a position and an orientation of the substrate within the substrate measurement subsystem;
determine, based on the first positional data of the substrate and a process recipe for the substrate, one or more portions of the substrate to be measured by the second sensing component of the substrate measurement subsystem;
obtain measurements of each of the determined one or more portions of the substrate by the second removable sensing component of the substrate measurement subsystem; and
transmit the obtained measurements of each of the determined one or more portions of the substrate to a system controller.
12. The substrate measurement subsystem of claim 11 , wherein the first removable sensing component of the substrate measurement subsystem comprises a first spectra sensing component configured to generate first spectral data for each of the determined one or more portions of the substrate, and wherein the second removable sensing component of the substrate measurement subsystem comprises a second spectra sensing component configured to generate second spectral data for each of the determined one or more portions of the substrate.
13. The substrate measurement subsystem of claim 12 , wherein the first spectral data and the second spectral data each comprises at least one of: reflectometry spectral data, ellipsometry spectral data, hyperspectral imaging data, or chemical imaging data.
14. The substrate measurement subsystem of claim 12 , wherein the first spectra sensing component of the first removable sensing component is configured to generate a first type of spectral data and the second spectra sensing component of the second removable sensing component is configured to generate a second type of spectral data, and wherein the controller is further to:
receive an indication of one or more types of measurements to be obtained for each of the determined one or more portions of the substrate by the substrate measurement subsystem; and
determine, based on the indication of the one or more types of measurements to be obtained for each of the determined portions of the substrate, the first type of spectral data, and the second type of spectral data, whether to obtain measurements for each of the determined portions of the substrate using the first removable sensing component or the second removable sensing component.
15. The substrate measurement subsystem of claim 12 , wherein the first spectra sensing component of the first removable sensing component is configured to generate a first type of spectral data, wherein the second spectra sensing component of the second removable sensing component is configured to generate a second type of spectral data, and wherein the controller is further to:
receive an indication of one or more types of measurements to be obtained for each of the determined one or more portions of the substrate by the one or more sensing components of the substrate measurement subsystem;
determine, based on the indication of the one or more types of measurements to be obtained for each of the determined one or more portions of the substrate and the first type of spectral data, that the second spectra sensing component of the second removable sensing component is an optimal sensing component for obtaining the one or more types of measurements for each of the determined one or more portions of the substrate; and
transmit, based on the determination that the second spectra sensing component of the second removable sensing component is the optimal sensing component for obtaining the one or more types of measurements, a notification to the system controller, the notification indicating that the first removable sensing component of the substrate measurement subsystem should be replaced with the second removable sensing component and the second removable sensing component should be used to obtain the one or more types of measurements for each of the determined one or more portions of the substrate.
16. The substrate measurement subsystem of claim 11 , further comprising:
one or more position determination components configured to determine a position of the substrate within the substrate measurement subsystem.
17. The substrate measurement subsystem of claim 16 , wherein to determine positional data of the substrate within the substrate measurement subsystem, the controller is to:
determine an identification feature included on the substrate that indicates a location of a portion of the substrate relative to a reference location of the substrate;
generate an instruction to cause the one or more position determination components to generate one or more images of the substrate, wherein a generated image includes a depiction of the identification feature included on the substrate;
determine, based on the depiction of the identification feature included in the generated image, the orientation and the position of the substrate included in the substrate measurement subsystem; and
generate, based on the determined orientation and the determined position of the substrate, the first positional data of the substrate, wherein the first positional data comprises a first coordinate for the identification feature relative to the reference location of the substrate.
18. A non-transitory computer readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to:
receive an indication that a substrate being processed at a manufacturing system has been loaded into a substrate measurement subsystem;
determine that a first removable sensing component of the substrate measurement subsystem is to be replaced with a second removable sensing component of the substrate measurement subsystem, wherein the first removable sensing component is subsequently replaced with the second removable sensing component;
obtain first positional data of the substrate within the substrate measurement subsystem, the obtained first positional data indicating a position and an orientation of the substrate within the substrate measurement subsystem;
determine, based on the first positional data of the substrate and a process recipe for the substrate, one or more portions of the substrate to be measured by the second removable sensing component of the substrate measurement subsystem;
obtain measurements of each of the determined one or more portions of the substrate by the second removable sensing component of the substrate measurement subsystem; and
transmit the obtained measurements of each of the determined one or more portions of the substrate to a system controller.
19. The non-transitory computer readable storage medium of claim 18 , wherein the first removable sensing component of the substrate measurement subsystem comprises a first spectra sensing component configured to generate first spectral data for each of the determined one or more portions of the substrate, and wherein the second removable sensing component of the substrate measurement subsystem comprises a second spectra sensing component configured to generate second spectral data for each of the determined one or more portions of the substrate.
20. The non-transitory computer readable storage medium of claim 19 , wherein the first spectral data and the second spectral data each comprises at least one of: reflectometry spectral data, ellipsometry spectral data, hyperspectral imaging data, or chemical imaging data.