Chip bonded semiconductor memory device with different charge storage films
According to one embodiment, there is provided a semiconductor memory device including a first chip, a second chip and a third chip. In the first chip, plural first conductive layers are stacked via a first insulating layer. In the second chip, plural second conductive layers are stacked via a second insulating layer. A number of stack layers in the plural first conductive layers and a number of stack layers in the plural second conductive layers are different from each other.
1. A semiconductor memory device comprising:
a first chip;
a second chip bonded to the first chip; and
a third chip bonded to the second chip on a side opposite to the first chip,
wherein the first chip includes:
plural first conductive layers stacked via a first insulating layer;
a first semiconductor film extending in a stack direction through the plural first conductive layers;
a first insulating film disposed between the plural first conductive layers and the first semiconductor film; and
a first charge storage film disposed between the first insulating film and the first semiconductor film,
the second chip includes:
plural second conductive layers stacked via a second insulating layer;
a second semiconductor film extending in the stack direction through the plural second conductive layers;
a second insulating film disposed between the plural second conductive layers and the second semiconductor film; and
a second charge storage film disposed between the second insulating film and the second semiconductor film, and
a film thickness of the first charge storage film and a film thickness of the second charge storage film are different from each other in a direction intersecting the stack direction.
2. The semiconductor memory device according to claim 1 ,
wherein the film thickness of the first charge storage film is smaller than the film thickness of the second charge storage film.
3. The semiconductor memory device according to claim 1 ,
wherein the film thickness of the first charge storage film is greater than the film thickness of the second charge storage film.
4. The semiconductor memory device according to claim 1 ,
wherein the film thickness of the first insulating film and the film thickness of the second insulating film are substantially equal to each other in the direction intersecting the stack direction.
5. The semiconductor memory device according to claim 1 ,
wherein the film thickness of the first semiconductor film and the film thickness of the second semiconductor film are substantially equal to each other in the direction intersecting the stack direction.
6. A semiconductor memory device comprising:
a first chip;
a second chip bonded to the first chip;
a third chip bonded to the second chip on a side opposite to the first chip,
wherein the first chip includes:
plural first conductive layers stacked via a first insulating layer;
a first semiconductor film extending in a stack direction through the plural first conductive layers;
a first insulating film disposed between the plural first conductive layers and the first semiconductor film;
a first charge storage film disposed between the first insulating film and the first semiconductor film; and
a third insulating film disposed between the first charge storage film and the first semiconductor film,
the second chip includes:
plural second conductive layers stacked via a second insulating layer;
a second semiconductor film extending in the stack direction through the plural second conductive layers;
a second insulating film disposed between the plural second conductive layers and the second semiconductor film;
a second charge storage film disposed between the second insulating film and the second semiconductor film; and
a fourth insulating film disposed between the second charge storage film and the second semiconductor film, and
a film thickness of the third insulating film and a film thickness of the fourth insulating film are different from each other in a direction intersecting the stack direction.
7. The semiconductor memory device according to claim 6 ,
wherein the film thickness of the third insulating film is smaller than the film thickness of the fourth insulating film.
8. The semiconductor memory device according to claim 6 ,
wherein the film thickness of the third insulating film is greater than the film thickness of the fourth insulating film.
9. The semiconductor memory device according to claim 6 ,
wherein the film thickness of the first charge storage film and the film thickness of the second charge storage film are substantially equal to each other in the direction intersecting the stack direction.
10. The semiconductor memory device according to claim 6 ,
wherein the film thickness of the first semiconductor film and the film thickness of the second semiconductor film are substantially equal to each other in the direction intersecting the stack direction.