Active matrix substrate and display device
An active matrix substrate includes a pixel TFT including an oxide semiconductor layer, a gate insulating layer provided on the oxide semiconductor layer, and a gate electrode disposed so as to face the oxide semiconductor layer with the gate insulating layer interposed therebetween, a plurality of gate lines, an interlayer insulating layer provided so as to cover the gate electrode and the plurality of gate lines, a plurality of source lines provided on the interlayer insulating layer, an upper insulating layer provided so as to cover the plurality of source lines, and an organic insulating layer provided on the upper insulating layer. The interlayer insulating layer includes a first layer formed of silicon oxide, a second layer provided on the first layer and formed of silicon nitride, and a third layer provided on the second layer and formed of silicon oxide.
1. An active matrix substrate comprising:
a plurality of pixel regions arranged in a matrix;
a substrate;
a thin film transistor (TFT) supported by the substrate and provided corresponding to each of the plurality of pixel regions, the TFT including an oxide semiconductor layer, a gate insulating layer provided on the oxide semiconductor layer, and a gate electrode facing the oxide semiconductor layer with the gate insulating layer interposed therebetween;
a plurality of gate lines extending in a row direction and formed of the same conductive film as the gate electrode;
an interlayer insulating layer covering the gate electrode and the plurality of gate lines;
a plurality of source lines extending in a column direction and provided on the interlayer insulating layer;
an upper insulating layer covering the plurality of source lines;
an organic insulating layer provided on the upper insulating layer;
a display region and a peripheral region located around the display region;
a gate metal layer including the gate electrode and the plurality of gate lines; and
a source metal layer including the plurality of source lines; wherein
the interlayer insulating layer includes:
a first layer formed of silicon oxide,
a second layer provided on the first layer and formed of silicon nitride, and
a third layer provided on the second layer and formed of silicon oxide;
the organic insulating layer and the upper insulating layer include an opening provided to extend through both the organic insulating layer and the upper insulating layer; and
the opening overlaps, in the peripheral region, an intersection region in which the gate metal layer and the source metal layer overlap each other with the interlayer insulating layer interposed therebetween.
2. The active matrix substrate according to claim 1 ,
wherein a thickness of the third layer of the interlayer insulating layer is 50 nm or more.
3. The active matrix substrate according to claim 1 ,
wherein the upper insulating layer includes
a fourth layer formed of silicon oxide, and
a fifth layer provided on the fourth layer and formed of silicon nitride.
4. The active matrix substrate according to claim 1 ,
wherein the upper insulating layer includes
a fourth layer formed of silicon nitride,
a fifth layer provided on the fourth layer and formed of silicon oxide, and
a sixth layer provided on the fifth layer and formed of silicon nitride.
5. The active matrix substrate according to claim 1 ,
wherein the upper insulating layer includes only a fourth layer formed of silicon nitride.
6. The active matrix substrate according to claim 1 ,
wherein the interlayer insulating layer includes a portion including the first layer and the second layer and
not including the third layer in a region overlapping the opening.
7. The active matrix substrate according to claim 6 ,
wherein a thickness of the second layer included in the portion of the interlayer insulating layer is 50 nm or more.
8. The active matrix substrate according to claim 1 ,
wherein the interlayer insulating layer includes the first layer, the second layer, and the third layer in the entirety of the region overlapping the opening.
9. The active matrix substrate according to claim 1 , further comprising:
a gate line drive circuit configured to drive the plurality of gate lines, the gate line drive circuit being monolithically formed on the substrate,
wherein the opening included in the organic insulating layer and the upper insulating layer is located in the gate line drive circuit.
10. The active matrix substrate according to claim 1 ,
wherein the oxide semiconductor layer includes an In—Ga—Zn—O based semiconductor.
11. The active matrix substrate according to claim 10 ,
wherein the In—Ga—Zn—O based semiconductor includes a crystalline portion.
12. A display device comprising:
the active matrix substrate according to claim 1 .
13. The display device according to claim 12 ,
wherein the display device is a liquid crystal display device including
a counter substrate facing the active matrix substrate, and
a liquid crystal layer provided between the active matrix substrate and the counter substrate.
14. The active matrix substrate according to claim 1 , further comprising:
a dielectric layer covering the organic insulating layer; wherein
an entire side surface of the opening is in contact with the dielectric layer.