Image sensor with improved near-infrared (NIR) radiation phase-detection autofocus (PDAF) performance
Various embodiments of the present disclosure are directed towards an integrated chip. The integrated chip includes a first photodetector disposed in a first pixel region of a semiconductor substrate and a second photodetector disposed in a second pixel region of the semiconductor substrate. The second photodetector is laterally separated from the first photodetector. A first diffuser is disposed along a back-side of the semiconductor substrate and over the first photodetector. A second diffuser is disposed along the back-side of the semiconductor substrate and over the second photodetector. A first midline of the first pixel region and a second midline of the second pixel region are both disposed laterally between the first diffuser and the second diffuser.
1. An integrated chip, comprising:
a first photodetector disposed in a first pixel region of a semiconductor substrate;
a second photodetector disposed in a second pixel region of the semiconductor substrate, wherein the second photodetector is laterally separated from the first photodetector;
a first diffuser disposed along a back-side of the semiconductor substrate and over the first photodetector; and
a second diffuser disposed along the back-side of the semiconductor substrate and over the second photodetector, wherein a first midline of the first pixel region and a second midline of the second pixel region are both disposed laterally between the first diffuser and the second diffuser.
2. The integrated chip of claim 1 ,
wherein the semiconductor substrate comprises sidewalls forming one or more trenches along a first side of the first pixel region and along a second side of the first pixel region, the second side opposing the first side; and
wherein one or more isolation structures are arranged within the one or more trenches along the first side of the first pixel region and along the second side of the first pixel region.
3. The integrated chip of claim 2 , wherein the first diffuser is a larger distance from the one or more isolation structures arranged along the first side of the first pixel region than from the one or more isolation structures arranged along the second side of the first pixel region.
4. The integrated chip of claim 2 , wherein the semiconductor substrate comprises a first flat surface continuously extending from the first diffuser to the one or more isolation structures arranged along the first side of the first pixel region.
5. The integrated chip of claim 4 , wherein the semiconductor substrate further comprises a second flat surface continuously extending from the first diffuser to the one or more isolation structures arranged along the second side of the first pixel region.
6. The integrated chip of claim 1 , wherein the back-side of the semiconductor substrate within the first pixel region is asymmetric about the first midline of the first pixel region.
7. An integrated chip, comprising:
a first photodetector disposed in a semiconductor substrate;
a second photodetector disposed in the semiconductor substrate, wherein the second photodetector is laterally separated from the first photodetector;
a first diffuser disposed along a back-side of the semiconductor substrate and over the first photodetector, the first diffuser being laterally offset from a lateral center of the first photodetector in a first direction; and
a second diffuser disposed along the back-side of the semiconductor substrate and over the second photodetector, the second diffuser being laterally offset from a lateral center of the second photodetector in a second direction opposite the first direction.
8. The integrated chip of claim 7 , wherein the first direction is left and the second direction is right, as viewed in a cross-sectional view of the semiconductor substrate.
9. The integrated chip of claim 7 , further comprising:
one or more gate structures arranged along a front-side of the semiconductor substrate.
10. The integrated chip of claim 7 ,
wherein the semiconductor substrate comprises sidewalls forming one or more trenches along a first side of the first photodetector and along a second side of the first photodetector opposing the first side of the first photodetector; and
wherein one or more isolation structures are arranged within the one or more trenches along the first side of the first photodetector and along the second side of the first photodetector.
11. The integrated chip of claim 10 , further comprising:
a dielectric material continuously extending from within the first diffuser to within the one or more trenches.
12. The integrated chip of claim 10 , wherein the first diffuser is formed by angled sidewalls of the semiconductor substrate that meet to form a triangular shaped recess within the semiconductor substrate, as viewed in a cross-sectional view of the semiconductor substrate.
13. A method for forming an integrated chip, the method comprising:
forming a first photodetector in a semiconductor substrate, the first photodetector having a first side and an opposing second side;
forming a second photodetector in the semiconductor substrate, the second photodetector having a third side facing the first side of the first photodetector and an opposing fourth side facing away from the first photodetector;
etching the semiconductor substrate to form a first diffuser and a second diffuser along a back-side of the semiconductor substrate, wherein the first diffuser is closer to the second side than the first side and the second diffuser is closer to the fourth side than the third side; and
forming a dielectric on the back-side of the semiconductor substrate and within both the first diffuser and the second diffuser.
14. The method of claim 13 , further comprising:
forming one or more interconnects onto a front-side of the semiconductor substrate prior to etching the semiconductor substrate to form the first diffuser and the second diffuser.
15. The method of claim 13 , further comprising:
etching the semiconductor substrate to form one or more trenches surrounding the first photodetector and the second photodetector, wherein the one or more trenches extend into the semiconductor substrate to a larger depth than the first diffuser and the second diffuser; and
forming one or more dielectrics within the one or more trenches.
16. The method of claim 15 , wherein the one or more dielectrics continuously extend from within the first diffuser to within the one or more trenches.
17. The method of claim 13 ,
wherein a lateral center of the first photodetector is laterally separated from a lateral center of the second photodetector by a first lateral distance; and
wherein the first diffuser is laterally separated from the second diffuser by a second lateral distance that is larger than the first lateral distance.
18. The method of claim 13 , wherein the semiconductor substrate comprises a first flat surface continuously extending from the first diffuser to the first side of the first photodetector, as viewed in a cross-sectional view.
19. The method of claim 18 , wherein the semiconductor substrate further comprises a second flat surface continuously extending from the first diffuser to the second side of the first photodetector, as viewed in the cross-sectional view.
20. The method of claim 19 , wherein the first flat surface has a larger length than the second flat surface.