Ingot puller apparatus having dopant feeders for adding a plurality of dopant batches
Ingot puller apparatus for producing a doped single crystal silicon ingot are disclosed. The ingot puller apparatus includes a dopant feeder having a first dopant receptacle for holding a first batch of dopant and a second dopant receptacle for holding a second batch of dopant. A rotation mechanism rotates the first dopant receptacle to release the first batch of dopant into the crucible and rotates the second dopant receptacle to release the second batch of dopant into the crucible.
1 . An ingot puller apparatus for producing a doped single crystal silicon ingot, the ingot puller apparatus comprising:
an ingot puller outer housing;
an ingot puller inner chamber formed within the ingot puller outer housing;
a crucible disposed within the ingot puller inner chamber;
a dopant feeder for adding dopant to the crucible, the dopant feeder comprising;
a first dopant receptacle for holding a first batch of dopant, the first dopant receptacle having a first dopant receptacle outlet;
a second dopant receptacle for holding a second batch of dopant, the second dopant receptacle having a second dopant receptacle outlet; and
a rotatable dopant cup, the first dopant receptacle and the second dopant receptacle being disposed within the rotatable dopant cup, the rotatable dopant cup comprising:
a sidewall;
a first dopant cup opening formed in the sidewall, the first dopant cup opening being aligned with the first dopant receptacle outlet;
a second dopant cup opening, the second dopant cup opening being aligned with the second dopant receptacle outlet; and
a tube disposed below the dopant feeder for transporting the first and second batches of dopant to the crucible.
2 . The ingot puller apparatus as set forth in claim 1 wherein the first dopant receptacle is a tube and the second dopant receptacle is a tube.
3 . The ingot puller apparatus as set forth in claim 1 wherein the dopant feeder comprises a third dopant receptacle for holding a third batch of dopant, the third dopant receptacle being disposed within the rotatable dopant cup.
4 . The ingot puller apparatus as set forth in claim 3 wherein the dopant feeder comprises a fourth dopant receptacle for holding a fourth batch of dopant, the fourth dopant receptacle being disposed within the rotatable dopant cup.
5 . The ingot puller apparatus as set forth in claim 1 wherein the dopant feeder comprises a dopant feeder housing, the first dopant receptacle and second dopant receptacle being disposed within the dopant feeder housing.
6 . The ingot puller apparatus as set forth in claim 5 wherein the dopant feeder housing is external to the ingot puller outer housing.
7 . The ingot puller apparatus as set forth in claim 1 comprising a handle for an operator to rotate the first and second dopant receptacles.
8 . The ingot puller apparatus as set forth in claim 7 comprising a shaft connected to the handle and one or more bearings through which the shaft extends that enable the shaft to rotate.
9 . The ingot puller apparatus as set forth in claim 1 wherein the dopant feeder comprises a funnel that is disposed below the first and second dopant receptacles for collecting the first and second batches of dopant, the funnel being connected to the tube.