IP Library Granted Patent US 12,068,130
Granted Patent B2
US 12,068,130 · App. 18/333,085 · Granted Aug 20, 2024

Method and device for spatial charged particle bunching

Inventors: Mark Joseph Bennahmias (Mission Viejo, CA); Michael John Zani (Laguna Niguel, CA); Jeffrey Winfield Scott (Carpenteria, CA)
Assignee: NexGen Semi Holding, Inc.
H01J37/3007H01J37/3174H01J2237/04
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Quick Facts
Patent No.
US 12,068,130
App. No.
18/333,085
Granted
Aug 20, 2024
Kind
B2
Abstract

A charged particle buncher includes a series of spaced apart electrodes arranged to generate a shaped electric field. The series includes a first electrode, a last electrode and one- or more intermediate electrodes. The charged particle buncher includes a waveform device attached to the electrodes and configured to apply a periodic potential waveform to each electrode independently in a manner so as to form a quasi-electrostatic time varying potential gradient between adjacent electrodes and to cause spatial distribution of charged particles that form a plurality of nodes and antinodes. The nodes have a charged particle density and the antinodes have substantially no charged particle density, and the nodes and the antinodes are formed from a charged particle beam configured to hit the target.

Claims (40)

1. An apparatus comprising:

a series of electrodes arranged to generate a shaped electric field; and

a waveform device attached to the electrodes and configured to apply a periodic potential waveform to each electrode independently in a manner so as to form a quasi-electrostatic time varying potential gradient between adjacent electrodes and to spatially distribute charged particles propagating along the series of electrodes and to form a particle beam comprising a plurality of bunches spaced from one another, wherein the bunches have a non-zero particle density and spaces between the bunches have substantially zero particle density.

2. The apparatus of claim 1 , wherein the particle beam has a beam current greater than 0.01 ampere per bunch.

3. The apparatus of claim 1 , wherein the particle beam has between 1 and 7,000,000 particles per bunch.

4. The apparatus of claim 1 , wherein the particle beam is configured to impinge a target surface.

5. The apparatus of claim 4 , wherein the particle beam has a beam current greater than or equal to 1,000 amperes per square centimeter at the target surface.

6. The apparatus of claim 4 , wherein the particle beam has a particle beam flux greater than 6.24×10 16 particles per bunch at the target surface.

7. The apparatus of claim 1 , further configured to adjust a longitudinal spacing between the bunches.

8. The apparatus of claim 7 , wherein the longitudinal spacing is periodic.

9. The apparatus of claim 7 , wherein the longitudinal spacing is harmonic.

10. The apparatus of claim 1 , further configured to be used in beam weapons applications.

11. The apparatus of claim 1 , further configured to be used in scanning and/or imaging applications.

12. The apparatus of claim 1 , further configured to be used in metrology and/or spectroscopic analysis applications.

13. The apparatus of claim 1 , wherein the quasi-electrostatic time varying potential gradient has a frequency between 1 MHz and 100 GHz.

14. The apparatus of claim 1 , wherein the particle beam has an energy in a range of 500 keV to 500 MeV.

15. The apparatus of claim 1 , further comprising means for deflecting the charged particles.

16. The apparatus of claim 15 , wherein the means for deflecting the charged particles is configured to spatially focus the particle beam.

17. The apparatus of claim 15 , wherein the means for deflecting the charged particles is selected from the group consisting of: one or more deflection electrodes, one or more magnetic lenses, one or more reflective optics, one or more focusing optics.

18. The apparatus of claim 15 , further comprising means for neutralizing the charged particles.

19. The apparatus of claim 1 , further comprising a collimator configured to collimate and direct the particle beam at accelerating potentials between 5 keV and 30 keV.

20. An apparatus comprising:

a beam source configured to generate a particle beam;

a beam buncher configured to spatially distribute particles of the particle beam to form a plurality of bunches, wherein the bunches have a non-zero particle density and spaces between the bunches have substantially no particle density; and

optical components configured to collimate, deflect, and direct the particles at accelerating potentials between 5 keV and 30 keV.

21. The apparatus of claim 20 , wherein the particle beam has a beam current greater than 0.01 ampere per node.

22. The apparatus of claim 20 , wherein the particle beam is configured to impinge a target surface with a particle beam flux greater than 6.24×10 16 particles per bunch at the target surface.

23. The apparatus of claim 20 , wherein the particle beam has between 1 and 7,000,000 particles per bunch.

24. The apparatus of claim 20 , wherein the beam buncher and the optical components are configured to adjust a longitudinal spacing between the bunches.

25. The apparatus of claim 20 , wherein the optical components are configured to spatially focus the particle beam.

26. The apparatus of claim 20 , wherein the optical components are configured to direct the particle beam towards a target surface.

27. The apparatus of claim 20 , wherein the optical components include one or more deflection electrodes, one or more magnetic lenses, one or more reflective optics, and/or one or more focusing optics.

28. The apparatus of claim 20 , wherein the particle beam has an energy in a range of 500 keV to 500 MeV.

29. The apparatus of claim 20 , wherein the optical components are configured to direct the particle beam onto a target.

30. The apparatus of claim 29 , wherein the target comprises a military target.

31. The apparatus of claim 29 , wherein the target comprises a portion of the Earth's atmosphere.

32. The apparatus of claim 29 , wherein the target comprises a portion of free space.

33. The apparatus of claim 29 , wherein the optical components are configured to scan the target by a vector scan methodology.

34. The apparatus of claim 29 , wherein the optical components are configured to scan the target by a vector-raster scan methodology.

35. The apparatus of claim 29 , wherein the optical components are configured to scan the target by a raster scan methodology.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2024
From: BENNAHMIAS, MARK JOSEPH; ZANI, MICHAEL JOHN; SCOTT, JEFFREY WINFIELD
To: NEXGEN SEMI HOLDING, INC.
Reel/Frame 067378/0527 →
Continuity (6)
Continuation 17659800 · Apr 19, 2022
Continuation 17222756 · Apr 5, 2021
Continuation 16532368 · Aug 5, 2019
Continuation 12459478 · Jun 30, 2009
Provisional Application 61133604 · Jun 30, 2008
Related Publication 20240112882A1 · Apr 4, 2024