Multi-zone heater
A multi-zone heater capable of heating a wafer mounted on a disc-shaped ceramic substrate includes: a plurality of lift pin holes which are provided in the substrate; an inner zone heater embedded in an inner zone of the ceramic substrate; an outer zone heater embedded in an outer zone outside the inner zone; first and second feed terminals to which opposite ends of the inner zone heater are connected; first and second leads to which opposite ends of the outer zone heater are connected; and third and fourth feed terminals to which the first and second leads are respectively connected, the plurality of lift pin holes, the inner zone heater, and the outer zone heater are arranged to be symmetric with respect to a common axis of symmetry, and the first and second leads are arranged along the axis of symmetry to be symmetric to each other.
1. A multi-zone heater comprising:
a disc-shaped ceramic substrate having one main surface to be a wafer mounting surface, the multi-zone heater being capable of heating a wafer mounted on the one main surface;
a plurality of lift pin holes which are provided in the ceramic substrate and into which lift pins to lift the wafer are insertable;
an inner zone heater embedded in an inner zone of the ceramic substrate and formed of concentric arcs;
an outer zone heater embedded in an outer zone outside the inner zone of the ceramic substrate and formed of concentric ares;
a first feed terminal and a second feed terminal which are arranged in a central portion of the ceramic substrate and to which opposite ends of the inner zone heater are connected;
a first lead and a second lead to which opposite ends of the outer zone heater are connected; and
a third feed terminal and a fourth feed terminal which are arranged in the central portion of the ceramic substrate and to which the first lead and the second lead are respectively connected, wherein
the plurality of lift pin holes, the inner zone heater, and the outer zone heater are arranged to be symmetric with respect to a common axis of symmetry that is along a radial direction of the ceramic substrate, and
the first lead and the second lead are arranged along the axis of symmetry to be symmetric to each other and are also symmetric with respect to the plurality of lift pin holes, and
wherein the inner zone heater includes curved portions curved radially outward toward the plurality of lift pin holes,
wherein the outer zone heater includes curved portions curved radially away from the plurality of lift pin holes, and
wherein the plurality of lift pin holes are arranged between the inner zone heater and the outer zone heater.
2. The multi-zone heater according to claim 1 , wherein
the plurality of lift pin holes are provided along a circle concentric with the ceramic substrate.
3. The multi-zone heater according to claim 2 , wherein
the circle concentric with the ceramic substrate has a diameter that is 46% to 88% of a diameter of the ceramic substrate.
4. The multi-zone heater according to claim 1 , wherein
the inner zone and the outer zone are defined by an imaginary bounding circle concentric with the ceramic substrate, and the bounding circle has a diameter that is 51% to 82% of a diameter of the ceramic substrate.
5. The multi-zone heater according to claim 2 , wherein
the inner zone and the outer zone are defined by an imaginary bounding circle concentric with the ceramic substrate, and the bounding circle has a diameter that is 51% to 82% of a diameter of the ceramic substrate.
6. The multi-zone heater according to claim 3 , wherein
the inner zone and the outer zone are defined by an imaginary bounding circle concentric with the ceramic substrate, and the bounding circle has a diameter that is 51% to 82% of the diameter of the ceramic substrate.
7. The multi-zone heater according to claim 1 , wherein the outer zone heater includes curved portions curved radially outward near the plurality of lift pin holes.