Ceramic susceptor
The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure may include a ceramic plate having a heating element disposed thereon and at least one hole. The heating element may include a plurality of concentric circular patterns, each of the concentric circular patterns may include arc portions extending in a circumferential direction and a transverse portion interconnecting the arc portions, and among the arc portions of the plurality of concentric circular patterns, each of the arc portions, which face each other across the hole, may include, in a portion thereof, a protrusion protruding toward the hole.
1. A ceramic susceptor comprising a ceramic plate having a heating element disposed thereon and at least one hole,
wherein the heating element comprises a plurality of concentric circular patterns,
each of the plurality of the concentric circular patterns comprises arc portions extending in a circumferential direction and a transverse portion interconnecting the arc portions,
the plurality of concentric circular patterns comprise a first arc portion and a second arc portion facing each other with the at least one hole interposed therebetween, the first arc portion comprises a first protrusion protruding toward the at least one hole, and the second arc portion comprises a second protrusion protruding toward the at least one hole, and
the first protrusion and the second protrusion are disposed on a line extending from the center of the ceramic plate toward the center of the at least one hole.
2. The ceramic susceptor of claim 1 , wherein each of the first protrusion and the second protrusion comprises:
a protrusion section; and
a connection section extending toward the at least one hole and connected to either end of the protrusion section.
3. The ceramic susceptor of claim 1 , wherein, among the plurality of concentric circular patterns, concentric circular patterns, which face each other across the at least one hole, comprise a transverse portion interconnecting opposite ends of two arc portions.
4. The ceramic susceptor of claim 2 , wherein the protrusion section is concavely formed in an outward direction of the at least one hole.
5. The ceramic susceptor of claim 3 , wherein the at least one transverse portion interconnecting the opposite ends of the two arc portions is concavely formed in an outward direction of the at least one hole.
6. The ceramic susceptor of claim 1 , wherein the heating element comprises a single heating zone that is connected to a pair of power supply terminals and generates heat.
7. The ceramic susceptor of claim 1 , wherein the heating element comprises multiple heating zones that are independently connected to different power supply terminal pairs for respective predetermined areas to generate heat.
8. The ceramic susceptor of claim 1 , wherein the at least one hole comprises a hole provided for supplying a cooling gas for cooling a substrate on the ceramic plate, a hole provided for lifting operation of a lift pin that is configured to lift the substrate, or a hole provided for mounting a temperature sensor.