IP Library › Granted Patent US 12,336,295
Granted Patent B2
US 12,336,295 · App. 18/355,273 · Granted Jun 17, 2025

Integrated circuit device and method

Inventors: Wei-Ren Chen (Hsinchu, TW); Cheng-Yu Lin (Hsinchu, TW); Hui-Zhong Zhuang (Hsinchu, TW); Yung-Chen Chien (Hsinchu, TW); Jerry Chang Jui Kao (Hsinchu, TW); Huang-Yu Chen (Hsinchu, TW); Chung-Hsing Wang (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H10D89/10G06F30/392G06F30/394H01L23/5226H10D84/0186H10D84/038H10D84/85
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Quick Facts
Patent No.
US 12,336,295
App. No.
18/355,273
Granted
Jun 17, 2025
Kind
B2
Abstract

An integrated circuit (IC) device includes a substrate, at least one active region over the substrate and elongated along a first axis, at least one gate region extending across the at least one active region, and at least one input/output (IO) pattern configured to electrically couple one or more of the at least one active region and the at least one gate region to other circuitry. The at least one IO pattern extends obliquely to the at least one active region or the at least one gate region.

Claims (90)

1. An integrated circuit (IC) device, comprising:

a substrate; and

at least one active region over the substrate and elongated along a first axis;

at least one gate region extending across the at least one active region; and

at least one input/output (IO) pattern configured to electrically couple one or more of the at least one active region and the at least one gate region to other circuitry,

wherein

the at least one IO pattern extends obliquely to the at least one active region or the at least one gate region, and

the at least one active region has edges forming a quadrilateral.

2. The IC device of claim 1 , further comprising:

a metal-zero (M0) layer over the at least one gate region; and

an upper metal layer over the M0 layer,

wherein

the M0 layer comprises at least one M0 conductive pattern electrically coupled to the at least one active region or the at least one gate region, and

the upper metal layer comprises the at least one IO pattern electrically coupled to the at least one M0 conductive pattern.

3. The IC device of claim 2 , wherein

the upper metal layer is a metal-one (M1) layer.

4. The IC device of claim 2 , wherein

the at least one active region comprises first and second active regions,

the first and second active regions extend along the first axis, and are directly adjacent each other along a second axis transverse to the first axis, and

the M0 layer has no more than three rows of M0 conductive patterns over and between the first and second active regions, the rows of M0 conductive patterns extending along the first axis and directly adjacent each other along the second axis.

5. The IC device of claim 2 , wherein

the at least one active region comprises first and second active regions,

the first and second active regions extend along the first axis, and are directly adjacent each other along a second axis transverse to the first axis, and

the M0 layer has

a first row of one or more M0 conductive patterns over the first active region, the first row extending along the first axis, and

a second row of one or more M0 conductive patterns over the second active region, the second row extending along the first axis and directly adjacent the first row along the second axis.

6. The IC device of claim 2 , wherein

the at least one active region comprises first, second and third active regions, the second active region arranged between the first and third active regions,

the IC device further comprises:

first, second and third contact structures over and in electrical contact with corresponding source/drain regions correspondingly in the first, second and third active regions; and

an extended contact structure over and electrically coupled to the first and third contact structures, the extended contact structure extending over the second contact structure without being electrically coupled to the second contact structure, and

the M0 layer is over the first, second and third contact structures, and the extended contact structure.

7. The IC device of claim 1 , further comprising:

at least one dummy gate region,

wherein the at least one IO pattern extends obliquely to and overlaps the at least one dummy gate region.

8. The IC device of claim 1 , wherein

the at least one active region and the at least one gate region configure a plurality of transistors electrically coupled into a circuit having an input and an output,

the at least one IO pattern comprises first and second I/O patterns arranged in a same metal layer of the IC device,

the first I/O pattern is electrically coupled to the input of the circuit,

the second I/O pattern is electrically coupled to the output of the circuit, and

both the first and second I/O pattern extend obliquely to the at least one active region and the at least one gate region.

9. An integrated circuit (IC) device, comprising:

a substrate;

at least one active region over the substrate;

at least one gate region extending across the at least one active region;

a metal-zero (M0) layer over the at least one gate region, the M0 layer comprising at least one M0 conductive pattern electrically coupled to the at least one active region or the at least one gate region; and

an upper metal layer over the M0 layer, the upper metal layer comprising at least one input/output (IO) pattern electrically coupled to the at least one M0 conductive pattern,

wherein the at least one IO pattern extends obliquely to the at least one active region or the at least one gate region.

10. The IC device of claim 9 , wherein

the upper metal layer is a metal-one (M1) layer.

11. The IC device of claim 9 , wherein

the at least one active region comprises first and second active regions,

the first and second active regions extend along a first axis, and are directly adjacent each other along a second axis transverse to the first axis, and

the M0 layer has no more than three rows of M0 conductive patterns over and between the first and second active regions, the rows of M0 conductive patterns extending along the first axis and directly adjacent each other along the second axis.

12. The IC device of claim 9 , wherein

the at least one active region comprises first and second active regions,

the first and second active regions extend along a first axis, and are directly adjacent each other along a second axis transverse to the first axis, and

the M0 layer has

a first row of one or more M0 conductive patterns over the first active region, the first row extending along the first axis, and

a second row of one or more M0 conductive patterns over the second active region, the second row extending along the first axis and directly adjacent the first row along the second axis.

13. The IC device of claim 9 , wherein

the at least one active region comprises first, second and third active regions, the second active region arranged between the first and third active regions,

the IC device further comprises:

first, second and third contact structures over and in electrical contact with corresponding source/drain regions correspondingly in the first, second and third active regions; and

an extended contact structure over and electrically coupled to the first and third contact structures, the extended contact structure extending over the second contact structure without being electrically coupled to the second contact structure, and

the M0 layer is over the first, second and third contact structures, and the extended contact structure.

14. The IC device of claim 9 , further comprising:

at least one dummy gate region,

wherein the at least one IO pattern extends obliquely to and overlaps the at least one dummy gate region.

15. A system, comprising a processor configured to perform:

generating a layout diagram of a cell of an integrated circuit (IC) device, said generating comprising:

arranging a plurality of gate regions across at least one active region, and

arranging a boundary which contains at least a portion of one or more of the at least one active region and the plurality of gate regions,

wherein a first edge of the boundary and a gate region among the plurality of gate regions overlap each other and form therebetween an acute angle; and

storing the generated layout diagram on a non-transitory computer-readable recording medium.

16. The system of claim 15 , wherein

the cell comprises:

a physical cell configured to provide a function other than a logic function, or

a filler cell with no logical functionality, and not connected or routed to other cells in an IC layout diagram of the IC device.

17. The system of claim 15 , wherein

the boundary has a shape of a triangle, a trapezoid, a rhombus, or a hexagon.

18. The system of claim 15 , wherein

the gate region that overlaps the first edge of the boundary is a dummy gate region.

19. The system of claim 15 , wherein

the at least one active region comprises first and second active regions elongated along a first axis, and spaced from each other along a second axis transverse to the first axis, and

the boundary has a shape of a rhombus or a hexagon.

20. The system of claim 15 , wherein

said generating further comprises:

arranging a contact structure over the at least one active region, and between two adjacent gate regions among the plurality of gate regions, and

the first edge of the boundary overlaps the contact structure.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 20, 2023
From: CHEN, WEI-REN; CHENG-YU, CHENG-YU; ZHUANG, HUI-ZHONG; CHIEN, YUNG-CHEN; KAO, JERRY CHANG JUI
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 064327/0646 →
Continuity (2)
Continuation 17313474 · May 6, 2021
Related Publication 20230361105A1 · Nov 9, 2023
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