Silicon carbide ceramic
An object of the present invention is to provide an SiC ceramics having an excellent environmentally resistant coating. An SiC ceramics comprising a metal oxide, the SiC ceramics comprising a surface modification layer containing a silicate, the surface modification layer being derived from a raw material forming the SiC ceramics, which is a matrix.
1. A method for producing silicon carbide ceramics, comprising:
(1) a step of dispersing a raw material for forming silicon carbide, and a metal oxide in a dispersion medium;
(2) a step of sintering the dispersion product obtained in step (1) under an inert gas atmosphere or a reducing atmosphere at a temperature of 1400 to 1890° C.; and
(3) a step of heat-treating the sintered product obtained in step (2) under an oxidation atmosphere at a temperature of 800 to 1700° C. to form a silicon carbide ceramics product comprising a surface modification layer containing a silicate on silicon carbide ceramics as a matrix,
wherein the metal oxide described in step (1) consists of one metal oxide selected from the group consisting of scandium oxide (Sc 2 O 3 ), yttrium oxide (Y 2 O 3 ), erbium oxide (Er 2 O 3 ), ytterbium oxide (Yb 2 O 3 ), and lutetium oxide (Lu 2 O 3 );
wherein the silicate consists of one silicate selected from the group consisting of scandium silicate (Sc 2 Si 2 O 7 ), yttrium silicate (Y 2 SiO 5 ), erbium silicate (ErSiO 5 ), ytterbium silicate (Yb 2 SiO 5 ), ytterbium silicate (Yb 2 Si 2 O 7 ), and lutetium silicate (LuSiO 5 ); and
wherein the surface modification layer comprises 50 wt % or more of the silicate, and
wherein the silicon carbide ceramics product comprises a metal oxide selected from the group consisting of scandium oxide (Sc 2 O 3 ), yttrium oxide (Y 2 O 3 ), erbium oxide (E 2 O 3 ), ytterbium oxide (Yb 2 O 3 ), and lutetium oxide (Lu 2 O 3 ).
2. The method according to claim 1 , wherein step (3) is a step of heat-treating the sintered product obtained in step (2) to form a surface modification layer containing a silicate around the surface of the silicon carbide ceramics as a matrix.