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App. No. 18/409,628 · Confirmation No. 5096

Functionalized Carbon Particle CMP Slurry Dispersion

Inventors: Arthur W. MARTIN, Yi GUO
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Quick Facts
App. No.
18/409,628
Filed
2024-01-10
Pub. No.
US20250223468A1
Examiner
TRAN, BINH X
Art Unit
1713