Semiconductor device and method of manufacturing semiconductor device
In one example, an electronic device includes a semiconductor sensor device having a cavity extending partially inward from one surface to provide a diaphragm adjacent an opposite surface. A barrier is disposed adjacent to the one surface and extends across the cavity, the barrier has membrane with a barrier body and first barrier strands bounded by the barrier body to define first through-holes. The electronic device further comprises one or more of a protrusion pattern disposed adjacent to the barrier structure, which can include a plurality of protrusion portions separated by a plurality of recess portions; one or more conformal membrane layers disposed over the first barrier strands; or second barrier strands disposed on and at least partially overlapping the first barrier strands. The second barrier strands define second through-holes laterally offset from the first through-holes. Other examples and related methods are also disclosed herein.
1. An electronic device, comprising:
a base substrate comprising:
a substrate top side; a substrate bottom side opposite to the substrate top side; a passageway extending through the base substrate from the substrate top side to the substrate bottom side; a first conductive structure; and a dielectric structure;
a sensor device comprising: a sensor top side; a sensor bottom side opposite to the sensor top side; and a cavity extending partially inward from the sensor bottom side; and a barrier attached to the sensor bottom side and extending across the cavity, wherein: the sensor device is coupled to the first conductive structure;
the barrier comprises first barrier strand structures defining first barrier through-holes; and the barrier is attached to the substrate top side so that the first barrier through-holes overlie the passageway and the barrier is interposed between the sensor bottom side and the substrate top side; and one or more of: second barrier strand structures attached to the first barrier strand structures, the second barrier strand structures defining second barrier through-holes that are offset with respect to the first barrier through-holes; a conformal layer over the first barrier strand structures.
2. The electronic device of claim 1 , wherein:
the electronic device comprises the second barrier strand structures but not the conformal layer.
3. The electronic device of claim 1 , wherein:
the electronic device comprises the conformal layer but not the second barrier strand structures.
4. The electronic device of claim 1 , wherein:
the barrier comprises a singulated structure.
5. The electronic device of claim 1 , wherein:
the sensor device comprises a semiconductor die;
the sensor device comprises a sensor lateral side extending between the sensor top side and the sensor bottom side;
the barrier comprises a barrier lateral side; and
the barrier lateral side is coplanar with the sensor lateral side.
6. The electronic device of claim 1 , further comprising:
a cover structure comprising a cover wall and a side wall;
wherein:
the side wall is coupled to the substrate top side.
7. The electronic device of claim 6 , further comprising:
a second conductive structure associated with the cover wall and coupled to the first conductive structure.
8. The electronic device of claim 7 , further comprising:
a third conductive structure associated with the side wall and coupled to the first conductive structure and the second conductive structure.
9. The electronic device of claim 1 , further comprising:
an adhesive,
wherein:
the barrier is fixed to the substrate top side with the adhesive.
10. The electronic device of claim 1 , further comprising:
a stiffener interposed between the barrier and the substrate top side.
11. The electronic device of claim 10 , wherein:
the stiffener comprises one or more protrusion patterns.
12. The electronic device of claim 1 , wherein:
the barrier comprises a polymer film fixed to the sensor bottom side.
13. An electronic device, comprising:
a base substrate comprising:
a substrate top side;
a substrate bottom side opposite to the substrate top side;
a passageway extending through the base substrate from the substrate top side to the substrate bottom side; and
a first conductive structure;
a sensor device comprising:
a sensor top side;
a sensor bottom side opposite to the sensor top side; and
a cavity extending partially inward from the sensor bottom side;
a barrier fixed to the sensor bottom side and extending across the cavity; and
a cover structure comprising a cover wall, a side wall coupled to the cover wall and the substrate top side, a second conductive structure associated with the cover wall;
wherein:
the second conductive structure is coupled to the first conductive structure;
the sensor device is coupled to the first conductive structure;
the barrier comprises first barrier strand structures defining first barrier through-holes; and
the barrier is attached to the substrate top side so that the first barrier through-holes overlie the passageway and the barrier is interposed between the sensor bottom side and the substrate top side.
14. The electronic device of claim 13 , further comprising:
second barrier strand structures attached to the first barrier strand structures, the second barrier strand structures defining second barrier through-holes that are offset with respect to the first barrier through-holes.
15. The electronic device of claim 13 , further comprising:
one or more conformal layers over the first barrier strand structures.
16. The electronic device of claim 13 , further comprising:
a stiffener interposed between the barrier and the substrate top side.
17. The electronic device of claim 13 , wherein:
the barrier comprises a singulated polymer film.
18. An electronic device, comprising:
a first electronic device comprising a first surface and a second surface opposite to the first surface, and a cavity extending partially inward from the second surface to provide a diaphragm adjacent to the first surface; and a barrier coupled to the second surface of the first electronic device, wherein the barrier extends across the cavity and comprises: a first membrane including:
a first barrier body; and first barrier strands bounded by the first barrier body and defining first through-holes; and one or more of: second barrier strands on the first barrier strands and defining second through-holes that are laterally offset from the first through-holes; a conformal membrane layer over the first barrier strands, and
wherein: the barrier includes the conformal membrane layer over the first barrier strands; the first membrane comprises an organic material; the conformal membrane layer comprises a deposited inorganic material; the electronic device further comprises: a base substrate including a dielectric structure, a conductive structure, and a passageway extending through a portion of the base substrate; and the first electronic device is attached to the base substrate adjacent to the passageway.
19. The electronic device of claim 18 , wherein:
the barrier includes the second barrier strands;
the second barrier strands are joined to top sides of the first barrier strands;
the electronic device further comprises:
a base substrate including a dielectric structure, a conductive structure, and a passageway extending through a portion of the base substrate; and
the first electronic device is attached to the base substrate adjacent to the passageway.