RF circuit module and manufacturing method therefor
An RF circuit module includes a module substrate, a first substrate in which a first circuit is implemented, and a second substrate in which a second circuit is implemented. The first circuit includes a control circuit that controls an operation of the second circuit. The second circuit includes a radio-frequency amplifier circuit that amplifies an RF signal. The second substrate is mounted on the first substrate. The first substrate is disposed on the module substrate such that a circuit forming surface faces the module substrate. The first substrate and the second substrate have a circuit-to-circuit connection wire that electrically connects the first circuit and the second circuit without intervening the module substrate.
1. A manufacturing method for an RF circuit module including a module substrate having electrodes for mounting components, a first substrate in which a first circuit including a control circuit is implemented, and a second substrate in which a second circuit including a radio-frequency amplifier circuit controlled by the control circuit is implemented, the manufacturing method comprising:
forming the first circuit and a substrate-to-substrate connection conductor in an elemental semiconductor substrate that is the first substrate;
forming a semiconductor thin film on a compound semiconductor substrate via a release layer, the semiconductor thin film having the second circuit and a substrate-to-substrate connection conductor, the semiconductor thin film being the second substrate;
implementing the second substrate by removing the release layer through etching to release the semiconductor thin film from the compound semiconductor substrate;
implementing a laminated body made up of the first substrate and the second substrate by bonding the second substrate at a predetermined position of the first substrate to connect the substrate-to-substrate connection conductor of the first substrate and the substrate-to-substrate connection conductor of the second substrate;
forming a first substrate-side conductor protrusion connected to the first circuit and a second substrate-side conductor protrusion connected to the second circuit; and
mounting the laminated body on the module substrate by connecting the first substrate-side conductor protrusion and the second substrate-side conductor protrusion to the electrodes of the module substrate.
2. A manufacturing method for an RF circuit module including a module substrate having electrodes for mounting components, a first substrate in which a first circuit including a control circuit is implemented, and a second substrate in which a second circuit including a radio-frequency amplifier circuit controlled by the control circuit is implemented, the manufacturing method comprising:
forming the first circuit in an elemental semiconductor substrate that is the first substrate;
forming a semiconductor thin film on a compound semiconductor substrate via a release layer, the semiconductor thin film having the second circuit, the semiconductor thin film being the second substrate;
implementing the second substrate by removing the release layer through etching to release the semiconductor thin film from the compound semiconductor substrate;
providing a laminated body made up of the first substrate and the second substrate by bonding the second substrate at a predetermined position of the first substrate;
forming a substrate-to-substrate connection conductor that connects the first circuit and the second circuit; and
mounting the laminated body on the module substrate.