Electro acoustic resonator with suppressed transversal gap mode excitation and reduced transversal modes
An electro acoustic resonator is provided. The resonator has a gap short structure (GSS) to electrically short at least an area of the transversal gap to suppress transversal gap mode excitations. The gap short structure may be provided by a conductive stripe in the gap and parallel to or inclined with respect to the bus bar (BB) shorting adjacent IDT fingers. Additional connectors between the stripe and the bus bar may be provided. The connectors may have different pitch or metallization ratio with respect to the ID fingers. The connectors may be offset from the position of the fingers and my be inclined with respect to the bus bars. Multiple parallel stripes in the gap may provide a transversal reflector. By using a gap short structure a further improved transversal mode suppression of piston mode designs can be achieved.
1. An electro acoustic resonator comprising:
a piezoelectric material;
an electrode structure arranged on or above the piezoelectric material, wherein the electrode structure comprises a busbar and a first set of electrode fingers extending from the busbar, the electrode structure further comprising a second set of electrode fingers extending towards the busbar and interdigitated with the first set of electrode fingers; and
a gap structure arranged on or above the piezoelectric material, wherein the gap structure comprises conductor strips positioned within a gap between the busbar and one or more of the second set of electrode fingers, and wherein the conductor strips extend in a direction different than an extension direction of the first set of electrode fingers.
2. The electro acoustic resonator of claim 1 , wherein:
the electrode structure further comprises a second busbar, with the first set of electrode fingers positioned between the busbar and the second busbar; and
another gap structure comprising conductor strips that are positioned in another gap between ends of the first set of electrode fingers and the second busbar.
3. The electro acoustic resonator of claim 1 , wherein each electrode of the first set of electrode fingers comprises a conductor patch at an electrode finger tip.
4. The electro acoustic resonator of claim 3 , wherein each electrode of the second set of electrode fingers comprises a conductor patch at an electrode finger tip and at a corresponding lateral position to the conductor patch at the electrode finger tip of each of the first set of electrode fingers.
5. The electro acoustic resonator of claim 4 , wherein each electrode of the first set of electrode fingers further comprises a conductor patch at a corresponding lateral position to the conductor patch at the electrode finger tip of each of the second set of electrode fingers.
6. The electro acoustic resonator of claim 1 , wherein each electrode of the first set of electrode fingers has a wider portion at a corresponding electrode finger tip.
7. An electro acoustic resonator comprising:
a piezoelectric material;
an electrode structure arranged on or above the piezoelectric material, wherein the electrode structure comprise electrode fingers, a busbar, and a gap between ends of a subset of the electrode fingers and the busbar; and
conductor strips or patches arranged on or above the piezoelectric material, wherein the conductor strips or patches are positioned in the gap.
8. The electro acoustic resonator of claim 7 , wherein the conductor strips or patches extend in a direction different than a direction that the electrode fingers extend from the busbar.
9. The electro acoustic resonator of claim 7 , wherein the conductor strips or patches are perpendicular to the electrode fingers.
10. The electro acoustic resonator of claim 7 , wherein the conductor strips or patches comprise conductor strips parallel to the busbar.
11. The electro acoustic resonator of claim 7 , wherein the electrode fingers each comprise a conductor patch at an end opposite from the busbar.
12. The electro acoustic resonator of claim 7 , wherein the subset of the electrode fingers is interleaved with a second subset of the electrode fingers.
13. The electro acoustic resonator of claim 7 , wherein the electrode fingers each comprise a conductor patch at an electrode finger tip and a conductor patch at a corresponding lateral position to the conductor patch at the electrode finger tip of adjacent interleaved electrode fingers.
14. The electro acoustic resonator of claim 7 , wherein each electrode of the electrode fingers has a wider portion at a corresponding electrode finger tip.
15. An electro acoustic resonator comprising:
a piezoelectric material;
an electrode structure arranged on or above the piezoelectric material, wherein the electrode structure comprises two opposite busbars, electrode fingers alternately connected to one busbar of the two opposite busbars, and gaps between electrode finger ends and a respective opposite busbar; and
a gap structure arranged on or above the piezoelectric material, wherein the gap structure comprises multiple parallel strips positioned in the gaps between the electrode finger ends and the respective opposite busbar, and wherein the multiple parallel strips each extend in a first direction that is different than a second direction in which the electrode fingers extend.
16. The electro acoustic resonator of claim 15 , wherein the first direction is parallel to the two opposite busbars.
17. The electro acoustic resonator of claim 15 , wherein the electrode fingers comprise conductor patches at the electrode finger ends.
18. The electro acoustic resonator of claim 17 , wherein the electrode fingers further comprise conductor patches at corresponding lateral positions relative to the conductor patches at the electrode finger ends of adjacent electrode fingers.
19. The electro acoustic resonator of claim 15 , wherein each electrode of the electrode fingers has a wider portion at a corresponding electrode finger tip.
20. A thin-film SAW electro acoustic resonator with suppressed transversal gap mode excitation and reduced transversal modes, comprising:
a piezoelectric material provided as a thin-film;
an electrode structure arranged on or above the piezoelectric material;
a gap short structure arranged on or above the piezoelectric material,
wherein:
the electrode structure has two opposite busbars, two transversal gaps and electrode fingers,
each electrode finger is alternately electrically connected to one of the busbars,
the transversal gaps are arranged between an end of electrode fingers and the respective opposite busbar,
the gap short structure has conductor strips and is arranged inside the transversal gaps, wherein the conductor strips comprise a transversal gap short reflector and wherein the conductor strips extend in a direction different than an extension direction of the electrode fingers, wherein the gap short structure is structured to reduce electric fields within gaps that provides reduction of transversal gap mode excitations.
21. The thin-film SAW electro acoustic resonator of claim 20 , wherein a pitch and a width of the conductor strips and a distance between tips of the electrode fingers and a neighboring conductor strip is defined in units of a longitudinal electrode finger pitch.
22. The thin-film SAW electro acoustic resonator of claim 20 , wherein each electrode finger comprises a conductor patch at an electrode finger tip.
23. The thin-film SAW electro acoustic resonator of claim 22 , wherein each electrode finger further comprises a conductor patch at a corresponding lateral position to the conductor patch at the electrode finger tip of each of a second set of electrode fingers.