Semiconductor substrate bonding tool and methods of operation
A bonding tool includes a gas supply line that may extend directly between valves associated with one or more gas supply tanks and a processing chamber such that gas supply line is uninterrupted without any intervening valves or other types of structures that might otherwise cause a pressure buildup in the gas supply line between the processing chamber and the valves associated with the one or more gas supply tanks. The pressure in the gas supply line may be maintained at or near the pressure in the processing chamber so that gas provided to the processing chamber through the gas supply line does not cause a pressure imbalance in the processing chamber, which might otherwise cause early or premature contact between semiconductor substrates that are to be bonded in the processing chamber.
1 . A method, comprising:
positioning a first semiconductor substrate and a second semiconductor substrate in a processing chamber of a bonding tool;
providing a bonding gas to the processing chamber at a first pressure through a gas supply system of the bonding tool to purge the processing chamber;
pressurizing the processing chamber to a second pressure; and
providing the bonding gas to the processing chamber at a third pressure through the gas supply system to maintain the processing chamber approximately at the second pressure.
2 . The method of claim 1 , wherein the second pressure is less than the first pressure.
3 . The method of claim 1 , wherein a pressure differential between the second pressure and the third pressure is less than approximately 5 mbar.
4 . The method of claim 1 , wherein the third pressure is less than approximately 5 mbar.
5 . The method of claim 1 , wherein providing the bonding gas to the processing chamber at the first pressure through the gas supply system comprises:
providing the bonding gas to the processing chamber at the first pressure through a first valve of the gas supply system and through a gas supply line that extends directly from the first valve to the processing chamber without an intervening valve.
6 . The method of claim 5 , wherein providing the bonding gas to the processing chamber at the third pressure through the gas supply system to maintain the processing chamber approximately at the second pressure comprises:
providing the bonding gas to the processing chamber at the third pressure through a second valve of the gas supply system and through the gas supply line that extends directly from the second valve to the processing chamber without an intervening valve.
7 . The method of claim 6 , wherein the first valve comprises a binary flow valve; and
wherein the second valve comprises a variable flow valve.
8 . The method of claim 1 , further comprising:
bonding the first semiconductor substrate and the second semiconductor substrate while providing the bonding gas to the processing chamber at the third pressure through the gas supply system to maintain the processing chamber approximately at the second pressure.
9 . A method, comprising:
positioning a first semiconductor substrate over a second semiconductor substrate in a processing chamber, wherein the first semiconductor substrate and the second semiconductor substrate are spaced from each other;
providing a bonding gas to the processing chamber at a first pressure to purge the processing chamber;
pressurizing the processing chamber to a second pressure; and
providing the bonding gas to the processing chamber at a third pressure to maintain the processing chamber approximately at the second pressure.
10 . The method of claim 9 , wherein positioning the first semiconductor substrate comprises:
placing the second semiconductor substrate on a bonding chuck; and
placing the first semiconductor substrate on a plurality of support members such that the first semiconductor substrate is suspended over the second semiconductor substrate.
11 . The method of claim 9 , wherein at least one of:
the bonding gas is provided from a bonding gas supply tank, or
the bonding gas is provided via a first valve.
12 . The method of claim 11 , wherein providing the bonding gas to the processing chamber comprises:
opening the first valve to permit the bonding gas to flow from the bonding gas supply tank, through the valve, and to the processing chamber at the first pressure.
13 . The method of claim 12 , further comprising:
closing the first valve to block the bonding gas from flowing from the bonding gas supply tank,
wherein the processing chamber is pressurized to the second pressure after closing the first valve.
14 . The method of claim 9 , wherein pressurizing the processing chamber to the second pressure comprises:
activating a pump to pressurize the processing chamber to the second pressure.
15 . The method of claim 9 , wherein the second pressure corresponds to a bonding pressure for bonding the first semiconductor substrate and the second semiconductor substrate.
16 . A method, comprising:
positioning a first semiconductor substrate over a second semiconductor substrate in a processing chamber, wherein the first semiconductor substrate and the second semiconductor substrate are spaced from each other;
providing a bonding gas to the processing chamber at a first pressure;
pressurizing the processing chamber to a second pressure that bonds the first semiconductor substrate and the second semiconductor substrate together; and
providing the bonding gas to the processing chamber at a third pressure to maintain the processing chamber approximately at the second pressure.
17 . The method of claim 16 , wherein the bonding gas is provided to the processing chamber at the first pressure via a first valve.
18 . The method of claim 17 , wherein the bonding gas is provided to the processing chamber at the third pressure via a second valve.
19 . The method of claim 18 , wherein the bonding gas is provided to the processing chamber at the first pressure from a first bonding gas supply tank, and wherein the bonding gas is provided to the processing chamber at the third pressure from a second bonding gas supply tank different from the first bonding gas supply tank.
20 . The method of claim 19 , further comprising:
activating, after pressurizing the processing chamber to the second pressure and while providing the bonding gas to the processing chamber at the third pressure, a pump to remove the bonding gas from the processing chamber.