Modules with integrated circuits and devices
An example of a pixel module comprises a module substrate having light emitters disposed on a light-emitter surface and a controller disposed on a controller surface opposed to the light-emitter surface. At least one module electrode is electrically connected to the controller and at least one module electrode is electrically connected to each light emitter. An example of a pixel-module wafer comprises a module source wafer comprising sacrificial portions and module anchors, each sacrificial portion laterally separated from an adjacent sacrificial portion by a module anchor and a pixel module disposed entirely over each sacrificial portion. At least one module tether physically connects each of the pixel modules to at least one of the module anchors. An example of a pixel-module display comprises a display substrate, pixel modules disposed on the display substrate and display electrodes disposed on the display substrate, each display electrode electrically connected to a module electrode.
1 . A pixel-module wafer, comprising:
a semiconductor substrate having a native side and an opposing device side;
a plurality of controllers formed on or in the native side of the semiconductor substrate;
a plurality of electrode vias extending into the semiconductor substrate, each electrode via of the plurality of electrode vias comprising an electrode, wherein for each controller of the plurality of controllers, the controller is electrically connected to the electrode of a corresponding electrode via of the plurality of electrode vias; and
a plurality of etch vias extending into the semiconductor substrate forming a wall disposed at least partially around each controller and corresponding etch via,
wherein each controller of the plurality of controllers, the corresponding electrode via, and a portion of the semiconductor substrate is comprised in a pixel module at least partially surrounded by a corresponding etch via of the plurality of etch vias.
2 . The pixel-module wafer of claim 1 , wherein the pixel module is a bare, unpackaged pixel module and comprises a broken or separated tether.
3 . The pixel-module wafer of claim 1 , wherein the pixel module comprises a light emitting diode (LED) and the controller is disposed between the LED and the portion of the semiconductor substrate.
4 . The pixel-module wafer of claim 1 , wherein the pixel module comprises a light emitting diode (LED) and the LED is disposed between the controller and the portion of the semiconductor substrate and the portion of the semiconductor substrate is at least 20% transparent to light emitted by the LED, and the LED is disposed to emit light through the portion of the semiconductor substrate.
5 . The pixel-module wafer of claim 1 , wherein the pixel module is unpackaged.
6 . The pixel-module wafer of claim 1 , wherein the plurality of electrode vias and the plurality of etch vias extend through the semiconductor substrate.
7 . The pixel-module wafer of claim 1 , wherein the pixel module comprises a connection post extending away from the semiconductor substrate and electrically connected to the electrode.
8 . The pixel-module wafer of claim 1 , comprising a patterned sacrificial layer adjacent to the native side, the patterned sacrificial layer comprising sacrificial portions, wherein the pixel module and at least a portion of the corresponding etch via are disposed over a corresponding sacrificial portion of the sacrificial portions.
9 . The pixel-module wafer of claim 8 , wherein the plurality of etch vias are filled with via sacrificial material.
10 . The pixel-module wafer of claim 8 , comprising a bonding layer disposed on a side of the patterned sacrificial layer opposite the semiconductor substrate and a carrier wafer bonded to the bonding layer on a side of the bonding layer opposite the patterned sacrificial layer.
11 . The pixel-module wafer of claim 10 , wherein the pixel module comprises a light-emitting diode (LED) disposed on the device side of the portion of the semiconductor substrate, wherein the LED is non-native to the semiconductor substrate and is electrically connected to the electrode of the electrode via that is connected to the controller of the pixel module.
12 . The pixel-module wafer of claim 11 , wherein the pixel module comprises (i) a second plurality of electrode vias each comprising an electrode and extending into the semiconductor substrate and (ii) a plurality of LEDs, wherein the electrode of each of the second plurality of electrode vias is electrically connected to the controller and each LED of the plurality of LEDs is disposed on the device side of the semiconductor substrate and electrically connected to an electrode of the second plurality of electrode vias.
13 . The pixel-module wafer of claim 11 , comprising an encapsulation layer disposed over the LED.
14 . The pixel-module wafer of claim 13 , wherein the encapsulation layer is patterned to expose at least a portion of each of the plurality of etch vias and to extend over and beyond a portion of each of the plurality of etch vias.
15 . A pixel-module wafer, comprising:
a plurality of pixel modules, each comprising a respective controller formed on or in a native side of a respective semiconductor substrate and a respective electrode via extending through the respective semiconductor substrate, the respective electrode via comprising a respective electrode, the respective electrode electrically connected to the respective controller; and
a respective etch via disposed around the respective controller of each of the plurality of pixel modules.
16 . The pixel-module wafer of claim 15 , wherein the respective electrode via and the respective etch via extend through the respective semiconductor substrate, and each of the plurality of pixel modules comprises one or more non-native light-emitting diodes (LEDs) disposed on a device side of the semiconductor substrate opposite the native side and electrically connected to the respective controller.
17 . A pixel-module wafer, comprising:
a pixel module comprising:
a semiconductor substrate having a native side and an opposing device side,
a controller formed on or in the native side of the semiconductor substrate,
a light-emitting diode (LED) disposed on the device side of the semiconductor substrate, wherein the LED is non-native to the semiconductor substrate, and
an electrode via comprising an electrode extending into the semiconductor substrate, the electrode electrically connected to the controller and to the LED; and
an unfilled etch via extending into the semiconductor substrate forming a wall disposed at least partially around the controller.
18 . The pixel-module wafer of claim 17 , comprising a patterned encapsulation layer disposed over the LED, wherein the encapsulation layer is patterned such that at least a portion of the etch via is exposed and the encapsulation layer extends over and beyond a portion of the etch via.
19 . The pixel-module wafer of claim 18 , wherein the encapsulation layer extending over and beyond the portion of the etch via forms a tether.
20 . The pixel-module wafer of claim 18 , comprising:
a bonding layer, wherein the pixel module is suspended over the bonding layer by the patterned encapsulation layer such that a gap is defined between the pixel module and the bonding layer, and a carrier wafer bonded to the bonding layer on a side of the bonding layer opposite the pixel module.