Integration of semiconductor device assemblies with thermal dissipation mechanisms
In a general aspect, an electronic device assembly can include a semiconductor device assembly including a ceramic substrate; a patterned metal layer disposed on a first surface of the ceramic substrate; and a semiconductor die disposed on the patterned metal layer. The electronic device assembly can also include a thermal dissipation appliance. Ceramic material of a second surface of the ceramic substrate can be direct-bonded to a surface of the thermal dissipation appliance. The second surface of the ceramic substrate can be opposite the first surface of the ceramic substrate.
1. A method for producing an electronic device assembly, the method comprising:
coupling a semiconductor die with a patterned metal layer of a ceramic substrate, the patterned metal layer being disposed on a first surface of the ceramic substrate; and
direct-bonding a second surface of the ceramic substrate to a plurality of cooling fins of a water jacket, the second surface of the ceramic substrate being opposite the first surface and defining a portion of a fluidic channel of the water jacket, the plurality of cooling fins being disposed within the fluidic channel of the water jacket.
2. The method of claim 1 , wherein direct-bonding the second surface of the ceramic substrate to the plurality of cooling fins includes diffusion-bonding the second surface of the ceramic substrate with the plurality of cooling fins.
3. The method of claim 1 , wherein direct-bonding the second surface of the ceramic substrate to the plurality of cooling fins includes brazing the second surface of the ceramic substrate with the plurality of cooling fins.
4. The method of claim 1 , further comprising encapsulating the semiconductor die and the ceramic substrate in a molding compound.
5. The method of claim 4 , further comprising coupling a cover with the molding compound.
6. The method of claim 5 , electrically coupling at least one signal pin with the ceramic substrate, the at least one signal pin extending through the molding compound and the cover.
7. The method of claim 1 , wherein the water jacket includes a recess, the semiconductor die and the ceramic substrate being disposed in the recess.
8. The method of claim 7 , further comprising:
encapsulating the semiconductor die and the ceramic substrate in a molding compound;
coupling a cover with the molding compound, the molding compound and the cover being disposed in the recess; and
coupling at least one signal pin with the ceramic substrate, the at least one signal pin extending through the molding compound and the cover.
9. A method for producing an electronic device assembly, the method comprising:
coupling a first semiconductor die with a metal layer disposed on a first surface of a first ceramic substrate;
coupling a second semiconductor die with a metal layer disposed on a first surface of a second ceramic substrate;
direct-bonding a second surface of the first ceramic substrate to a plurality of cooling fins of a water jacket, the second surface of the first ceramic substrate being opposite the first surface of the first ceramic substrate and defining a portion of a fluidic channel of the water jacket, the plurality of cooling fins being disposed within the fluidic channel of the water jacket; and
direct-bonding a second surface of the second ceramic substrate to the water jacket, the second surface of the second ceramic substrate being opposite the first surface of the second ceramic substrate.
10. The method of claim 9 , wherein direct-bonding the first ceramic substrate and the second ceramic substrate to the water jacket includes one of diffusion-bonding or brazing the first ceramic substrate and the second ceramic substrate to the water jacket.
11. The method of claim 9 , wherein:
the plurality of cooling fins is a first plurality of cooling fins of the water jacket;
the portion of the fluidic channel is a first portion of the fluidic channel; and
direct-bonding the second ceramic substrate to the water jacket includes direct-bonding the second surface of the second ceramic substrate to a second plurality of cooling fins of the water jacket, the second ceramic substrate defining a second portion of a fluidic channel of the water jacket.
12. The method of claim 9 , further comprising:
encapsulating the first semiconductor die, the first ceramic substrate, the second semiconductor die, and the second ceramic substrate in a molding compound.
13. The method of claim 12 , further comprising:
electrically coupling a first signal pin with the first ceramic substrate, the first signal pin extending through a first portion of the molding compound encapsulating the first semiconductor die and the first ceramic substrate; and
electrically coupling a second signal pin with the second ceramic substrate, the second signal pin extending through a second portion of the molding compound encapsulating the second semiconductor die and the second ceramic substrate.
14. The method of claim 13 , further comprising coupling a first cover with the first portion of the molding compound, the first signal pin extending through the first cover.
15. The method of claim 12 , wherein:
a first portion of the molding compound, the first semiconductor die, and the first ceramic substrate are disposed in a first recess of the water jacket; and
a second portion of the molding compound, the second semiconductor die, and the second ceramic substrate are disposed in a second recess of the water jacket.
16. A method for producing an electronic device assembly, the method comprising:
coupling a semiconductor die with a first metal layer disposed on a first surface of a ceramic substrate; and
diffusion-bonding a second metal layer disposed on a second surface of the ceramic substrate to a plurality of cooling fins disposed within a fluidic channel of a water jacket, the second surface of the ceramic substrate being opposite the first surface of the ceramic substrate, at least one of the second metal layer or the second surface of the ceramic substrate defining a portion of a fluidic channel of the water jacket.
17. The method of claim 16 , wherein diffusion-bonding the second metal layer to the plurality of cooling fins includes diffusion-bonding the second metal layer to the plurality of cooling fins via a metal plate.
18. The method of claim 16 , further comprising encapsulating the semiconductor die and the ceramic substrate in a molding compound.
19. The method of claim 18 , wherein the semiconductor die, the ceramic substrate and the molding compound are disposed in a recess of the water jacket.
20. The method of claim 18 , further comprising:
coupling a cover with the molding compound; and
electrically coupling at least one signal pin with the ceramic substrate, the at least one signal pin extending through the molding compound and the cover.