Detection device and display device
According to an aspect, a detection device includes: an insulating substrate; a plurality of photoelectric conversion elements that are arranged in a detection area of the insulating substrate, and each of which is configured to receive light and output a signal corresponding to the received light; a first switching element that is provided for each photoelectric conversion element and includes a first semiconductor, a source electrode, and a drain electrode; and an inorganic insulating layer provided between the photoelectric conversion element and the first switching element in a normal direction of the insulating substrate.
1. A detection device comprising:
an insulating substrate;
a plurality of photoelectric conversion elements that are arranged in a detection area of the insulating substrate, and each of which is configured to receive light and output a signal corresponding to the received light;
a first switching element that is provided for each photoelectric conversion element and comprises a first semiconductor, a source electrode, and a drain electrode;
a plurality of gate lines coupled to the first switching elements and extending in a first direction;
a plurality of signal lines coupled to the first switching elements and intersecting the first direction; and
an inorganic insulating layer provided between the photoelectric conversion element and the first switching element in a normal direction of the insulating substrate,
wherein
the first switching element comprises a first gate electrode and a second gate electrode provided with the first semiconductor interposed therebetween in the normal direction of the insulating substrate, and
the first gate electrode is electrically coupled to the second gate electrode in an area surrounded by the gate lines and the signal lines.
2. The detection device according to claim 1 , further comprising a planarizing film that covers the first switching element, wherein the inorganic insulating layer is provided between the planarizing film and the photoelectric conversion element in the normal direction of the insulating substrate.
3. The detection device according to claim 1 , further comprising a planarizing film that covers the first switching element, wherein the inorganic insulating layer is provided between the planarizing film and the first switching element in the normal direction of the insulating substrate.
4. The detection device according to claim 3 , wherein
the source electrode and the drain electrode are provided above the first semiconductor with an interlayer insulating layer interposed between the source and drain electrodes and the first semiconductor, and each of the source electrode and the drain electrode is electrically coupled to the first semiconductor through a contact hole provided in the interlayer insulating layer, and
the inorganic insulating layer covers the source electrode and the drain electrode.
5. The detection device according to claim 1 , further comprising:
a gate line drive circuit that comprises a second switching element comprising a second semiconductor, is provided in a peripheral area outside the detection area, and is configured to drive the gate lines, wherein
the inorganic insulating layer is provided over an area overlapping the second switching element.
6. The detection device according to claim 5 , wherein
the first semiconductor is an oxide semiconductor, and
the second semiconductor is of polysilicon.
7. The detection device according to claim 1 , wherein
the inorganic insulating layer comprises a first inorganic insulating layer and a second inorganic insulating layer,
the detection device further comprises a planarizing film that covers the first switching element, and
the first inorganic insulating layer is provided between the planarizing film and the photoelectric conversion element, and the second inorganic insulating layer is provided between the planarizing film and the first switching element, in the normal direction of the insulating substrate.
8. The detection device according to claim 7 , wherein
the source electrode and the drain electrode are provided above the first semiconductor with an interlayer insulating layer interposed between the source and drain electrodes and the first semiconductor, and each of the source electrode and the drain electrode is electrically coupled to the first semiconductor through a contact hole provided in the interlayer insulating layer, and
the second inorganic insulating layer covers the source electrode and the drain electrode.
9. A detection device comprising:
an insulating substrate;
a plurality of gate lines extending in a first direction and arranged in a second direction crossing the first direction, above the insulating substrate;
a plurality of signal lines extending in the second direction and arranged in the first direction;
a plurality of photoelectric conversion elements that are arranged in an area of a detection area of the insulating substrate, the area being surrounded by the gate lines and the signal lines; and
a plurality of first switching elements each provided for each photoelectric conversion element,
wherein
each of the first switching elements comprises a first semiconductor, a first gate electrode, and a second gate electrode, the first gate electrode and the second gate electrode being provided with the first semiconductor interposed therebetween in the normal direction of the insulating substrate,
a plurality of power supply signal lines extending in the second direction and overlapping the signal lines, supply power signals to the photoelectric conversion elements,
each of the photoelectric conversion elements includes a lower electrode disposed at an insulating substrate side and an upper electrode disposed to an opposite side of the lower electrode,
the upper electrode is coupled to the power supply signal line through a coupling wire, and
the photoelectric conversion elements arranged in the second direction are coupled to a common one of the power supply signal lines.
10. The detection device according to claim 9 , wherein
the first gate electrode and the second gate electrode are coupled electrically to one gate line corresponding to the gate lines.
11. The detection device according to claim 9 , further comprising a planarizing film and an inorganic insulating layer that cover the first switching element, wherein the inorganic insulating layer is provided between the planarizing film and the photoelectric conversion element in the normal direction of the insulating substrate.
12. The detection device according to claim 9 , further comprising a planarizing film and the inorganic insulating layer that cover the first switching element, wherein the inorganic insulating layer is provided between the planarizing film and the first switching element in the normal direction of the insulating substrate.
13. The detection device according to claim 12 , wherein
each of the first switching elements has the source electrode and the drain electrode that are electrically coupled to the first semiconductor,
the source electrode and the drain electrode are provided above the first semiconductor with an interlayer insulating layer interposed between the source and drain electrodes and the first semiconductor,
each of the source electrode and the drain electrode is electrically coupled to the first semiconductor through a contact hole provided in the interlayer insulating layer, and
the inorganic insulating layer covers the source electrode and the drain electrode.
14. The detection device according to claim 11 , wherein
a second switching element comprising a second semiconductor, is provided in a peripheral area outside the detection area, and is configured to drive the gate lines, wherein
the inorganic insulating layer is provided over an area overlapping the second switching element.
15. The detection device according to claim 14 , wherein
the first semiconductor is an oxide semiconductor, and
the second semiconductor is of polysilicon.
16. The detection device according to claim 9 , wherein
the detection device further comprises a first inorganic insulating layer, the second inorganic insulating layer, and a planarizing film that covers the first switching element, and
the first inorganic insulating layer is provided between the planarizing film and the photoelectric conversion element, and the second inorganic insulating layer is provided between the planarizing film and the first switching element, in the normal direction of the insulating substrate.
17. The detection device according to claim 16 , wherein
each of the first switching elements has a source electrode and a drain electrode that are electrically coupled to the first semiconductor,
the source electrode and the drain electrode are provided above the first semiconductor with an interlayer insulating layer interposed between the source and drain electrodes and the first semiconductor,
each of the source electrode and the drain electrode is electrically coupled to the first semiconductor through a contact hole provided in the interlayer insulating layer, and
the second inorganic insulating layer covers the source electrode and the drain electrode.