Ceramic susceptor having hybrid coating
A ceramic susceptor is disclosed, which not only has excellent volumetric resistance at high temperatures and thermal conductivity at room temperature compared to conventional ceramic susceptors, but also has excellent plasma resistance without peeling of the coating layer even in high temperature environments, and thus has the effect of reducing particles.
1 . A ceramic susceptor comprising a ceramic plate layer; and a coating layer located on the ceramic plate layer,
wherein the ceramic plate layer contains alumina (Al 2 O 3 ); and aluminum nitride (AlN) and does not contain an aluminum oxynitride phase (AlON phase), and comprises a reaction layer formed at an interface between the ceramic plate layer and the coating layer,
wherein a content of the alumina is in excess of 68% by weight and less than 95% by weight based on a total weight of the ceramic plate layer,
a content of the aluminum nitride is more than 5% by weight and less than 32% by weight based on the total weight of the ceramic plate layer, and
wherein the ceramic susceptor has a volumetric resistance rate of 1.0E+10 to 1.0E+13 Ω·cm at 500° C. and a thermal conductivity of 30 to 60 W/m·k at room temperature.
2 . The ceramic susceptor according to claim 1 , wherein the coating layer contains one or more of Y 2 O 3 , YF 3 , YOF, YAG, YAS, YAM and YAP, and the reaction layer contains one or more of YAG, YAM and YAP.
3 . The ceramic susceptor according to claim 1 , wherein the coating layer is formed on the ceramic plate layer by hot pressing, and the reaction layer is formed by reaction and sintering of components contained in the ceramic plate layer and the coating layer.
4 . The ceramic susceptor according to claim 1 , wherein the coating layer includes a first coating layer located on the ceramic plate layer; a second coating layer located on the first coating layer; and a reaction layer formed at the interface between the first coating layer and the ceramic plate layer, wherein the first coating layer and the second coating layer contain one or more of Y 2 O 3 , YF 3 , YOF, YAG, YAS, YAM and YAP, and the reaction layer contains one or more of YAG, YAM and YAP.
5 . The ceramic susceptor according to claim 4 , wherein the first coating layer is formed on the ceramic plate layer by hot pressing,
the second coating layer is formed on the first coating layer by sputtering, and
the reaction layer is formed by reactive sintering of components contained in the ceramic plate layer and the first coating layer.
6 . The ceramic susceptor according to claim 1 , wherein the ceramic plate layer further contains any one or more dopant of magnesium oxide (MgO), yttria (Y 2 O 3 ), graphene, and rare earth complex oxides.
7 . The ceramic susceptor according to claim 6 , wherein the dopant is contained in an amount of 0.05 to 2 parts by weight, based on a total weight of 100 parts by weight of the alumina and aluminum nitride.
8 . The ceramic susceptor according to claim 6 , wherein the dopant contains magnesium oxide and graphene, and
the magnesium oxide is contained in an amount of 0.05 to 0.5 parts by weight, and the graphene is contained in an amount of 0.05 to 0.5 parts by weight, based on a total weight of 100 parts by weight of the alumina and aluminum nitride.
9 . The ceramic susceptor according to claim 6 , wherein the dopant contains magnesium oxide, graphene, and yttria, and
the magnesium oxide is contained in an amount of 0.05 to 0.5 parts by weight, the graphene is contained in an amount of 0.05 to 0.5 parts by weight, and the yttria is contained in an amount of 0.05 to 0.5 parts by weight, based on a total weight of 100 parts by weight of the alumina and aluminum nitride.
10 . The ceramic susceptor according to claim 6 , wherein the dopant contains magnesium oxide, graphene, yttria, and rare earth complex oxides, and
the magnesium oxide is contained in an amount of 0.05 to 0.5 parts by weight, the graphene is contained in an amount of 0.05 to 0.5 parts by weight, the yttria is contained in an amount of 0.05 to 0.5 parts by weight, and the rare earth complex oxides is contained in an amount of 0.05 to 0.5 parts by weight, based on a total weight of 100 parts by weight of the alumina and aluminum nitride.
11 . The ceramic susceptor according to claim 6 , wherein the ceramic plate layer has a volumetric resistance rate of 1.0E+10 to 1.0E+13Ω·cm at 500° C. and a thermal conductivity of 40 to 60 W/m·k at room temperature.