Semiconductor substrate and manufacturing method thereof
View Patent ↗A semiconductor substrate includes a first structure and a second structure. The first structure includes a circuit layer and a vertical conductive connector. The second structure includes a glass layer and an adhesive layer. The vertical conductive connector is landing on the circuit layer. The glass layer includes a through hole bigger than the vertical conductive connector. The vertical conductive connector of the first structure is assembled in the through hole of the second structure and electrically connected to the circuit layer. The adhesive layer is bonded between the glass layer and the circuit layer. A manufacturing method of a semiconductor substrate is also provided.
1. A semiconductor substrate, comprising:
a first structure, comprising:
a circuit layer; and
a vertical conductive connector landing on the circuit layer; and
a second structure, comprising:
a glass layer comprising a through hole bigger than the vertical conductive connector, wherein the vertical conductive connector of the first structure is assembled in the through hole of the second structure and electrically connected to the circuit layer, the vertical conductive connector extended in the through hole has straight vertical sidewalls, and the vertical conductive connector extended outside the through hole has taper-down shape sidewalls; and
an adhesive layer bonded between the glass layer and the circuit layer.
2. The semiconductor substrate according to claim 1 , wherein the through hole exposes a top surface of the adhesive layer.
3. The semiconductor substrate according to claim 1 , further comprising a third structure having another one circuit layer and a surface treatment layer, wherein the second structure is disposed between the first structure and the third structure, and the surface treatment layer is disposed over the third structure.
4. The semiconductor substrate according to claim 3 , vias of the circuit layer of the first structure and vias of another one circuit layer of the third structure with taper down shape away from the glass layer.
5. The semiconductor substrate according to claim 3 , a pitch of an outer layer of the third structure is finer than a pitch of an outer layer of the first structure.
6. The semiconductor substrate according to claim 1 , wherein a size of the vertical conductive connector is smaller than a size of the through hole, such that a gap is located between the vertical conductive connector and the glass layer.
7. The semiconductor substrate according to claim 1 , further comprising: a buffer layer located between the vertical conductive connector and the through hole.
8. The semiconductor substrate according to claim 7 , wherein materials of the buffer layer comprise hole plugging material.
9. The semiconductor substrate according to claim 7 , wherein the through hole is filled up with the vertical conductive connector and the buffer layer.
10. The semiconductor substrate according to claim 7 , wherein sidewalls of the vertical conductive connector are covered by the buffer layer, the adhesive layer, and a dielectric layer of the circuit layer.
11. The semiconductor substrate according to claim 7 , wherein the vertical conductive connector is surrounded by the buffer layer.
12. The semiconductor substrate according to claim 11 , wherein a bottom part of the vertical conductive connector is surrounded by the adhesive layer.
13. The semiconductor substrate according to claim 7 , wherein a top surface of the vertical conductive connector, a top surface of the buffer layer, and a top surface of the glass layer are coplanar.
14. The semiconductor substrate according to claim 1 , wherein the adhesive layer has a buffer stress function.
15. The semiconductor substrate according to claim 1 , further comprising: a pad electrically connected to the circuit layer through the vertical conductive connector, wherein the pad is directly in electrical contact with the vertical conductive connector and covers the through hole and parts of a top surface of the glass layer.
16. The semiconductor substrate according to claim 1 , further comprising: a via electrically connected to the circuit layer through the vertical conductive connector, wherein the via is directly in contact with the vertical conductive connector and the glass layer physically separated from the vertical conductive connector.
17. The semiconductor substrate according to claim 1 , further comprising an extra connector layer having an outer ring surface and located on the through hole.
18. The semiconductor substrate according to claim 17 , wherein the extra connector layer is located beside the vertical conductive connector, and the extra connector layer is connected to ground or delivers a signal.
19. The semiconductor substrate according to claim 17 , further comprising: a group of vias electrically connected to the circuit layer through the vertical conductive connector, wherein the vias is directly in contact with the vertical conductive connector or the extra connector layer.
20. The semiconductor substrate according to claim 17 , wherein the outer ring surface and the vertical conductive connectors acts as a capacitor with a dielectric constant higher than 10.