METHOD FOR MANUFACTURING MULTILAYER SUBSTRATE
A layered body is manufactured by etching a first foil constituting a three-layer metal foil to form a first metal layer shaped like a pattern, stacking a first insulating layer so as to bury the first metal layer, forming a first via as a plated via, forming a second metal layer shaped like a pattern on the first insulating layer, stacking a second insulating layer so as to bury the second metal layer, removing a second foil and a third foil constituting the three-layer metal foil, stacking a third insulating layer and a resin film on the second insulating layer, and providing a second via as a paste via to the second insulating layer, and a multilayer substrate is obtained by stacking a plurality of layered bodies.
1 . A method for manufacturing a multilayer substrate, the method comprising:
manufacturing a layered body including
etching a first foil constituting a three-layer metal foil to form a first metal layer which is shaped like a pattern and is formed of the first foil,
stacking a first insulating layer on the first metal layer so as to bury the first metal layer,
stacking a metal layer shaped like a flat plate on the first insulating layer,
forming a first through hole which penetrates the metal layer shaped like a flat plate and the first insulating layer and reaches the first metal layer,
applying filled plating to the first through hole to form a first via as a plated via,
etching the metal layer shaped like a flat plate to form a second metal layer shaped like a pattern,
stacking a second insulating layer on the second metal layer shaped like the pattern so as to bury the second metal layer shaped like the pattern,
removing a second foil and a third foil constituting the three-layer metal foil,
stacking a third insulating layer and a resin film on the second insulating layer,
forming a second through hole which penetrates the third insulating layer, the resin film, and the second insulating layer and reaches the second metal layer, and
filling the second through hole with a conductive paste to form a second via as a paste via; and
separating the resin films in a plurality of layered bodies, then bonding the first insulating layer of one layered body and the second insulating layer of another layered body to each other, and then curing the third insulating layer to thereby obtain the multilayer substrate which is formed by stacking the plurality of layered bodies.
2 . The method for manufacturing the multilayer substrate according to claim 1 wherein
performing half etching of reducing a thickness of the second metal layer is executed after the applying the filled plating to the first through hole to form the plated via.
3 . The method for manufacturing the multilayer substrate according to claim 1 wherein
after the stacking the second insulating layer on the second metal layer shaped like the pattern so as to bury the second metal layer shaped like the pattern,
stacking a metal foil on the second insulating layer, pressure-bonding the second insulating layer in a semi-cured state to the second metal layer and the first insulating layer, and removing the metal foil after the pressure-bonding are executed.