SEAL FOR MICROELECTRONIC ASSEMBLY
Representative implementations of techniques and devices provide seals for sealing the joints of bonded microelectronic devices as well as bonded and sealed microelectronic assemblies. Seals are disposed at joined surfaces of stacked dies and wafers to seal the joined surfaces. The seals may be disposed at an exterior periphery of the bonded microelectronic devices or disposed within the periphery using the various techniques.
1 . A method of forming a microelectronic assembly, the method comprising:
contacting a first surface of a first microelectronic component with a second surface of a second microelectronic component and forming a bond joint between the first microelectronic component and the second microelectronic component, wherein the first surface comprises a first dielectric and a first conductive feature, and wherein the second surface comprises a second dielectric and a second conductive feature;
forming a dielectric-to-dielectric direct bond between the first dielectric and the second dielectric;
forming a metal-to-metal direct bond between the first conductive feature and the second conductive feature;
forming a channel comprising a closed shape surrounding an interior region, wherein a height of the channel extends at least across the bond joint; and
providing a conductive material in the channel.
2 . The method of claim 1 , wherein the channel extends through a thickness of the second microelectronic component and extends partially through the first microelectronic component.
3 . The method of claim 1 , wherein the channel is a continuous channel comprising a hermetic seal arranged to prevent fluid leakage at the bond joint greater than 1×10 −6 atm-cm 3 per second.
4 . The method of claim 1 , further comprising providing a microelectromechanical systems (MEMS) device in the interior region.
5 . The method of claim 1 , further comprising at least partially filling or completely filling the channel with the conductive material.
6 . The method of claim 1 , wherein the channel comprises sidewalls, and wherein the conductive material is disposed on the sidewalls.
7 . The method of claim 1 , wherein the channel is disposed over the bond joint and extends around an exterior of at least one of the first microelectronic component and the second microelectronic component.
8 . A method of forming a microelectronic assembly, the method comprising:
forming a bond joint between a first surface of a first microelectronic component and a second surface of a second microelectronic component, the forming further comprising:
directly bonding a first dielectric of the first surface to a second dielectric of the second surface;
directly bonding a first conductive feature of the first surface to a second conductive feature of the second surface; and
forming a channel, wherein the channel is disposed over the bond joint and the channel is annularly continuous around a periphery of the bond joint.
9 . The method of claim 8 , wherein the channel comprises a metallic material that seals the bond joint between the first microelectronic component and the second microelectronic component.
10 . The method of claim 8 , further comprising coupling a third microelectronic component to the second microelectronic component such that the second microelectronic component is positioned between the first microelectronic component and the third microelectronic component.
11 . The method of claim 10 , wherein the third microelectronic component comprises a logic device.
12 . The method of claim 11 , wherein the first microelectronic component comprises a cavity die and the second microelectronic component comprises a microelectromechanical systems (MEMS) die.
13 . The method of claim 8 , wherein the channel comprises a polymer material and a metal layer.
14 . The method of claim 8 , wherein the channel comprises a sinterable conductive paste or a fritted glass composite.
15 . A method of forming a microelectronic assembly, the method comprising:
forming a bond joint between a first surface of a first microelectronic component and a second surface of a second microelectronic component, wherein the first surface comprises a first dielectric and a first conductive feature, and wherein the second surface comprises a second dielectric and a second conductive feature;
directly bonding the first dielectric with the second dielectric;
directly bonding the first conductive feature with the second conductive feature; and
forming a channel having an annular shape, wherein the channel extends around a periphery of the first microelectronic component, and wherein the channel extends at least to the bond joint.
16 . The method of claim 15 , wherein the channel comprises a conductive material that seals the bond joint between the first microelectronic component and the second microelectronic component.
17 . The method of claim 15 , wherein a metallic material is disposed in the channel.
18 . The method of claim 17 , wherein the channel comprises a hermetic seal to prevent fluid leakage at the bond joint greater than 1×10 −6 atm-cm 3 per second.
19 . The method of claim 15 , further comprising disposing a layer of a metallic material over a sidewall surface of the channel.
20 . The method of claim 15 , further comprising coupling a third microelectronic component to the second microelectronic component such that the second microelectronic component is positioned between the first microelectronic component and the third microelectronic component.